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arXiv 2103.13562cond-mat.mtrl-sciphysics.app-ph
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快重离子辐照下$β$ $_2$ O $_3$肖特基势垒二极管的退化

Degradiation of $β$-Ga$_2$O$_3$ Schottky barrier diode under swift heavy ion irradiation

Wen-Si Ai, Jie Liu, Qian Feng, Peng-Fei Zhai, Pei-Pei Hu, Jian Zeng, Sheng-Xia Zhang, Zong-Zhen Li, Li Liu, Xiao-Yu Yan, You-Mei Sun

摘要:

研究了快重离子(2096 MeV Ta离子)辐照$β$ -Ga $_2$ O $_3$肖特基势垒二极管(SBD)器件的电学特性和微结构。结果表明,$β$ $_2$ O $_3$ SBD器件辐照后,器件的导通电压Von、导通电阻Ron、理想因子n和反向漏电流密度Jr均发生了可靠性下降。此外,漂移层的载流子浓度显著降低,并且计算的载流子去除率为5*106 - 1.3*107 cm-1。在整个$β$ O $_3$基质中目视观察到由快速重离子诱导的潜在径迹。此外,晶体结构的轨道是完全非晶化。Ta离子轰击引起的潜径迹是导致载流子迁移率和载流子浓度下降的原因。最终,这些缺陷导致器件的电特性劣化。通过比较载流子去除率,$β$ $_2$ O $_3$ SBD器件比SiC和GAN器件对快重离子辐照更敏感。

英文摘要:

The electrical characteristics and microstructures of $β$-Ga$_2$O$_3$ Schottky barrier diode (SBD) devices irradiated with swift heavy ions (2096 MeV Ta ions) have been studied. It was found that $β$-Ga$_2$O$_3$ SBD devices showed the reliability degradation after irradiation, including turn-on voltage Von, on-resistance Ron, ideality factor n and the reverse leakage current density Jr. In addition, the carrier concentration of the drift layer was decreased significantly and the calculated carrier removal rates were 5*106 - 1.3*107 cm-1. Latent tracks induced by swift heavy ions were observed visually in the whole $β$-Ga$_2$O$_3$ matrix. Furthermore, crystal structure of tracks was amorphized completely. The latent tracks induced by Ta ions bombardments were found to be the reason for the decrease in carrier mobility and carrier concentration. Eventually, these defects caused the degradation of electrical characteristics of the devices. By comparing the carrier removal rates, the $β$-Ga$_2$O$_3$ SBD devices were more sensitive to swift heavy ions irradiation than SiC and GaN devices.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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