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arXiv 2602.07424cond-mat.mtrl-sci
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高效且稳健的p型晶体管基于超宽禁带半导体

Efficient and Robust p-type Transistor based on Ultra-wide-bandgap Semiconductor

Macau University of Science and Technology(澳门科技大学);Zhuhai MUST Science and Technology Research Institute(珠海澳门科技大学研究院);School of Physics and Astronomy, Monash University(蒙纳士大学物理与天文学院);Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University(南洋理工大学物理与数学科学学院物理与应用物理部);Department of Materials Science & Engineering, Monash University(蒙纳士大学材料科学与工程系);Faculty of Materials Science and Engineering, Kunming University of Science and Technology(昆明理工大学材料科学与工程学院);Department of Electrical and Electronic Engineering, The University of Melbourne(墨尔本大学电气与电子工程系);School of Science, RMIT University(皇家墨尔本理工大学理学院);Princeton Plasma Physics Laboratory(普林斯顿等离子体物理实验室);Bio21 Institute, The University of Melbourne(墨尔本大学生物21研究所);Research School of Chemistry, Australian National University(澳大利亚国立大学化学研究学院);Shanghai Key Laboratory of High Temperature Superconductors, Department of Physics, Shanghai University(上海大学物理系高温超导重点实验室);Centre for Materials Science, School of Chemistry and Physics, Queensland University of Technology(昆士兰科技大学化学与物理学院材料科学中心);Macao Institute of Materials Science and Engineering (MIMSE), Faculty of Innovation Engineering, Macau University of Science and Technology(澳门科技大学创新工程学院澳门材料科学与工程研究所);School of Electrical and Electronic Engineering, Nanyang Technological University(南洋理工大学电气与电子工程学院)
Kaijian Xing, Zherui Yang, Weiyao Zhao, Yuefeng Yin, Huiping Han, Shanhu Wang, Shifan Wang, James Bullock, Alastair Stacey, James A. Belcourt, Sergey Rubanov, H… 展开作者

Kaijian Xing, Zherui Yang, Weiyao Zhao, Yuefeng Yin, Huiping Han, Shanhu Wang, Shifan Wang, James Bullock, Alastair Stacey, James A. Belcourt, Sergey Rubanov, Hang Yin, David A. Broadway, Jean-Philippe Tetienne, Xinmao Yin, Liang Wu, Dong-Chen Qi, Michael S. Fuhrer, Qingdong Ou, Xiao Renshaw Wang

AI总结:

本研究通过异质整合超宽禁带半导体与高介电常数层,实现了高效且稳健的p型晶体管,具备高导通电流、低亚阈值摆幅和高迁移率,适用于未来功率电子和紫外光电应用。

摘要:

p型晶体管是半导体技术中不可或缺的组件,能够与n通道晶体管互补地用于计算、存储和通信。实现高稳健性和高效率对于p型晶体管来说非常 desirable 但具有挑战性,因为可用的半导体材料在可靠地传输空穴方面有限,且其激活能较高。在这里,我们通过范德瓦尔斯集成异质整合超宽禁带半导体和高介电常数层,实现了稳健且高效的p型晶体管。该p型晶体管采用氢化金刚石(禁带宽度5.6 eV)上的二维空穴通道,结合高介电常数(30.5)的SrTiO3钙钛矿膜。在室温下,该晶体管表现出稳定的运行,具有高导通电流(约200 mA/mm)、低亚阈值摆幅(70 mV/dec)、高空穴迁移率(566 cm²/Vs到572 cm²/Vs)和高开/关比(~10⁹)。此外,调节退火温度可使晶体管在增强模式或耗尽模式下运行。这种高效率的稳健p型晶体管在未来功率电子、紫外光电和恶劣环境电子应用中具有巨大潜力。

英文摘要:

The p-type transistor is an indispensable component of semiconductor technology, enabling complementary operation with n-channel transistors for computation, storage, and communication. Achieving both high robustness and high efficiency is highly desirable but challenging for p-type transistors due to limited semiconductors with reliable hole transport and their high activation energies. Here, we achieved a robust yet efficient p-type transistor by heterogeneously integrating an ultra-wide-bandgap semiconductor and a high-k dielectric layer through van der Waals integration. The p-type transistor employs a two-dimensional hole channel on hydrogenated diamond (bandgap 5.6 eV) combined with a high-k (30.5) SrTiO3 perovskite membrane. At room temperature, the transistor exhibits stable operation with a high on-current (~200 mA/mm), low subthreshold swing (70 mV/dec), high hole mobility (566 cm^2/Vs to 572 cm^2/Vs) and high on-off ratio (~10^9). Furthermore, tuning annealing temperature allows operation in either enhancement or depletion mode. The robust p-type transistor with high efficiency holds great potential for future power electronics, UV optoelectronics, and harsh-environment electronic applications.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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