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arXiv 1509.01035cond-mat.mtrl-sci
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富氮条件下N极性GaN $(000\bar 1)$生长过程中与错切相关的表面演化

Miscut dependent surface evolution in the process of N-polar GaN$(000\bar 1)$ growth under N-rich condition

Filip Krzyzewski, Magdalena A. Zaluska-Kotur, Henryk Turski, Marta Sawicka, Czeslaw Skierbiszewski

摘要:

采用动力学Monte Carlo(kMC)模拟方法,研究了N极性(000-1)GAN在富N条件下生长过程中,衬底错切2deg和4deg时表面形貌的演变。实验观察到的(000-1)GAN层生长的等离子体辅助分子束外延的表面形貌的结果进行了比较。所提出的GAN(000-1)表面的kMC双组分模型,其中两种类型的原子:氮和镓附着在表面上并独立扩散,这解释了在相对高的阶跃流动速率下,(错切角<2deg)镓原子的低扩散引起表面不稳定性,并导致实验观察到的粗糙化,而对于低速率的台阶流(错切4deg),可以获得光滑的表面。在富氮条件下,在几乎不动的氮原子的存在下,通过二维岛形核和聚结过程实现生长。此外,我们还发现,较高的晶体错切率、较低的晶体生长速率或较高的生长温度都能产生类似的表面光滑化效果。我们表明,表面也平滑的生长条件非常高的N-过剩。大量氮原子的存在改变了镓原子的局部迁移率,从而使分离的岛更容易合并。

英文摘要:

The evolution of surface morphology during the growth of N-polar (000-1) GaN under N-rich condition is studied by kinetic Monte Carlo (kMC) simulations for two substrates miscuts 2deg and 4deg. The results are compared with experimentally observed surface morphologies of (000-1) GaN layers grown by plasma-assisted molecular beam epitaxy. The proposed kMC two-component model of GaN(000-1) surface where both types of atoms: nitrogen and gallium attach the surface and diffuse independently, explains that at relatively high rates of the step flow (miscut angle <2deg) the low diffusion of gallium adatoms causes surface instabilities and leads to experimentally observed roughening while for low rates of the step flow (miscut 4deg), smooth surface can be obtained. In the presence of almost immobile nitrogen atoms under N-rich conditions, the growth is realized by the process of two-dimensional island nucleation and coalescence. Additionally, we show that higher crystal miscut, lower crystal growth rate or higher temperature results in similar effect of the smoothening of the surface. We show that the surface also smoothens for the growth conditions with very high N-excess. The presence of large number of nitrogen atoms changes locally mobility of gallium atoms thus providing easier coalescence of separated island.

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