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arXiv 2303.09810cond-mat.mtrl-sci
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n型4H-SiC肖特基势垒二极管中与硼相关的缺陷

Boron-related defects in n-type 4H-SiC Schottky barrier diodes

Tihomir Knežević, Eva Jelavić, Yuichi Yamazaki, Takeshi Ohshima, Takahiro Makino, Ivana Capan

AI总结:

本文通过少数载流子瞬态谱研究了n型4H-SiC肖特基二极管中硼相关缺陷,发现高浓度硼引入深能级缺陷但未恶化器件电学特性。

摘要:

我们报道了通过少数载流子瞬态谱(MCTS)研究的低掺杂n型(氮掺杂)4H-SiC半透明肖特基势垒二极管(SBDs)中与硼相关的缺陷。在化学气相沉积(CVD)晶体生长过程中引入了未知浓度的硼。发现硼的掺入导致至少两种与硼相关的深能级缺陷的出现,即浅硼(B)和深硼(D中心),其浓度高达2×10¹⁵ cm⁻³。尽管硼浓度比氮掺杂浓度高出近一个数量级,但n型4H-SiC SBDs的稳态电学特性并未恶化。

英文摘要:

We report on boron-related defects in the low-doped n-type (nitrogen-doped) 4H-SiC semitransparent Schottky barrier diodes (SBDs) studied by minority carrier transient spectroscopy (MCTS). An unknown concentration of boron was introduced during chemical vapor deposition (CVD) crystal growth. Boron incorporation was found to lead to the appearance of at least two boron-related deep-level defects, namely, shallow (B) and deep boron (D-center), with concentrations as high as 2 x 1015 cm-3. Even though the boron concentration exceeded the nitrogen doping concentration by almost an order of magnitude, the steady-state electrical characteristics of the n-type 4H-SiC SBDs did not deteriorate.

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