用X射线衍射法测定硫系超晶格的化学计量比及其极限
Stoichiometry determination of chalcogenide superlattices by means of X-ray diffraction and its limits
摘要：
在本文中，我们探讨了潜在的化学计量确定硫属化物超晶格，有前途的候选人为下一代相变存储器，通过X射线衍射。为此，一组外延GeTe/Sb 2 Te 3超晶格样品具有不同的层厚度的外延沉积。采用运动学散射理论将平均成分与衍射特征联系起来。观察到的超晶格参考单位晶胞的晶格常数遵循Vegard定律，使得能够进行直接且非破坏性的化学计量测定。
英文摘要：
In this paper we explore the potential of stoichiometry determination for chalcogenide superlattices, promising candidates for next-generation phase-change memory, via X-ray diffraction. To this end, a set of epitaxial GeTe/Sb2Te3 superlattice samples with varying layer thicknesses is sputter-deposited. Kinematical scattering theory is employed to link the average composition with the diffraction features. The observed lattice constants of the superlattice reference unit cell follow Vegard's law, enabling a straight-forward and non-destructive stoichiometry determination.
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