We introduce a simplified fabrication technique for Josephson junctions and demonstrate superconducting Xmon qubits with $T_1$ relaxation times averaging above 50$~μ$s ($Q>$1.5$\times$ 10$^6$). Current shadow-evaporation techniques for aluminum-based Josephson junctions require a separate lithography step to deposit a patch that makes a galvanic, superconducting connection between the junction electrodes and the circuit wiring layer. The patch connection eliminates parasitic junctions, which otherwise contribute significantly to dielectric loss. In our patch-integrated cross-type (PICT) junction technique, we use one lithography step and one vacuum cycle to evaporate both the junction electrodes and the patch. In a study of more than 3600 junctions, we show an average resistance variation of 3.7$\%$ on a wafer that contains forty 0.5$\times$0.5-cm$^2$ chips, with junction areas ranging between 0.01 and 0.16 $μ$m$^2$. The average on-chip spread in resistance is 2.7$\%$, with 20 chips varying between 1.4 and 2$\%$. For the junction sizes used for transmon qubits, we deduce a wafer-level transition-frequency variation of 1.7-2.5$\%$. We show that 60-70$\%$ of this variation is attributed to junction-area fluctuations, while the rest is caused by tunnel-junction inhomogeneity. Such high frequency predictability is a requirement for scaling-up the number of qubits in a quantum computer.
Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multi-branches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this metho…
Magneto-fluctuations of the normal resistance R_N have been reproducibly observed in high critical temp erature superconductor (HTS) grain boundary junctions, at low temperatures. We attribute them to mesoscopic transport in narrow channels across the grain boundary line. The Thouless energy appears to be the relevant energy scale. Our findings have significant implications on quasiparticle relaxation and coherent transport in HTS grain boundaries.
We present ferromagnetic Nb/Al2O3/Ni60Cu40/Nb Josephson junctions (SIFS) with an ultrathin Al2O3 tunnel barrier. The junction fabrication was optimized regarding junction insulation and homogeneity of current transport. Using ion-beam-etching and anodic oxidation we defined and insulated the junction mesas. The additional 2 nm thin Cu layer below the ferromagnetic NiCu (SINFS) lowered interface roughness and ensured very homogeneous current transport. A high yield of junctional devices with jc spreads less than 2% was obtained.
We describe fabrication and testing of composite flux qubits combining Nb- and Al-based superconducting circuit technology. This hybrid approach to making qubits allows for employing pi-phase shifters fabricated using well-established Nb-based technology of superconductor-ferromagnet-superconductor Josephson junctions. The important feature here is to obtain high interface transparency between Nb and Al layers without degrading sub-micron shadow mask. We achieve this by in-situ Ar etching using e-beam gun. Shadow-evaporated Al/AlOx/Al Josephson junctions with Nb bias pads show the expected cur…
We make stacks of intrinsic Josephson junctions (IJJs) imbedded in the bulk of very thin ($d\leq 100$~nm) $\mathrm{Bi_2Sr_2CaCu_2O_{8+x}}$ single crystals. By precisely controlling the etching depth during the double-sided fabrication process, the stacks can be reproducibly tailor-made to be of any microscopic height ($0-9 \mathrm{nm} <d$), i.e. enclosing a specified number of IJJ (0-6), including the important case of a single junction. We discuss reproducible gap-like features in the current-voltage characteristics of the samples at high bias.
We present novel low-T_c superconductor-insulator-ferromagnet-superconductor (SIFS) Josephson junctions with planar and stepped ferromagnetic interlayer. We optimized the fabrication process to set a step in the ferromagnetic layer thickness. Depending on the thickness of the ferromagnetic layer the ground state of the SIFS junction has a phase drop of either 0 or pi. So-called 0-pi Josephson junctions, in which 0 and pi ground states compete with each other, were obtained. These stepped junctions may have a double degenerate ground state, corresponding to a vortex of supercurrent circulating …
A Bi2Sr2CaCu2O8+d cross-whiskers junction has been successfully discovered as a novel intrinsic Josephson junction without using any technique for micro-fabrication. Two Bi2Sr2CaCu2O8+d whisker crystals were placed crosswise on a MgO substrate and heated at 850C for 30 min. They were electrically connected at their c-planes. The measurement terminals were made at the four ends of the whiskers. The I-V characteristics of the cross-whiskers junction at 5K were found to show a clear multiple-branch structure with a spacing of approximately 15 mV that is a feature of the intrinsic Josephson juncti…
We present a structure and a fabrication method for superconducting tunnel junctions down to the dimensions of 200 nm using i-line UV lithography. The key element is a side-wall-passivating spacer structure (SWAPS) which is shaped for smooth crossline contacting and low parasitic capacitance. The SWAPS structure enables formation of junctions with dimensions at or below the lithography-limited linewidth. An additional benefit is avoiding the excessive use of amorphous dielectric materials which is favorable in sub-Kelvin microwave applications often plagued by nonlinear and lossy dielectrics. …
We study the coherence of flux-tunable Josephson junction resonators made with two different fabrication processes. In the first process, devices are made using a single step of evaporation in which the resonator and the junctions of the SQUID are made at the same time. In the second process, devices are made with an identical geometry, but in which the resonators are made from a MoRe superconding layer to which an the junctions are added later in a second step. To characterize the coherence of the two types of SQUID cavities, we observe and analyze the quality factor of their resonances as a …
We have developed a combined photolithography and electron-beam lithography fabrication process for sub-\mum to \mum-size Nb/Al-AlOx/Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic oxidation, we developed and used the new concept of an aluminum hard mask. Josephson junctions of sizes down to 0.5 \mum2 have been fabricated and thoroughly characterized. We found that they have a very high quality, which is witnessed by the IV curves with quality parameters Vm > 50 mV and Vgap = 2.8 mV at 4.2 K, as well as IcRN products of 1.75-1.93 mV obta…
We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junctions, and one layer of MoNx kinetic inductors. The minimum feature size of resistors and inductors in the process is 250 nm. We present data on the mutual inductance of Nb stripline and microstrip inductors with linewidth and spacing from 250 nm to 1 μm made on the same or adjacent Nb layers, as well as the data on the linewidth and resistance uniformity.
In a recent letter, henceforth referred to as Ref.[1], You et al postulate that Bi2212 factually represents a series array of SIS junctions and claim that the nonlinear current-voltage characteristics (IVC) of their bridge are free of heating. Earlier experiments cast serious doubt upon the accuracy of the principal postulate (of this letter), see Ref.[2] and references therein. In what follows I will demonstrate that the major claim by the authors of Ref.[1] is at odds with their own data which suggest an extrinsic cause for the IVC nonlinearities.
We present a new process for fabricating vertical NbN-MgO-NbN Josephson junctions using self-aligned silicon nitride spacers. It allows for a wide range of junction areas from 0.02 um^2 to several 100 um^2. At the same time, it is suited for the implementation of complex microwave circuits with transmission line impedances ranging from < 1 Ohm to > 1 kOhm. The constituent thin films and the finished junctions are characterized. The latter are shown to have high gap voltages (> 4 mV) and low sub-gap leakage currents.
We have developed a fabrication technology for the development of large-scale superconducting integrated circuits with Nb-based Josephson junctions. The standard fabrication process with 10 mask levels uses four metal layers including 3 Nb superconducting layers and a Mo resistor layer. The influence of deposition parameters on film stress, electrical properties, and surface roughness were studied systematically. High quality Nb, Al, Mo, and SiO2 films were successfully deposited for the subsequent fabrication of circuits. The circuit fabrication started with the fabrication of Mo resistors wi…
Currently, superconductor digital integrated circuits fabricated at HYPRES, Inc. can operate at clock frequencies of ~ 40 GHz. The circuits present multilayered structures containing tens of thousands of Nb/Al/AlOx/Nb Josephson junctions (JJs) of various sizes interconnected by four Nb wiring layers, resistors, and other circuit elements. In order to be operational, the integrated circuits should be fabricated such that the critical currents of Josephson junctions remain within the tight design margins and the proper relationships between the critical currents of JJs of different sizes are pre…
We present our new fabrication Process for Superconductor Electronics (PSE2) that integrates two (2) layers of Josephson junctions in a fully planarized multilayer process on 200-mm wafers. The two junction layers can be, e.g., conventional Superconductor-Insulator-Superconductor (SIS) Nb/Al/AlO_x/Nb junctions with the same or different Josephson critical current densities, J_c. The process also allows integration of high-J_c Superconductor-Ferromagnet-Superconductor (SFS) or SFS'S JJs on the first junction layer with Nb/Al/AlO_x/Nb trilayer junctions on the second junction layer, or vice vers…
Recent progress in superconductor electronics fabrication has enabled single-flux-quantum (SFQ) digital circuits with close to one million Josephson junctions (JJs) on 1-cm$^2$ chips. Increasing the integration scale further is challenging because of the large area of SFQ logic cells, mainly determined by the area of resistively shunted Nb/AlO$_x$-Al/Nb JJs and geometrical inductors utilizing multiple layers of Nb. To overcome these challenges, we are developing a fabrication process with self-shunted high-J$_c$ JJs and compact thin-film MoN$_x$ kinetic inductors instead of geometrical inducto…
An intrinsic Josephson junction has been successfully fabricated without any micro-fabrication technique. Two Bi2212 whiskers were crossed with one another and joined by post-annealing. The inter-whisker electrical transport properties were measured by the four-probe method. The temperature dependence of resistance exhibited metallic behavior above TC. The resistance decreased to zero around 80K, corresponding to the superconducting transition. The current-voltage characteristics at 5K exhibited a small hysteresis and voltage jump, which can be explained by the intrinsic Josephson effect.
For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-μm JJs is challenging due to non-flat surfaces with step heights of up to several 100 nm generated during the fabrication process. We have refined a fabrication process with significantly decreased film thicknesses, resulting in almost flat surfaces at intermediate steps during the JJ definition. In combination with a mix-&-match process, combining electron-beam lithography (EBL) and conventional photolithography, we can fabricate JJs with …
Advances in Josephson Junction Materials and Processes Toward Practical Quantum Computing
Lawrence Berkeley National Laboratory（劳伦斯伯克利国家实验室）；University of California, Berkeley（加州大学伯克利分校）；Gwangju Institute of Science and Technology (GIST)（光州科学技术院）；Korea University（高丽大学）；The Max Planck Institute for the Structure and Dynamics of Matter (MPSD)（马普物质结构与动力学研究所）；Center for Free Electron Laser Science (CFEL)（自由电子激光科学中心）；Anyon Computing Inc.（Anyon Computing公司）
Transparent contact interfaces in superconductor-graphene hybrid systems are critical for realizing superconducting quantum applications. Here, we examine the effect of the edge-contact fabrication process on the transparency of the superconducting aluminum-graphene junction. We show significant improvement in the transparency of our superconductor-graphene junctions by promoting the chemical component of the edge contact etch process. Our results compare favorably with state-of-the-art graphene Josephson junctions. The findings of our study contribute to advancing the fabrication knowledge of…
Fabrication and Structural Analysis of Trilayers for Tantalum Josephson Junctions with Ta$_2$O$_5$ Barriers
University of Washington（华盛顿大学）；Colorado School of Mines（科罗拉多矿业学院）；National Laboratory of the Rockies（落基山国家实验室）；Pacific Northwest National Laboratory（太平洋西北国家实验室）；Rigetti Computing, Inc.（里盖蒂计算公司）
Highly transmissive ballistic junctions are demonstrated between Nb and the two-dimensional electron gas formed at an InAs/AlSb heterojunction. A reproducible fabrication protocol is presented yielding high critical supercurrent values. Current-voltage characteristics were measured down to 0.4 K and the observed supercurrent behavior was analyzed within a ballistic model in the clean limit. This investigation allows us to demonstrate an intrinsic interface transmissivity approaching 90%. The reproducibility of the fabrication protocol makes it of interest for the experimental study of InAs-bas…
Due to their unique properties as lossless, nonlinear circuit elements, Josephson junctions lie at the heart of superconducting quantum information processing. Previously, we demonstrated a two-layer, submicrometer-scale overlap junction fabrication process suitable for qubits with long coherence times. Here, we extend the overlap junction fabrication process to micrometer-scale junctions. This allows us to fabricate other superconducting quantum devices. For example, we demonstrate an overlap-junction-based Josephson parametric amplifier that uses only 2 layers. This efficient fabrication pro…
Characterization of Flux Trapping in and Fabrication of Large-Scale Superconductor Circuits Using AC-Biased Shift Registers With 108500 Josephson Junctions
A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is the core of several nodes of a roadmap for fully-planarized fabrication processes for superconductor integrated circuits with 4, 8, and 10 niobium layers developed at MIT Lincoln Laboratory. The process utilizes 248 nm photolithography, anodization, high-density plasma etching, and chemical mechanical polishing (CMP) for planarization of SiO$_2$ interlayer dielectric. JJ electric properties and statistics such as on-…
Substrate insulated Josephson junctions for superconducting quantum circuits
Karlsruher Institut für Technologie（卡尔斯鲁厄理工学院）；Fraunhofer-Institut für Elektronische Nanosysteme, Chemnitz（弗劳恩霍夫电子纳米系统研究所，开姆尼茨）；Institut für Quantenmaterialien und Technologie, Karlsruher Institut für Technologie（量子材料与技术研究所，卡尔斯鲁厄理工学院）
Scalability in the fabrication and operation of quantum computers is key to move beyond the NISQ era. So far, superconducting transmon qubits based on aluminum Josephson tunnel junctions have demonstrated the most advanced results, though this technology is difficult to implement with large-scale facilities. An alternative "gatemon" qubit has recently appeared, which uses hybrid superconducting/semiconducting (S/Sm) devices as gate-tuned Josephson junctions. Current implementations of these use nanowires however, of which the large-scale fabrication has not yet matured either. A scalable gatem…
Transport properties of high quality Nb/semiconductor/Nb long Josephson junctions based on metamorphic In_0.75Ga_0.25As epitaxial layers are reported. Different junction geometries and fabrication procedures are presented that allow a systematic comparison with quasiclassical theory predictions. The impact of junction transparency is highlighted and a procedure capable of yielding a high junction quality factor is identified.
As superconducting quantum circuits scale to larger sizes, the problem of frequency crowding proves a formidable task. Here we present a solution for this problem in fixed-frequency qubit architectures. By systematically adjusting qubit frequencies post-fabrication, we show a nearly ten-fold improvement in the precision of setting qubit frequencies. To assess scalability, we identify the types of 'frequency collisions' that will impair a transmon qubit and cross-resonance gate architecture. Using statistical modeling, we compute the probability of evading all such conditions, as a function of …
Josephson tunnel junctions are proposed as efficient phase-tunable thermal rectifiers. The latter exploit the strong temperature dependence of the superconducting density of states and phase-dependence of heat currents flowing through Josephson junctions to operate. Remarkably, large heat rectification coefficients up to 800% can potentially be achieved using conventional materials and standard fabrication methods. In addition, these devices allow for the in-situ fine tuning of the thermal rectification magnitude and direction.
We report superconducting fluxonium qubits with coherence times largely limited by energy relaxation and reproducibly satisfying T2 > 100 microseconds (T2 > 300 microseconds in one device). Moreover, given the state of the art values of the surface loss tangent and the 1/f flux noise amplitude, coherence can be further improved beyond 1 millisecond. Our results violate a common viewpoint that the number of Josephson junctions in a superconducting circuit -- over 100 here -- must be minimized for best qubit coherence. We outline how the unique to fluxonium combination of long coherence time and…
We have developed a novel fabrication process for ultra-small, full-epitaxial NbN Josephson junctions on a silicon (Si) substrate. A full-epitaxial NbN/AlN/NbN tri-layer was grown on a Si (100) wafer with a (200)-oriented TiN buffer layer. It was patterned into Josephson junctions by an electron beam lithography (EBL) for junction definition followed by a reactive ion etch (RIE). A chemical mechanical polishing (CMP) process and an additional RIE by using CHF$_3$ gas formed reliable electrical contacts between the junction counter electrodes and the wiring layer. All fabricated junctions, with…
A new type of a superconducting quantum interference device (SQUID) based on a single superconducting loop without Josephson junctions and with asymmetric link-up of current leads is proposed. This SQUID offers advantages in simplicity of fabrication and higher sensitivity of magnetic flux. Magnetic field dependence of the critical current in aluminium rings with asymmetric link-up of current leads has been measured in order to confirm the possibility of making this type of SQUID.
Arrays of Vortex Transitional (VT) memory cells with functional density up to $1 Mbit/cm^2$ have been designed, fabricated, and successfully demonstrated. This progress is due to recent advances in design optimization and in superconductor electronics fabrication achieved at MIT Lincoln Laboratory. As a starting point, we developed a demo array of VT cells for the 100-$μA/μm^2$ MIT LL fabrication process SFQ5ee with 8 niobium layers. The studied two-junction memory cell with a two-junction nondestructive readout occupied $168 μm^2$, resulting in an over $0.5 Mbit/cm^2$ functional density. Then…
We report the successful fabrication of planar V/Cu/V mesoscopic Josephson weak-links of different size, and the analysis of their low-temperature behavior. The shorter junctions exhibit critical currents of several tens of microA at 350 mK, while Josephson coupling persists up to ~2.7 K. Good agreement is obtained by comparing the measured switching currents to a model which holds in the diffusive regime. Our results demonstrate that V is an excellent candidate for the implementation of superconducting nanodevices operating at a few kelvins.
Existing concepts of reversible superconducting circuits as well as demonstrated adiabatic circuits require three-phase bias/clock signals generated by room temperature sources. A while ago, we suggested that a multi-phase bias/clock could be provided by a local Josephson junction-based generator. The generator looks like a long annular Josephson junction, only composed of discreet elements - junctions and inductors, and closed into a ring via a flux pump to inject any required number of vortices into the ring. A steady motion of the vortices forced by a uniformly distributed dc bias current a…
The future development of quantum information using superconducting circuits requires Josephson qubits with long coherence times combined to a high-delity readout. Major progress in the control of coherence has recently been achieved using circuit quantum electrodynamics (cQED) architectures, where the qubit is embedded in a coplanar waveguide resonator (CPWR) which both provides a well controlled electromagnetic environment and serves as qubit readout. In particular a new qubit design, the transmon, yields reproducibly long coherence times. However, a high-delity single-shot readout of the tr…
Superconducting electronic devices have re-emerged as contenders for both classical and quantum computing due to their fast operation speeds, low dissipation and long coherence times. An ultimate demonstration of coherence is lasing. We use one of the fundamental aspects of superconductivity, the ac Josephson effect, to demonstrate a laser made from a Josephson junction strongly coupled to a multi-mode superconducting cavity. A dc voltage bias to the junction provides a source of microwave photons, while the circuit's nonlinearity allows for efficient down-conversion of higher order Josephson …
Josephson junction field effect transistors (JJ-FET) share design similarities with metal-oxide-semiconductor field effect transistors, except for the source/drain contacts being replaced by superconductors. Similarly, the super current due to proximity effect is tunable by the gate voltage. In this study, we examine the feasibility of JJ-FET-based Boolean logic and memory elements for cryogenic computing, in light of recent advances in novel materials and fabrication techniques. Using a two-dimensional ballistic transport JJ-FET model, we implement circuit level simulations for JJ-FET logic g…
Highly reproducible Nb/Al(AlOx)/Nb Josephson junction based direct current superconducting quantum interference devices (DC SQUID) were fabricated by three dimensional etching using focused ion beam. Hysteretic and non-hysteretic DC SQUID with critical current ranging from 25 to 1100 microampere were fabricated by varying the Al barrier and oxygen exposure time. The fabricated DC SQUIDs have shown periodic flux dependence with high modulation factor reaching a value of 92% at 4.2 K.
We have studied both theoretically and experimentally how an LC series circuit connected in parallel to a Josephson junction influences the Josephson dynamics. The presence of the shell circuit introduces two energy scales, which in specific cases can strongly differ from the plasma frequency of the isolated junction. Josephson junctions were manufactured using Nb/Al-AlOx/Nb fabrication technology with various on-chip LC shunt circuits. Spectroscopic measurements in the quantum limit show an excellent agreement with theory taking into account the shunt inductance and capacitance in the Resisti…
