未掺杂和Si掺杂的GaN薄膜通过在Ar-N2混合气氛中反应射频溅射GaAs(及Si)外延生长于蓝宝石衬底上。在100% N2条件下生长的未掺杂GaN薄膜电阻率约为2 x 10^5 Ω cm,而在Si掺杂薄膜中降至约1 Ω cm,揭示了Si掺杂的效果。随着N2比例从100%降至75%,Si掺杂薄膜的载流子浓度从约7 x 10^18 cm^-3增加到约2 x 10^19 cm^-3,但当N2进一步降至20%时基本保持不变,这可由Si掺杂饱和、Ga间隙原子增加以及N间隙原子和Ga空位补偿的效应来解释。在低于20% N2条件下生长的未掺杂和Si掺杂薄膜表现出相似的载流子浓度(约10^20 cm^-3),这是由于Ga间隙原子占主导地位。未掺杂和Si掺杂薄膜均为简并半导体,并表现出迁移率随载流子浓度和温度升高而增加,利用补偿比作为拟合参数,通过电离杂质散射和位错散射的综合效应进行了分析。在载流子浓度低于10^19 cm^-3时,迁移率由电离杂质散射和位错散射共同决定;而在更高载流子浓度下,电离杂质散射占主导地位,并受受主补偿的限制。尽管具有简并特性,薄膜仍表现出载流子浓度随温度轻微下降,同时迁移率近乎线性下降,这可通过考虑带边涨落效应时补偿比随温度降低而略微增加来解释。
英文摘要:
Undoped and Si-doped GaN films were grown epitaxially on sapphire by reactive rf sputtering of GaAs (and Si) in Ar-N2 mixture. The resistivity of undoped GaN film grown at 100% N2 was ~2 x 105 Ω cm, which reduced to ~1 Ω cm in Si-doped film, revealing the effect of Si doping. With decrease of N2 from 100% to 75%, the carrier concentration of Si-doped films increased from ~7 x 1018 cm-3 to ~2 x 1019 cm-3, but remained practically unchanged as N2 was decreased to 20%, which is explained by effects due to saturation of Si doping and increase of Ga interstitials as well as compensation by N interstitials and Ga vacancies. Undoped and Si-doped films grown below 20% N2 displayed similar carrier concentrations (~1020 cm-3), due to dominance of Ga interstitials. Both undoped and Si-doped films were degenerate and displayed increase of mobility with carrier concentration and temperature, which was analyzed by the combined effect of ionized impurity and dislocation scattering, using compensation ratio as fitting parameter. At carrier concentrations below 1019 cm-3, the mobility was governed by both ionized impurity and dislocation scattering, while at higher carrier concentrations, ionized impurity scattering was found to dominate, limited by compensation due to acceptors. In spite of the degenerate character, the films displayed a small decrease of carrier concentration with temperature, along with a nearly linear decrease of mobility, which are explained by a marginal increase of compensation ratio with decrease of temperature, taking into account the band edge fluctuation effects.
Crystal orientation relation and macroscopic surface roughness in hetero-epitaxially grown graphene on Cu/mica
石墨烯电子产品对衬底上的清洁、平坦和取向识别的石墨烯有很高的需求。在这项研究中,异质外延石墨烯生长Cu(111)/云母(001)的化学气相沉积进行了研究,以检查的适用性,顶栅绝缘体的石墨烯的研究,以及石墨烯沟道的研究,通过转移到SiO2/Si衬底。在调整石墨烯生长条件后,石墨烯/Cu/云母衬底的表面粗糙度和平均光滑面积分别为~0.34 nm和~100 um 2。石墨烯/Cu/云母衬底中石墨烯的取向可以通过Cu的六方空隙形态来识别。此外,我们证明了相对较高的迁移率~4500 cm ~ 2 V-1 s-1的石墨烯转移到SiO2/Si衬底上。这些结果表明,本发明的石墨烯/Cu/云母衬底可用于石墨烯上的顶栅绝缘体研究。
Importance of Paramagnetic Background Subtraction for Determining the Magnetic Moment in Epitaxially Grown Monolayer and Few-Layer van der Waals Magnets
Magnetotransport in Bi$_2$Se$_3$ thin films epitaxially grown on Ge(111)
像Bi $_2$ Se $_3$的拓扑绝缘体(TI)是一类具有拓扑保护的表面态的材料,其中自旋-动量锁定可以实现自旋极化和缺陷容限传输。在本工作中,我们实现了在微电子关键材料锗上外延生长Bi $_2$ Se $_3$薄膜。锗还表现出关于电子自旋的有趣性质,例如在室温下几微米的自旋扩散长度。通过在锗上生长Bi $_2$ Se $_3$,我们旨在将Ge的长自旋扩散长度与Bi $_2$ Se $_3$表面的自旋-动量锁定结合起来。我们首先进行了彻底的结构分析的Bi $_2$ Se $_3$薄膜,使用电子和X射线衍射以及原子力显微镜。然后,在低温下的磁输运测量表明,由于二维运输的拓扑保护的表面状态的Bi $_2$ Se $_3$的签名弱反本地化。有趣的是,磁输运测量还指出,导电沟道可以通过偏置电压或施加的磁场在Bi $_2$ Se $_3$膜和下面的Ge层之间调谐。这一结果表明,Bi $_2$ Se $_3$ /Ge结是一个很有前途的候选人,用于调谐在TI和半导体之间的界面处的自旋相关现象。
Oxygen Reduction Electrocatalysis with Epitaxially Grown Spinel MnFe$_{2}$O$_{4}$ and Fe$_{3}$O$_{4}$
纳米晶MnFe $_{2}$ O $_{4}$已显示出作为碱性溶液中的氧还原反应(ORR)的催化剂的前景,但该材料作为高度有序的薄膜催化剂的研究很少。为了研究表面终止和Mn和Fe位置占据的作用,使用分子束外延在(001)和(111)取向的Nb:SrTiO $_{3}$钙钛矿衬底上生长外延MnFe $_{2}$ O $_{4}$和Fe $_{3}$ O $_{4}$尖晶石氧化物膜,并研究其作为氧还原反应(ORR)的电催化剂。HRXRD和XPS显示了纯相材料的合成,而STEM和RHEED分析表明在(001)和(111)取向的基底上(111)表面终止的金字塔的岛状生长,与文献一致,并且归因于尖晶石膜和钙钛矿基底之间的晶格失配。在N $_{2}$气氛下的循环伏安图基于MnFe $_{2}$ O $_{4}$和Fe $_{3}$ O $_{4}$的比较揭示了Mn和Fe表面终止的不同氧化还原特征。在O $_{2}$气氛下,在Mn和Fe氧化还原特征下观察到氧的电催化还原;然而,仅在与Fe还原一致的电位下实现扩散限制电流。该结果与文献中报道的纳米晶MnFe $_{2}$ O $_{4}$的结果形成对比,其中扩散限制电流是用Mn基催化剂实现的。这种差异归因于Mn表面终止的低密度,如通过来自在N $_{2}$下收集的CV的电流的积分所确定的,除了由于反转程度而导致的通过MnFe $_{2}$ O $_…
Undoped Strained Ge Quantum Well with Ultrahigh Mobility Grown by Reduce Pressure Chemical Vapor Deposition
采用反渐变技术在30 nm Ge0.8Si0.2浅势垒下制备了非掺杂Ge量子阱。下势垒由Ge_(0.8)Si_(0.2)→ Ge_(0.9)Si_(0.1)依次淀积,Ge含量的变化形成了一个尖锐的界面,可以抑制穿透到未掺杂Ge量子阱中的穿透位错密度。Ge_(0.8)Si_(0.2)势垒在Ge量子阱中引入了足够的面内平行应变-0.41%。具有浅埋沟道的异质结场效应晶体管在2.51 E-11 cm 2的低渗透密度下获得了超过2 E6 cm 2/Vs的高二维空穴气(2DHG)迁移率。我们还发现了在高密度和高磁场下可调谐的分数量子霍尔效应。这种方法将应变锗定义为提供用于调谐自旋轨道耦合强度以用于快速和相干量子计算的材料基础。
Revealing the (111) surface electronic structure of epitaxially grown Na$_2$KSb photocathode
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences(俄罗斯科学院西伯利亚分院列扎诺夫半导体物理研究所);Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences(俄罗斯科学院西伯利亚分院博列斯科夫催化研究所);Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences(俄罗斯科学院西伯利亚分院强度物理学与材料科学研究所);Ioffe Institute(约费物理技术研究所);JSC "EKRAN FEP"
Epitaxial germanidation of full-Heusler Co2FeGe alloy thin films formed by rapid thermal annealing
采用快速热退火诱导锗化方法,在绝缘体上硅(SOI)衬底上外延生长Fe/Co/赝Ge(001)-on-insulator(GOI)多层膜,制备了全Heusler Co2 FeGe(CFG)合金薄膜。X射线衍射(XRD)分析结果表明,薄膜沿[001]方向外延生长,且具有面内外延结构,薄膜的面内外延关系为[100]|| GOI[100],虽然电影稍微包含纹理成分。强的(111)和(200)超晶格衍射强度表明,CFG薄膜具有高度有序的L21结构。薄膜的横截面高分辨率透射电子显微镜图像表明薄膜具有主要的外延和轻微的织构组分,这与XRD测量结果一致。外延元件直接生长在SOI衬底的BOX层上,而不形成任何界面层。