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arXiv 2309.08899cond-mat.mtrl-sci
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外延生长的未掺杂和Si掺杂简并GaN薄膜中的电输运

Electrical transport in epitaxially grown undoped and Si-doped degenerate GaN films

Mohammad Monish, S. S. Major

AI总结:

研究了反应溅射外延生长的未掺杂和Si掺杂GaN薄膜的电输运性质,揭示了Si掺杂、Ga间隙原子及补偿机制对载流子浓度和迁移率的影响,并用散射模型解释了简并薄膜的输运行为。

摘要:

未掺杂和Si掺杂的GaN薄膜通过在Ar-N2混合气氛中反应射频溅射GaAs(及Si)外延生长于蓝宝石衬底上。在100% N2条件下生长的未掺杂GaN薄膜电阻率约为2 x 10^5 Ω cm,而在Si掺杂薄膜中降至约1 Ω cm,揭示了Si掺杂的效果。随着N2比例从100%降至75%,Si掺杂薄膜的载流子浓度从约7 x 10^18 cm^-3增加到约2 x 10^19 cm^-3,但当N2进一步降至20%时基本保持不变,这可由Si掺杂饱和、Ga间隙原子增加以及N间隙原子和Ga空位补偿的效应来解释。在低于20% N2条件下生长的未掺杂和Si掺杂薄膜表现出相似的载流子浓度(约10^20 cm^-3),这是由于Ga间隙原子占主导地位。未掺杂和Si掺杂薄膜均为简并半导体,并表现出迁移率随载流子浓度和温度升高而增加,利用补偿比作为拟合参数,通过电离杂质散射和位错散射的综合效应进行了分析。在载流子浓度低于10^19 cm^-3时,迁移率由电离杂质散射和位错散射共同决定;而在更高载流子浓度下,电离杂质散射占主导地位,并受受主补偿的限制。尽管具有简并特性,薄膜仍表现出载流子浓度随温度轻微下降,同时迁移率近乎线性下降,这可通过考虑带边涨落效应时补偿比随温度降低而略微增加来解释。

英文摘要:

Undoped and Si-doped GaN films were grown epitaxially on sapphire by reactive rf sputtering of GaAs (and Si) in Ar-N2 mixture. The resistivity of undoped GaN film grown at 100% N2 was ~2 x 105 Ω cm, which reduced to ~1 Ω cm in Si-doped film, revealing the effect of Si doping. With decrease of N2 from 100% to 75%, the carrier concentration of Si-doped films increased from ~7 x 1018 cm-3 to ~2 x 1019 cm-3, but remained practically unchanged as N2 was decreased to 20%, which is explained by effects due to saturation of Si doping and increase of Ga interstitials as well as compensation by N interstitials and Ga vacancies. Undoped and Si-doped films grown below 20% N2 displayed similar carrier concentrations (~1020 cm-3), due to dominance of Ga interstitials. Both undoped and Si-doped films were degenerate and displayed increase of mobility with carrier concentration and temperature, which was analyzed by the combined effect of ionized impurity and dislocation scattering, using compensation ratio as fitting parameter. At carrier concentrations below 1019 cm-3, the mobility was governed by both ionized impurity and dislocation scattering, while at higher carrier concentrations, ionized impurity scattering was found to dominate, limited by compensation due to acceptors. In spite of the degenerate character, the films displayed a small decrease of carrier concentration with temperature, along with a nearly linear decrease of mobility, which are explained by a marginal increase of compensation ratio with decrease of temperature, taking into account the band edge fluctuation effects.

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