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arXiv 0712.2180cond-mat.mtrl-sci
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有序Fe3Si薄膜外延生长的原位X射线衍射研究

In situ x-ray diffraction study of epitaxial growth of ordered Fe3Si films

Bernd Jenichen, Vladimir Kaganer, Wolfgang Braun, Roman Shayduk, Bradley Tinkham, Jens Herfort

摘要:

用掠入射X射线衍射法原位研究了GaAs(001)衬底上Fe_3Si的分子束外延生长。在低生长速率和接近200摄氏度的衬底温度下观察到Fe3Si膜的逐层生长。发现了生长过程中由于表面逐渐粗糙化而引起的X射线强度振荡的衰减,并得到了相应的不同阶地覆盖率的序列。沉积后表面恢复非常缓慢。在310摄氏度下退火结合单层Fe3Si的沉积使表面恢复到高度完美和最小粗糙度。我们的化学计量薄膜具有长程序和高质量的异质外延界面。

英文摘要:

Molecular beam epitaxy of Fe3Si on GaAs(001) is studied in situ by grazing incidence x-ray diffraction. Layer-by-layer growth of Fe3Si films is observed at a low growth rate and substrate temperatures near 200 degrees Celsius. A damping of x-ray intensity oscillations due to a gradual surface roughening during growth is found. The corresponding sequence of coverages of the different terrace levels is obtained. The after-deposition surface recovery is very slow. Annealing at 310 degrees Celsius combined with the deposition of one monolayer of Fe3Si restores the surface to high perfection and minimal roughness. Our stoichiometric films possess long-range order and a high quality heteroepitaxial interface.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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