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arXiv 1601.04476cond-mat.mes-hall
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SiO2/Si衬底上全石墨烯场效应晶体管的侧栅漏和场发射

Side-gate leakage and field emission in all-graphene field effect transistors on SiO2/Si substrate

Antonio Di Bartolomeo, Filippo Giubileo, Laura Iemmo, Francesco Romeo, Saverio Russo, Selim Unal, Maurizio Passacantando, Valentina Grossi, Anna Maria Cucolo

摘要:

我们制作平面全石墨烯场效应晶体管与自对准侧栅极在100 nm的主要石墨烯导电沟道,使用一个单一的光刻步骤。我们展示了低于1V的侧选通,电导调制为35%,在10 mV的漏极偏压下,导通电阻高达0.5 mS/mm。我们测量的平面泄漏沿SiO2/真空栅极电介质在很宽的电压范围内,报告迅速增长的电流超过15 V。我们揭示了驱动泄漏的微观机制,作为弗伦克尔-普尔运输通过SiO2的激活福勒-诺德海姆隧道在真空中,这在高电压下成为主导。我们报道了石墨烯片之间的场发射电流密度高达1uA/um。这些发现对于原子级薄器件的小型化至关重要。

英文摘要:

We fabricate planar all-graphene field-effect transistors with self-aligned side-gates at 100 nm from the main graphene conductive channel, using a single lithographic step. We demonstrate side-gating below 1V with conductance modulation of 35% and transconductance up to 0.5 mS/mm at 10 mV drain bias. We measure the planar leakage along the SiO2/vacuum gate dielectric over a wide voltage range, reporting rapidly growing current above 15 V. We unveil the microscopic mechanisms driving the leakage, as Frenkel-Poole transport through SiO2 up to the activation of Fowler-Nordheim tunneling in vacuum, which becomes dominant at high voltages. We report a field-emission current density as high as 1uA/um between graphene flakes. These findings are essential for the miniaturization of atomically thin devices.

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