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arXiv 2201.03929cond-mat.mtrl-sciphysics.app-ph
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超温氮离子辅助Si(111)7 × 7低温二维GaN生长

Low temperature 2D GaN growth on Si (111) 7x7 assisted by hypethermal nitrogen ions

Jaroslav Maniš, Jindřich Mach, Miroslav Bartošík, Tomáš Šamořil, Michal Horak, Vojtěch Čalkovský, David Nezval, Lukáš Kachtik, Martin Konečny, Tomáš Šikola

摘要:

随着现代自上而下器件的特征尺寸越来越小,这种器件达到了由量子力学给出的操作极限。因此,二维(2D)结构似乎是满足现代光电和自旋电子应用的最终挑战的最佳解决方案之一。III-V族半导体的代表氮化镓(GAN)是纳米级UV和高功率应用的绝佳候选材料。我们提出了一种在Si(111)7 x7表面上制备2D GAN的新方法,该方法使用在低衬底温度(T < 220°C)下通过高温(E < 50 eV)氮离子对Ga液滴进行后氮化。Ga液滴的沉积和它们的后氮化都是使用我们小组开发的一种特殊的原子-离子束源进行的。这种低温液滴外延(LTDE)方法在整个制造过程中提供了明确的超高真空生长条件,从而产生高纯度GAN纳米结构。通过TEM证实了GAN纳米结构与硅衬底之间的尖锐界面以及纳米结构的正确元素组成。此外,SEM、X射线光电子能谱学(XPS)、AFM和俄歇微区分析表明所制备的GAN纳米结构具有独特的特征。

英文摘要:

As the characteristic dimensions of modern top-down devices are getting smaller, such devices reach their operational limits given by quantum mechanics. Thus, two-dimensional (2D) structures appear as one of the best solutions to meet the ultimate challenges of modern optoelectronic and spintronic applications. The representative of III-V semiconductors, gallium nitride (GaN), is a great candidate for UV and high-power applications at a nanoscale level. We propose a new way of fabrication of 2D GaN on the Si(111) 7x7 surface using post-nitridation of Ga droplets by hyperthermal (E < 50 eV) nitrogen ions at low substrate temperatures (T < 220°C). Both deposition of Ga droplets and their post-nitridation is carried out using a special atom-ion beam source developed in our group. This low-temperature droplet epitaxy (LTDE) approach provides well-defined ultra-high vacuum growth conditions during the whole fabrication process resulting in high purity GaN nanostructures. A sharp interface between the GaN nanostructures and the silicon substrate together with a correct elemental composition of nanostructures was confirmed by TEM. In addition, SEM, X-ray photoelectron spectroscopy (XPS), AFM and Auger microanalysis showed unique characteristics of the fabricated GaN nanostructures.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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