Vertical diamond Schottky diodes with blocking voltages $V_{\text{BD}} > 2.4 \text{ kV}$ and on-resistances $R_{\text{On}} < 400 \text{ m}Ω\text{cm}^{2}$ were fabricated on homoepitaxially grown diamond layers with different surface morphologies. The morphology (smooth as-grown, hillock-rich, polished) influences the Schottky barrier, the carrier transport properties, and consequently the device performance. The smooth as-grown sample exhibited a low reverse current density $J_{\text{Rev}} < 10^{-4} \text{ A}/\text{cm}^{2}$ for reverse voltages up to $2.2 \text{ kV}$. The hillock-rich sample blocked similar voltages with a slight increase in the reverse current density ($J_{\text{Rev}} < 10^{-3} \text{ A}/\text{cm}^{2}$). The calculated 1D-breakdown field, however, was reduced by $30 \text{ } \%$, indicating a field enhancement induced by the inhomogeneous surface. The polished sample demonstrated a similar breakdown voltage and reverse current density as the smooth as-grown sample, suggesting that a polished surface can be suitable for device fabrication. However, a statistical analysis of several diodes of each sample showed the importance of the substrate quality: A high density of defects both reduces the feasible device area and increases the reverse current density. In forward direction, the hillock-rich sample exhibited a secondary Schottky barrier, which could be fitted with a modified thermionic emission model employing the Lambert W-function. Both polished and smooth sample showed nearly ideal thermionic emission with ideality factors $1.08$ and $1.03$, respectively. Compared with literature, all three diodes exhibit an improved Baliga Figure of Merit for diamond Schottky diodes with $V_{\text{BD}} > 2 \text{ kV}$.
We have demonstrated that GaN Schottky diodes can be used for high energy (64.8 MeV) proton detection. Such proton beams are used for tumor treatment, for which accurate and radiation resistant detectors are needed. Schottky diodes have been measured to be highly sensitive to protons, to have a linear response with beam intensity and fast enough for the application. Some photoconductive gain was found in the diode leading to a good compromise between responsivity and response time. The imaging capability of GaN diodes in proton detection is also demonstrated.
We report findings on the Ion Beam Induced Charge (IBIC) characterization of a 4H-SiC Schottky barrier diode (SBD), in terms of the modification of the Charge Collection Efficiency (CCE) distribution induced by 20 MeV C ions irradiations with fluences ranging from 20 to 200 ions/um2. The lateral IBIC microscopy with 4 MeV protons over the SBD cross section, carried out on the pristine diode evidenced the widening of the depletion layer extension as function of the applied bias and allowed the measurement of the minority carrier diffusion lengths. After the irradiation with C ions, lateral IBIC…
Traditionally, Schottky diodes are used statically in the electronic information industry but dynamic state Schottky diodes based applications have been rarely explored. Herein, a novel Schottky diode named moving Schottky diode generator has been designed, which can convert mechanical energy into electrical energy with voltage output as high as 0.6V, by means of lateral movement between graphene/metal film and semiconductor, where the semiconductor can be non-piezoelectric materials. The mechanism is based on the built-in electric field separation of drifting electrons in moving van der Waals…
Recently demonstrated metal-semiconductor heterojunctions with few-atom thickness show their promise as 2D Schottky contacts for future integrated circuits and nanoelectronics. The theory for 3D Schottky contacts, however, fails on these low-dimensional systems. Here, we propose a new model that yields carrier distribution and potential profile across the 2D metal-semiconductor heterojunction under the equilibrium condition, based on the input from first-principle calculations. Our calculation also suggests that, at the same forward bias, the current density of a stack of 2D graphene-phosphore…
We present the optoelectronic characterization of two graphene/silicon Schottky junctions, fabricated by transferring CVD-graphene on flat and nanotip-patterned n-Si substrates, respectively. We demonstrate record photo responsivity, exceeding 2.5 A/W under white light, which we attribute to the contribution of charges photogenerated in the surrounding region of the flat junction or to the internal gain by impact ionization caused by the enhanced field on the nanotips.
An aluminum nitride (AlN) Schottky barrier diode (SBD) was fabricated on a nonpolar AlN crystal grown on tungsten substrate by physical vapor transport. The Ni/Au-AlN SBD features a low ideality factor n of 3.3 and an effective Schottky barrier height (SBH) of 1.05 eV at room temperature. The ideality factor n decreases and the effective SBH increases at high temperatures. The temperature dependences of n and SBH were explained using an inhomogeneous model. A mean SBH of 2.105 eV was obtained for the Ni-AlN Schottky junction from the inhomogeneity analysis of the current-voltage characteristic…
In this letter, we demonstrate high-performance lateral AlGaN/GaN Schottky barrier diodes (SBD) on Si substrate with a recessed-anode structure. The optimized rapid etch process provides results in improving etching quality with a 0.26-nm roughness of the anode recessed surface. By using the high work function metal Pt as the Schottky electrode, a low Von of 0.71 V is obtained with a high uniformity of 0.023 V for 40 devices. Supported by the flat anode recess surface and related field plate design, the SBD device with the anode-cathode spacing of 15 um show the Ron,sp of 1.53 mOhm.cm2 only, t…
This paper presents vertical (001) oriented $β$-Ga$_2$O$_3$ field plated (FP) Schottky barrier diode (SBD) with a novel extreme permittivity dielectric field oxide. A thin drift layer of 1.7 $μm$ was used to enable a punch-through (PT) field profile and very low differential specific on-resistance (R$_{on-sp}$) of 0.32 m$Ω$-cm$^{2}$. The extreme permittivity field plate oxide facilitated the lateral spread of the electric field profile beyond the field plate edge and enabled a breakdown voltage ($V_{br}$) of 687 V. The edge termination efficiency increases from 13.5 $\%$ for non-field plated s…
The small silicon chip of Schottky diode (0.8x0.8x0.4 mm3) with planar arrangement of electrodes (chip PSD) as temperature sensor, which functions under the operating conditions of pressure sensor, was developed. The forward I-V characteristic of chip PSD is determined by potential barrier between Mo and n-Si (ND = 3x1015 cm-3). Forward voltage UF = 208 mV and temperature coefficient TC = -1.635 mV/C (with linearity kT <0.4% for temperature range of -65 to +85 C) at supply current IF = 1 mA is achieved. The reverse I-V characteristic has high breakdown voltage UBR > 85 V and low leakage curren…
The electrical characteristics and microstructures of $β$-Ga$_2$O$_3$ Schottky barrier diode (SBD) devices irradiated with swift heavy ions (2096 MeV Ta ions) have been studied. It was found that $β$-Ga$_2$O$_3$ SBD devices showed the reliability degradation after irradiation, including turn-on voltage Von, on-resistance Ron, ideality factor n and the reverse leakage current density Jr. In addition, the carrier concentration of the drift layer was decreased significantly and the calculated carrier removal rates were 5*106 - 1.3*107 cm-1. Latent tracks induced by swift heavy ions were observed …
GaN-based lateral Schottky diodes (SBDs) have attracted great attention for high-power applications due to its combined high electron mobility and large critical breakdown field. However, the breakdown voltage (BV) of the SBDs are far from exploiting the material advantages of GaN at present, limiting the desire to use GaN for ultra-high voltage (UHV) applications. Then, a golden question is whether the excellent properties of GaN-based materials can be practically used in the UHV field? Here we demonstrate UHV AlGaN/GaN SBDs on sapphire with a BV of 10.6 kV, a specific on-resistance of 25.8 m…
In this letter, we demonstrate a lateral AlGaN/GaN Schottky barrier diode (SBD) on sapphire substrate with low turn-on voltage (Von) and high breakdown voltage (VBK). By using a double barrier anode (DBA) structure formed by the mixture of Platinum (Pt) and Tantalum (Ta), the Von of the SBD can be as low as 0.36 V with a leakage current of 2.5E-6 A/mm. Supported by the high-quality carbon-doped GaN buffer on sapphire, the VBK can reach more than 10 kV with the anode-to-cathode spacing of 85 μm. Combining the VBK and the specific on-resistance (Ron,sp) of 25.1 mΩ.cm^2, the power figure of merit…
In this paper, the electrical behavior of tungsten carbide (WC) Schottky barrier on 4H-SiC was investigated. First, a statistical current-voltage (I-V) analysis in forward bias, performed on a set of equivalent diodes, showed a symmetric Gaussian-like distribution of the barrier heights after annealing at 700°C, where a low Schottky barrier height ($Φ$B=1.05 eV) and an ideality factor n=1.06 were measured. The low value of the barrier height makes such a WC contact an interesting candidate to reduce the conduction losses in 4H-SiC Schottky diodes. A deeper characterization has been carried out…
This work presents the electrostatic analysis of a novel Ga$_2$O$_3$ vertical Schottky diode with three different guard ring configurations to reduce the peak electric field at the metal edges. Highly doped p-type GaN, p-type nonpolar AlGaN and polarization doped graded p-AlGaN are simulated and analyzed as the guard ring material, which forms a heterojunction with the Ga$_2$O$_3$ drift layer. Guard ring with non-polar graded p-AlGaN with a bandgap larger than Ga$_2$O$_3$ is found to show the best performance in terms of screening the electric field at the metal edges. The proposed guard ring …
Graphene-Silicon Schottky diode photodetectors possess beneficial properties such as high responsivities and detectivities, broad spectral wavelength operation and high operating speeds. Various routes and architectures have been employed in the past to fabricate devices. Devices are commonly based on the removal of the silicon-oxide layer on the surface of silicon by wet-etching before deposition of graphene on top of silicon to form the graphene-silicon Schottky junction. In this work, we systematically investigate the influence of the interfacial oxide layer, the fabrication technique emplo…
Comparison of reverse current mechanisms in GaN Schottky diodes grown on sapphire versus ammonothermal GaN substrates
IEMN, Institut d’Electronique de Microélectronique et de Nanotechnologie（微电子与纳米技术研究所）；Institute of High Pressure Physic, Polish Academy of Sciences（波兰科学院高压物理研究所）
In this paper, a transient delayed rising and fall time of $β$-Ga$_2$O$_3$ NMs Schottky barrier diodes (SBDs) formed on four different substrates (diamond, Si, sapphire, and polyimide) were measured using a sub-micron second resolution time-resolved electrical measurement system under a different temperature condition. The devices exhibited noticeably less-delayed turn-on-/off- the transient time when $β$-Ga$_2$O$_3$ NMs SBDs were transfer-printed on a high-k substrate. Furthermore, a relationship between the $β$-Ga$_2$O$_3$ NM thicknesses and their transient characteristics were systematicall…
Graphene-silicon (GS) Schottky junctions have been demonstrated as an efficient architecture for photodetection. However, the response speed of such devices for free space light detection has so far been limited to 10's-100's of kHz for wavelength $λ>$ 500nm. Here, we demonstrate graphene-silicon Schottky junction photodetectors fabricated on a silicon-on-insulator substrate (SOI) with response speeds approaching 1GHz, attributed to the reduction of the photo-active silicon layer thickness to 10$μ$m and with it a suppression of speed-limiting diffusion currents. Graphene-silicon-on-insulator p…
Omnisys Instruments AB；Department of Microtechnology and Nanoscience, Chalmers University of Technology（查尔姆斯理工大学微技术与纳米科学系）；Low Noise Factory AB；EmriX Consulting AB
This work presents the design of beta-Ga2O3 schottky barrier diode using high-k dielectric superjunction to significantly enhance the breakdown voltage vs on-resistance trade-off beyond its already high unipolar figure of merit. The device parameters are optimized using both TCAD simulations and analytical modeling using conformal mapping technique. The dielectric superjunction structure is found to be highly sensitive to the device dimensions and the dielectric constant of the insulator. The aspect ratio, which is the ratio of the length to the width of the drift region, is found to be the mo…
Electrical excitation of color centers in phosphorus-doped diamond Schottky diodes
University of Siegen（锡根大学）；Moscow Center for Advanced Studies（莫斯科高级研究中心）；Istituto Nazionale di Fisica Nucleare, Sezione di Firenze（意大利国家核物理研究所佛罗伦萨分部）；Department of Physics and Astronomy, University of Florence（佛罗伦萨大学物理与天文学系）；National Institute of Optics (INO), National Research Council (CNR)（国家光学研究所（INO），国家研究理事会（CNR））；Institute for Materials Research (IMO) & IMOMEC, Hasselt University & IMEC vzw（哈瑟尔特大学材料研究所（IMO）及IMOMEC，IMEC公司）；Department of Electrical and Computer Engineering, Michigan State University（密歇根州立大学电气与计算机工程系）；Lehrstuhl für Oberflächen- und Werkstofftechnologien, University of Siegen（锡根大学表面与材料技术教席）；Group of Graphene-based Nanotechnology, University of Siegen（锡根大学石墨烯纳米技术小组）
The origins of the leakage currents of p-n junction and Schottky diodes in all kinds of materials: A novel explanation based on impurity-photovoltaic-effect due to the self-absorption of the room-temperature infrared emission from materials
Institute of Semiconductors, Chinese Academy of Sciences（中国科学院半导体研究所）
We demonstrate an Nb$_{2}$O$_{5}$/$β$-Ga$_{2}$O$_{3}$ metal-insulator-semiconductor (MIS) hetero-junction diode with Nb$_{2}$O$_{5}$ as the high-k dielectric insulator for more efficient electric field management resulting in enhanced breakdown characteristics compared to a $β$-Ga$_{2}$O$_{3}$ Schottky barrier diode. The Nb$_{2}$O$_{5}$ dielectric films were grown using atomic layer deposition and exhibited a high dielectric constant of 50. The high dielectric constant resulted in a 5$\times$ lower electric field at the metal/dielectric interface in the MIS diode compared to the metal/$β$-Ga$_…
The reverse leakage current through a Schottky barrier transitions from a thermionic-emission dominated regime to a barrier-tunneling dominated regime as the surface electric field increases. In this study, we evaluate such transition electric field ($E_{\rm T}$) in $β$-Ga$_{2}$O$_{3}$ using a numerical reverse leakage model. $E_{\rm T}$ is found to have very weak dependence on the doping concentration and barrier height, thus a near-universal temperature dependence suffices and is given by a simple empirical expression in Ga$_{2}$O$_{3}$. With the help of a field-plate design, we observed exp…
Heterostructures of two-dimensional (2D) and three-dimensional (3D) materials form efficient devices for utilizing the properties of both classes of materials. Graphene/silicon (G/Si) Schottky diodes have been studied extensively with respect to their optoelectronic properties. Here, we introduce a method to analyze measured capacitance-voltage data of G/Si Schottky diodes connected in parallel with G/silicon dioxide/Si (GIS) capacitors. We also demonstrate the accurate extraction of the built-in potential ($Φ$$_{bi}$) and the Schottky barrier height from the measurement data independent of th…
The electrical behavior of Ni Schottky barrier formed onto heavily doped (ND>1019 cm-3) n-type phosphorous implanted silicon carbide (4H-SiC) was investigated, with a focus on the current transport mechanisms in both forward and reverse bias. The forward current-voltage characterization of Schottky diodes showed that the predominant current transport is a thermionic-field emission mechanism. On the other hand, the reverse bias characteristics could not be described by a unique mechanism. In fact, under moderate reverse bias, implantation-induced damage is responsible for the temperature increa…
We demonstrate an RF energy harvesting rectenna design based on a metamaterial perfect absorber (MPA). With the embedded Schottky diodes, the rectenna converts captured RF waves to DC power. The Fabry-Perot (FP) cavity resonance of the MPA greatly improves the amount of energy captured. Furthermore, the FP resonance exhibits a high Q-factor and significantly increases the voltage across the Schottky diodes, which improves the rectification efficiency, particularly at low power. This leads to factor of 16 improvement of RF-DC conversion efficiency at ambient intensity level.
In this paper, we investigate the electrical evolution of tungsten (W) and tungsten carbide (WC) Schottky contacts on 4H-SiC subjected to thermal treatments at different annealing temperatures from 475 to 700 ° C. For each annealing temperature, the uniformity of the Schottky barrier height (${ϕ_B}$) and ideality factor (n) was monitored by current-voltage (I-V) measurements in forward bias, performed over sets of equivalent diodes. Good values of n (below 1.05) were found for both contacts up to thermal annealing at 700 ° C. On the other hand, the barrier of the two contacts behaves different…
Graphene / silicon (G/Si) heterostructures have been studied extensively in the past years for applications such as photodiodes, photodetectors and solar cells, with a growing focus on efficiency and performance. Here, a specific contact pattern scheme with interdigitated Schottky and graphene/insulator/silicon (GIS) structures is explored to experimentally demonstrate highly sensitive G/Si photodiodes. With the proposed design, an external quantum efficiency (EQE) of > 80 % is achieved for wavelengths ranging from 380 to 930 nm. A maximum EQE of 98% is observed at 850 nm, where the responsivi…
Short wavelength ultraviolet (UV-C) light deactivates DNA of any germs, including multiresistive bacteria and viruses like COVID-19. Two-dimensional (2D) material-based UV-C light emitting diodes can potentially be integrated into arbitrary surfaces to allow for shadow-free surface disinfection. In this work, we perform a series of first-principles calculations to identify the core components of ultrathin LEDs based on hexagonal boron nitride (hBN). The electrons and holes are predicted to be confined in multiple quantum wells (MQWs) by combining hBN layers with different stacking orders. Vari…
Diodes made of heterostructures of the 2D material graphene and conventional 3D materials are reviewed in this manuscript. Several applications in high frequency electronics and optoelectronics are highlighted. In particular, advantages of metal-insulator-graphene (MIG) diodes over conventional metal-insulator-metal diodes are discussed with respect to relevant figures-of-merit. The MIG concept is extended to 1D diodes. Several experimentally implemented radio frequency circuit applications with MIG diodes as active elements are presented. Furthermore, graphene-silicon Schottky diodes as well …
Spin-diodes are usually resonant in nature (GHz frequency) and tuneable by magnetic field and bias current with performances, in terms of sensitivity and minimum detectable power, overcoming the semiconductor counterpart, i.e. Schottky diodes. Recently, spin diodes characterized by a low frequency detection (MHz frequency) have been proposed. Here, we show a strategy to design low frequency detectors based on magnetic tunnel junctions having the interfacial perpendicular anisotropy of the same order of the demagnetizing field out-of-plane component. Micromagnetic calculations show that to reac…
We report a charge based model to establish the analytical equation, describing the nature of capacitance-voltage ($C$-$V$) characteristics of organic solar cells under dark condition (or organic diodes) over a wide range of voltage, extending from deep reverse bias to well above the built-in potential. The present model enables to explain the unusual peak in $C$-$V$ characteristics of these devices, as observed experimentally by various groups. The results are further validated using self-consistent numerical simulation. Finally, we discuss the discrepancy and limitation of using Mott-Schottk…
This paper presents theoretical analysis of a MEMS electrostatic energy harvester configured as the Bennet's doubler. Steady-state operation of the doubler circuit can be approximated by a right-angled trapezoid Q-V cycle. A similarity between voltage doubler and resistive-based charge-pump circuit is highlighted. By taking electromechanical coupling into account, the analytical solution of the saturation voltage is the first time derived, providing a greater comprehension of the system performance and multi-parameter effects. The theoretical approach is verified by results of circuit simulati…
The performance of nanoscale electronic devices based on a two-three dimensional (2D-3D) interface is significantly affected by the electrical contacts that interconnect these materials with external circuitry. This work investigates charge transport effects at the 2D-3D ohmic contact coupled with the thermionic injection model for graphene/Si Schottky junction. Here, w e focus on the intrinsic properties of graphene-metal contacts, paying particular attention to the nature of the contact failure mechanism under high electrical stress. According to our findings, severe current crowding (CC) ef…
All epitaxial GeSn-on-insulator (GeSnOI) heterostructures have been realized by conventional molecular beam epitaxy of both GeSn and a thin Gd2O3 insulating layer, on Si(111) substrates. Analysis of the crystal and surface quality by high-resolution transmission electron microscopy (HRTEM), high-resolution X-ray diffraction (HRXRD), and atomic force microscopy (AFM) revealed the formation of a continuous and fully-relaxed single-crystalline GeSn epilayer, however with a surface roughness of 3.5 nm. Stacking faults and reflection microtwins were also observed in cross-sectional HRTEM images. Fr…
