两层SIS约瑟夫森结的平面化制备工艺及SIS和SFS π结的集成
Planarized Fabrication Process With Two Layers of SIS Josephson Junctions and Integration of SIS and SFS π-Junctions
摘要：
我们提出了我们的超导电子（PSE 2），集成在一个完全平面化的多层工艺在200毫米晶圆的两（2）层约瑟夫森结的新制造工艺。两个结层可以是，例如，具有相同或不同约瑟夫森临界电流密度J_c的常规超导体-绝缘体-超导体（SIS）Nb/Al/AlO_x/Nb结。该工艺还允许第一结层上的高J_c超导体-铁磁体-超导体（SFS）或SFS的JJ与第二结层上的Nb/Al/AlO_x/Nb三层结集成，反之亦然。在本节点中，SFS三层，Nb/Ni/Nb被放置在标准SIS三层之下，并由一个铌布线层隔开。集成SFS和SIS结层的主要目的是在超导数字电路和随机存取存储器的逻辑单元中提供紧凑的π移相器，从而增加超导电子学的集成规模和功能密度。两结层工艺的当前节点具有六个平坦化的铌层、两个电阻层和350 nm的最小特征尺寸。SIS结的目标约瑟夫森临界电流密度为100 μA/μm^2和200 μA/μm^2。我们提出了新工艺的显着特点，制造细节，和表征结果的两层约瑟夫森结集成到一个过程中，无论是传统的和π结。
英文摘要：
We present our new fabrication Process for Superconductor Electronics (PSE2) that integrates two (2) layers of Josephson junctions in a fully planarized multilayer process on 200-mm wafers. The two junction layers can be, e.g., conventional Superconductor-Insulator-Superconductor (SIS) Nb/Al/AlO_x/Nb junctions with the same or different Josephson critical current densities, J_c. The process also allows integration of high-J_c Superconductor-Ferromagnet-Superconductor (SFS) or SFS'S JJs on the first junction layer with Nb/Al/AlO_x/Nb trilayer junctions on the second junction layer, or vice versa. In the present node, the SFS trilayer, Nb/Ni/Nb is placed below the standard SIS trilayer and separated by one niobium wiring layer. The main purpose of integrating the SFS and SIS junction layers is to provide compact π-phase shifters in logic cells of superconductor digital circuits and random access memories, and thereby increase the integration scale and functional density of superconductor electronics. The current node of the two-junction-layer process has six planarized niobium layers, two layers of resistors, and 350-nm minimum feature size. The target Josephson critical current densities for the SIS junctions are 100 μA/μm^2 and 200 μA/μm^2. We present the salient features of the new process, fabrication details, and characterization results on two layers of Josephson junctions integrated into one process, both for the conventional and π-junctions.
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