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arXiv 1608.07070cond-mat.mtrl-sci
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快重离子辐照单晶金刚石微纳米图形化

Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation

G. Garcia, I. Preda, M. Diaz-Hijar, V. Tormo-Marquez, O. Pena Rodriguez, J. Olivares, F. Bosia, N. M. Pugno, F. Picollo, L. Giuntini, A. Sordini, P. Olivero, L. Lopez-Mir, C. Ocal

摘要:

本文介绍了快重离子辐照单晶金刚石引起结构损伤的实验数据和分析。图案化的掩埋结构损伤示出生成,通过膨胀,在样品表面上的镜像图案,这在很大程度上保持无损伤。虽然广泛的结果可用于轻离子极化,这种效果是在这里报道的第一次在重离子制度,其中一个完全不同的输入参数范围(在离子种类,能量,阻止功率等方面)。可用于定制辐照。所选离子种类为Au和Br,能量范围为10-40 MeV。所观察到的图案,其特征在于轮廓和原子力显微镜,报告在一系列的模型实验,其中示出的溶胀模式范围从几纳米到200纳米以上。此外,一个系统的唯象建模,其中表面溶胀测量相关的埋晶体损伤。与轻离子迁移的数据进行了比较,表明与所提出的模型具有良好的兼容性。在这项工作中提出的建模可以是有用的微图案化的表面在单晶金刚石的设计和实现,允许生成高度定制的结构,通过结合适当选择的照射参数和掩模。

英文摘要:

This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the sample surface, which remains largely damage-free. While extensive results are available for light ion implantations, this effect is reported here for the first time in the heavy ion regime, where a completely different range of input parameters (in terms of ion species, energy, stopping power, etc.) is available for customized irradiation. The chosen ion species are Au and Br, in the energy range 10-40 MeV. The observed patterns, as characterized by profilometry and atomic force microscopy, are reported in a series of model experiments, which show swelling patterns ranging from a few nm to above 200 nm. Moreover, a systematic phenomenological modelling is presented, in which surface swelling measurements are correlated to buried crystal damage. A comparison is made with data for light ion implantations, showing good compatibility with the proposed models. The modelling presented in this work can be useful for the design and realization of micropatterned surfaces in single crystal diamond, allowing to generate highly customized structures by combining appropriately chosen irradiation parameters and masks.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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