氮浓度对Ce掺杂SiOxNy发光的影响：优化DEL应用的Ce3 +
The Nitrogen concentration effect on Ce doped SiOxNy emission: towards optimized Ce3+ for DEL applications
摘要：
采用磁控反应溅射法，在氮气保护下，以CeO 2为靶材，制备了Ce掺杂的SiOxNy薄膜。关于氮气流的可见光致发光测量揭示了一个大的发射带中心在450 nm的样品下沉积的2 sccm流量。特别注意的是这样的排放在高氮浓度的起源。Ce掺杂SiOxNy薄膜中存在不同的发光中心（如带尾、CeO 2、Ce团簇、Ce 3+离子），并有不同的激活机制来解释其发光。X-射线光电子能谱学（XPS）揭示了Ce 3+离子的排他性存在，无论氮或Ce浓度如何，而透射电子显微镜（TEM）显示高温退火后没有团簇或硅酸盐。借助于光致发光激发光谱（PLE），揭示了Ce 3+离子在250 ~ 400 nm的宽激发范围内的直接或间接激发机制。氮浓度通过改变Ce的环境，减少SiOxNy中Si相的体积，产生云拉效应，对Ce 3+的发光起重要作用。考虑到优化的氮生长参数，Ce浓度作为新的参数进行了分析。在紫外光激发下，Ce 3+浓度为6at. %).没有观察到光致发光强度的饱和，再次证实由于氮的存在而没有Ce簇或硅酸盐相形成。
英文摘要：
Ce-doped SiO x N y films are deposited by magnetron reactive sputtering from a CeO 2 target under nitrogen reactive gas atmosphere. Visible photoluminescence measurements regarding the nitrogen gas flow reveal a large emission band centered at 450 nm for a sample deposited under a 2 sccm flow. A special attention is paid to the origin of such an emission at high nitrogen concentration. Different emitting centers are suggested in Ce doped SiO x N y films (e.g. band tails, CeO 2, Ce clusters, Ce 3+ ions), with different activation scenarios to explain the luminescence. X-ray photoelectron spectroscopy (XPS) reveals the exclusive presence of Ce 3+ ions whatever the nitrogen or Ce concentrations, while transmission electron microscopy (TEM) shows no clusters or silicates upon high temperature annealing. With the help of photoluminescence excitation spectroscopy (PLE), a wide excitation range from 250 nm up to 400 nm is revealed and various excitations of Ce 3+ ions are proposed involving direct or indirect mechanisms. Nitrogen concentration plays an important role on Ce 3+ emission by modifying Ce surroundings, reducing the Si phase volume in SiO x N y and causing a nephelauxetic effect. Taking into account the optimized nitrogen growth parameters, the Ce concentration is analyzed as new parameter. Under UV excitation, a strong emission is visible to the naked eye with high Ce 3+ concentration (6 at. %). No saturation of the photoluminescence intensity is observed, confirming again the lack of Ce cluster or silicate phase formation due do the nitrogen presence.
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