arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2106.14746physics.app-phphysics.ins-det
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用于压力传感器的肖特基二极管温度传感器

Schottky diode temperature sensor for pressure sensor

M. Basov

摘要:

研制了一种平面电极排列的肖特基二极管(0.8x0.8x0.4mm3)小型硅芯片(PSD芯片)作为温度传感器,可在压力传感器的工作条件下工作。芯片PSD的正向I-V特性由Mo和n-Si(ND = 3 × 10 ~(15)cm ~(-3))之间的势垒决定。在电源电流IF = 1 mA时,正向电压UF = 208 mV,温度系数TC = -1.635 mV/C(在-65 ~+85 C的温度范围内,线性度kT <0.4%)。由于芯片PSD沿阳极周边具有两个p型保护环的结构,其反向I-V特性具有高击穿电压UBR > 85 V和低漏电流IL(UR = 20 V,25 C时IL < 5 μA,85 C时IL < 130 μA)。证明了PSD芯片在-65 ~+115 ℃较宽温度范围内的应用。温度传感器的独立芯片PSD位于距离压力传感器芯片小于1.5 mm的位置。PSD芯片传输输入数据,通过ASIC对压力传感器误差进行温度补偿,并直接进行温度测量。

英文摘要:

The small silicon chip of Schottky diode (0.8x0.8x0.4 mm3) with planar arrangement of electrodes (chip PSD) as temperature sensor, which functions under the operating conditions of pressure sensor, was developed. The forward I-V characteristic of chip PSD is determined by potential barrier between Mo and n-Si (ND = 3x1015 cm-3). Forward voltage UF = 208 mV and temperature coefficient TC = -1.635 mV/C (with linearity kT <0.4% for temperature range of -65 to +85 C) at supply current IF = 1 mA is achieved. The reverse I-V characteristic has high breakdown voltage UBR > 85 V and low leakage current IL < 5 μA at 25 C and IL < 130 μA at 85 C (UR = 20 V) because chip PSD contains the structure of two p-type guard rings along the anode perimeter. The application of PSD chip for wider temperature range from -65 to +115 C is proved. The separate chip PSD of temperature sensor located at a distance of less than 1.5 mm from the pressure sensor chip. The PSD chip transmits input data for temperature compensation of pressure sensor errors by ASIC and for direct temperature measurement.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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