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arXiv 1111.7115cond-mat.mtrl-sci
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离子诱导纳米图形化的关键因素

Key factors of ion induced nanopatterning

S. Bhattacharjee, P. Karmakar, A. Chakrabarti

摘要:

本文报道了8 keV的He ~(1+),N ~(1+),O ~(1+),Ar ~(1+)原子离子和16 keV的N ~(21+),O ~(21+)分子离子以60 ° ^{ \circ }的入射角轰击Si(100)表面时,入射粒子质量、化学反应性和分子束效应对离子诱导纳米结构形成的影响。原子力显微镜(AFM)测量表明,波纹结构的形成和生长不仅取决于碰撞级联,还取决于入射粒子的化学反应性和分子状态。本实验研究探讨了离子诱导控制纳米图案化的必要条件。

英文摘要:

We have reported the dependence of projectile mass, chemical reactivity and effect of molecular beams on the ion induced nano structure formation, when 8 keV He1+, N1+, O1+, Ar1+ atomic ions and 16 keV N21+ and O21+ molecular ions are bombarded on the Si(100) surface at an incidence angle of 60^{\circ}. Atomic force microscopy (AFM) measurement shows that the initiation and growth of ripple structures are determined not only by the collision cascades but also by the chemical reactivity and molecular state of the projectiles. This experimental investigation explores the necessary requirements for ion induced controlled nanopatterning.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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