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arXiv 1012.1917cond-mat.mtrl-sci
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快速热退火制备的全Heusler Co2FeGe合金薄膜的外延锗化

Epitaxial germanidation of full-Heusler Co2FeGe alloy thin films formed by rapid thermal annealing

Yota Takamura, Takuya Sakurai, Ryosho Nakane, Yusuke Shuto, Satoshi Sugahara

摘要:

采用快速热退火诱导锗化方法,在绝缘体上硅(SOI)衬底上外延生长Fe/Co/赝Ge(001)-on-insulator(GOI)多层膜,制备了全Heusler Co2 FeGe(CFG)合金薄膜。X射线衍射(XRD)分析结果表明,薄膜沿[001]方向外延生长,且具有面内外延结构,薄膜的面内外延关系为[100]|| GOI[100],虽然电影稍微包含纹理成分。强的(111)和(200)超晶格衍射强度表明,CFG薄膜具有高度有序的L21结构。薄膜的横截面高分辨率透射电子显微镜图像表明薄膜具有主要的外延和轻微的织构组分,这与XRD测量结果一致。外延元件直接生长在SOI衬底的BOX层上,而不形成任何界面层。

英文摘要:

The authors demonstrated that a full-Heusler Co2FeGe (CFG) alloy thin film was epitaxially grown by rapid-thermal-annealing-induced germanidation of an Fe/Co/pseudo-Ge(001)-on-insulator (GOI) multilayer formed on a Si-on-insulator (SOI) substrate. X-ray diffraction (XRD) measurements with the out-of-plane and in-plane configurations revealed that the CFG film was epitaxially grown along the [001] direction with the in-plane epitaxial relation of CFG[100]||GOI[100], although the film slightly contained a texture component. The strong (111) and (200) superlattice diffraction intensities indicated that the CFG film had a high degree of order for the L21 structure. Cross-sectional high-resolution transmission electron microscopy images of the film implied that the film had the dominant epitaxial and slight texture components, which was consistent with the XRD measurements. The epitaxial component was grown directly on the BOX layer of the SOI substrate without the formation of any interfacial layer.

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