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arXiv 1904.02589cond-mat.mtrl-sci
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用于宽带隙半导体缺陷研究的高温深能级瞬态谱系统

High-temperature deep-level transient spectroscopy system for defect studies in wide-bandgap semiconductors

S. Majdi, M. Gabrysch, N. Suntornwipat, F. Burmeister, R. Jonsson, K. K. Kovi, A. Hallen

摘要:

采用商用瞬态电容光谱法对宽带隙材料中的深缺陷态和杂质进行全面研究是一项挑战,需要非常高的温度。因此,我们研制了一套高温深能级瞬态谱(HT-DLTS)系统,可用于1100 K以下的测量。的温度范围的上限允许深缺陷和陷阱中心的带隙中的研究,比以前报道的任何材料中的DLTS表征更深。通过在300-950 K温度范围内对n型4 H-SiC中已知的本征缺陷进行测量来测试系统的性能。在4 H-SiC肖特基二极管上进行的实验观察与文献结果吻合良好。然而,DLTS测量受到操作和电极质量的限制。

英文摘要:

Full investigation of deep defect states and impurities in wide-bandgap materials by employing commercial transient capacitance spectroscopy is a challenge, demanding very high temperatures. Therefore, a high-temperature deep-level transient spectroscopy (HT-DLTS) system was developed for measurements up to 1100 K. The upper limit of the temperature range allows for the study of deep defects and trap centers in the bandgap, deeper than previously reported by DLTS characterization in any material. Performance of the system was tested by conducting measurements on the well-known intrinsic defects in n-type 4H-SiC in the temperature range 300-950 K. Experimental observations performed on 4H-SiC Schottky diodes were in good agreement with the literatures. However, the DLTS measurements were restricted by the operation and quality of the electrodes.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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