Currently, superconductor digital integrated circuits fabricated at HYPRES, Inc. can operate at clock frequencies of ~ 40 GHz. The circuits present multilayered structures containing tens of thousands of Nb/Al/AlOx/Nb Josephson junctions (JJs) of various sizes interconnected by four Nb wiring layers, resistors, and other circuit elements. In order to be operational, the integrated circuits should be fabricated such that the critical currents of Josephson junctions remain within the tight design margins and the proper relationships between the critical currents of JJs of different sizes are preserved. We present experimental data and discuss mechanisms of process-induced variations of the critical current and energy gap of Nb/Al/AlOx/Nb Josephson junctions in integrated circuits. We demonstrate that the Josephson critical current may depend on the type and area of circuit elements connected to the junction, on the circuit pattern, and on the step in the fabrication process at which the connection is made. In particular, we discuss the influence of a) junction base electrode connection to ground plane, b) junction counter electrode connection to ground plane, and c) counter electrode connection to Ti/Au or Ti/Pd/Au contact pads by Nb wiring. We show that the process-induced changes of the properties of Nb/Al/AlOx/Nb junctions are caused by migration of impurity atoms (hydrogen) between different layers comprising the integrated circuits.
A pronounced resonance-like structure has been observed in the current dependence of AC susceptibility for two-dimensional array of unshunted Nb-AlOx-Nb Josephson junctions. Using a single-plaquette approximation, we were able to successfully fit our data assuming that resonance structure is related to the geometric (inductive) properties of the array.
In this paper, we report on different phenomena related to the magnetic properties of artificially prepared highly ordered (periodic) two-dimensional Josephson junction arrays (2D-JJA) of both shunted and unshunted Nb-AlOx-Nb tunnel junctions. By employing mutual-inductance measurements and using a high-sensitive bridge, we have thoroughly investigated (both experimentally and theoretically) the temperature and magnetic field dependence of complex AC susceptibility of 2D-JJA. We also demonstrate the use of the scanning SQUID microscope for imaging the local flux distribution within our unshunt…
Highly reproducible Nb/Al(AlOx)/Nb Josephson junction based direct current superconducting quantum interference devices (DC SQUID) were fabricated by three dimensional etching using focused ion beam. Hysteretic and non-hysteretic DC SQUID with critical current ranging from 25 to 1100 microampere were fabricated by varying the Al barrier and oxygen exposure time. The fabricated DC SQUIDs have shown periodic flux dependence with high modulation factor reaching a value of 92% at 4.2 K.
We have developed a combined photolithography and electron-beam lithography fabrication process for sub-\mum to \mum-size Nb/Al-AlOx/Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic oxidation, we developed and used the new concept of an aluminum hard mask. Josephson junctions of sizes down to 0.5 \mum2 have been fabricated and thoroughly characterized. We found that they have a very high quality, which is witnessed by the IV curves with quality parameters Vm > 50 mV and Vgap = 2.8 mV at 4.2 K, as well as IcRN products of 1.75-1.93 mV obta…
Sandwich-type MgB2 Josephson tunnel junctions (MgB2/AlOx/MgB2) have been fabricated using as-grown MgB2 films formed by molecular beam epitaxy. The junctions exhibited substantial supercurrent and a well-defined superconducting gap (D=2.2~2.3mV). The superconducting gap voltage (D) agrees well with those of the smaller gap in the multi-gap scenario. The IcRN product is 0.4-1.3 mV at 4.2K, but approaches to 2.0 mV at 50 mK. The Ic has peculiar temperature dependence far from the Ambegaokar-Baratoff formula. It rapidly decreases with temperature, and disappears above T = 20 K, which is much lowe…
Self-shunted aluminum Josephson junctions with high-transparency barriers were fabricated using the shadow-evaporation technique and measured at low temperatures, T=25 mK. Due to high junction transparency, the IV-characteristics were found to be of only small hysteresis with retrapping-to-switching current ratio of up to 80%. The observed critical currents were close to the Ambegaokar-Baratoff values (up to 80-100%). Good barrier quality was confirmed by the low subgap leakage currents in the quasiparticle branches, which makes the self-shunted Al junctions promising for application in integr…
The effect of dc electrical stress and breakdown on Josephson and quasiparticle tunneling in Nb/Al/AlOx/Nb junctions with ultrathin AlOx barriers typical for applications in superconductor digital electronics has been investigated. The junctions' conductance at room temperature and current-voltage (I-V) characteristics at 4.2 K have been measured after the consecutive stressing of the tunnel barrier at room temperature. Electrical stress was applied using current ramps with increasing amplitude ranging from 0 to ~1000 Ic corresponding to voltages across the barrier up to 0.65 V where Ic is the…
In this work we give a characterization of the RF effect of memory switching on Nb-Al/AlOx-(Nb)-Pd$_{0.99}$Fe$_{0.01}$-Nb Josephson junctions as a function of magnetic field pulse amplitude and duration, alongside with an electrodynamical characterization of such junctions, in comparison with standard Nb-Al/AlOx-Nb tunnel junctions. The use of microwaves to tune the switching parameters of magnetic Josephson junctions is a step in the development of novel addressing schemes aimed at improving the performances of superconducting memories.
Josephson junction transistors and 50-junction arrays with linear junction dimensions from 200 nm down to 70 nm were fabricated from standard Nb/AlOx/Nb trilayers. The fabrication process includes electron beam lithography, dry etching, anodization, and planarization by chemical-mechanical polishing. The samples were characterized at temperatures down to 25 mK. In general, all junctions are of high quality and their I-U characteristics show low leakage currents and high superconducting energy gap values of 1.35 meV. The characteristics of the transistors and arrays exhibit some features in the…
A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is the core of several nodes of a roadmap for fully-planarized fabrication processes for superconductor integrated circuits with 4, 8, and 10 niobium layers developed at MIT Lincoln Laboratory. The process utilizes 248 nm photolithography, anodization, high-density plasma etching, and chemical mechanical polishing (CMP) for planarization of SiO$_2$ interlayer dielectric. JJ electric properties and statistics such as on-…
We investigated current-voltage characteristics of unshunted and externally shunted Josephson junctions (JJs) with high critical current densities, Jc, in order to extract their basic parameters and statistical characteristics for JJ modeling in superconducting integrated circuits and to assess their potential for future technology nodes. Nb/AlOx-Al/Nb JJs with diameters from 0.5 μm to 6 μm were fabricated using a fully planarized process with Mo or MoNx thin-film shunt resistors with sheet resistance Rsq = 2 Ω/sq and Rsq = 6 Ω/sq, respectively. We used our standard MIT LL process SFQ5ee to fa…
We report on the development of nearly quantum limited SQUIDs with miniature pickup loop dimensions. The implemented high quality and low capacitance cross-type Nb/AlOx/Nb Josephson junctions offer large $I_CR_N$-products and therefore enable an exceptional low noise level of the SQUIDs. Devices with loop dimensions of 1 μm exhibit white flux noise levels as low as $45 nΦ_0/Hz^{1/2}$ corresponding to an energy resolution ε of about 1 h at 4.2 K, with h being Plancks constant. Moreover, the large usable voltage swings of the devices of about 300 μV allow highly sensitive and easy single-stage o…
New technology for superconductor integrated circuits has been developed and is presented. It employs diffusion stoplayers (DSLs) to protect Josephson junctions (JJs) from interlayer migration of impurities, improve JJ critical current (Ic) targeting and reproducibility, eliminate aging, and eliminate pattern-dependent effects in Ic and tunneling characteristics of Nb/Al/AlOx/Nb junctions in integrated circuits. The latter effects were recently found in Nb-based JJs integrated into multilayered digital circuits. E.g., it was found that Josephson critical current density (Jc) may depend on the …
We propose, implement and test experimentally long Josephson 0-pi junctions fabricated using conventional Nb-AlOx-Nb technology. We show that using a pair of current injectors, one can create an arbitrary discontinuity of the Josephson phase and in particular a pi-discontinuity, just like in d-wave/s-wave or in d-wave/d-wave junctions, and study fractional Josephson vortices which spontaneously appear. Moreover, using such junctions, we can investigate the \emph{dynamics} of the fractional vortices -- a domain which is not yet available for natural 0-pi-junctions due to their inherently high d…
We have studied both theoretically and experimentally how an LC series circuit connected in parallel to a Josephson junction influences the Josephson dynamics. The presence of the shell circuit introduces two energy scales, which in specific cases can strongly differ from the plasma frequency of the isolated junction. Josephson junctions were manufactured using Nb/Al-AlOx/Nb fabrication technology with various on-chip LC shunt circuits. Spectroscopic measurements in the quantum limit show an excellent agreement with theory taking into account the shunt inductance and capacitance in the Resisti…
We present ferromagnetic Nb/Al2O3/Ni60Cu40/Nb Josephson junctions (SIFS) with an ultrathin Al2O3 tunnel barrier. The junction fabrication was optimized regarding junction insulation and homogeneity of current transport. Using ion-beam-etching and anodic oxidation we defined and insulated the junction mesas. The additional 2 nm thin Cu layer below the ferromagnetic NiCu (SINFS) lowered interface roughness and ensured very homogeneous current transport. A high yield of junctional devices with jc spreads less than 2% was obtained.
We make stacks of intrinsic Josephson junctions (IJJs) imbedded in the bulk of very thin ($d\leq 100$~nm) $\mathrm{Bi_2Sr_2CaCu_2O_{8+x}}$ single crystals. By precisely controlling the etching depth during the double-sided fabrication process, the stacks can be reproducibly tailor-made to be of any microscopic height ($0-9 \mathrm{nm} <d$), i.e. enclosing a specified number of IJJ (0-6), including the important case of a single junction. We discuss reproducible gap-like features in the current-voltage characteristics of the samples at high bias.
We present novel low-T_c superconductor-insulator-ferromagnet-superconductor (SIFS) Josephson junctions with planar and stepped ferromagnetic interlayer. We optimized the fabrication process to set a step in the ferromagnetic layer thickness. Depending on the thickness of the ferromagnetic layer the ground state of the SIFS junction has a phase drop of either 0 or pi. So-called 0-pi Josephson junctions, in which 0 and pi ground states compete with each other, were obtained. These stepped junctions may have a double degenerate ground state, corresponding to a vortex of supercurrent circulating …
A Bi2Sr2CaCu2O8+d cross-whiskers junction has been successfully discovered as a novel intrinsic Josephson junction without using any technique for micro-fabrication. Two Bi2Sr2CaCu2O8+d whisker crystals were placed crosswise on a MgO substrate and heated at 850C for 30 min. They were electrically connected at their c-planes. The measurement terminals were made at the four ends of the whiskers. The I-V characteristics of the cross-whiskers junction at 5K were found to show a clear multiple-branch structure with a spacing of approximately 15 mV that is a feature of the intrinsic Josephson juncti…
We present measurements of an amplifier based on a dc superconducting quantum interference device (SQUID) with submicron Al-AlOx-Al Josephson junctions. The small junction size reduces their self-capacitance and allows for the use of relatively large resistive shunts while maintaining nonhysteretic operation. This leads to an enhancement of the SQUID transfer function compared to SQUIDs with micron-scale junctions. The device layout is modified from that of a conventional SQUID to allow for coupling signals into the amplifier with a substantial mutual inductance for a relatively short microstr…
We study the coherence of flux-tunable Josephson junction resonators made with two different fabrication processes. In the first process, devices are made using a single step of evaporation in which the resonator and the junctions of the SQUID are made at the same time. In the second process, devices are made with an identical geometry, but in which the resonators are made from a MoRe superconding layer to which an the junctions are added later in a second step. To characterize the coherence of the two types of SQUID cavities, we observe and analyze the quality factor of their resonances as a …
We have fabricated and measured Josephson junction defect spectrometers (JJDSs), which are frequency-tunable, nearly-harmonic oscillators that probe strongly-coupled two-level systems (TLSs) in the barrier of a Josephson junction (JJ). The JJDSs accommodate a wide range of junction inductances, $L_{J}$, while maintaining a resonance frequency, $f_{0}$, in the range of 4-8 GHz. By applying a magnetic flux bias to tune $f_{0}$, we detect strongly-coupled TLSs in the junction barrier as splittings in the device spectrum. JJDSs fabricated with a via-style Al/thermal AlOx/Al junction and measured a…
We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junctions, and one layer of MoNx kinetic inductors. The minimum feature size of resistors and inductors in the process is 250 nm. We present data on the mutual inductance of Nb stripline and microstrip inductors with linewidth and spacing from 250 nm to 1 μm made on the same or adjacent Nb layers, as well as the data on the linewidth and resistance uniformity.
In a recent letter, henceforth referred to as Ref.[1], You et al postulate that Bi2212 factually represents a series array of SIS junctions and claim that the nonlinear current-voltage characteristics (IVC) of their bridge are free of heating. Earlier experiments cast serious doubt upon the accuracy of the principal postulate (of this letter), see Ref.[2] and references therein. In what follows I will demonstrate that the major claim by the authors of Ref.[1] is at odds with their own data which suggest an extrinsic cause for the IVC nonlinearities.
The most developed integrated receivers for THz radiation nowadays are based on Josephson junction SIS devices. In this kind of devices, the highest receivable frequency is determined by the energy gap of the superconducting electrodes and limited to approximately 700 GHz in case of Nb/AlOx/Nb multilayers. We have developed a technology for NbN/AlN/NbN Josephson junctions on sapphire substrates which allow operation at frequencies above 1 THz. The trilayers are deposited in-situ in a 3-chamber DC-magnetron sputtering system at temperatures as high as 775 °C. Each layer is reactively sputtered …
We report on the development of highly sensitive SQUIDs featuring sub-micrometer loop dimensions. The integration of high quality and low capacitance SIS Nb/AlOx/Nb cross-type Josephson tunnel junctions results in white flux noise levels as low as 66 n$Φ_0$/Hz$^{ 1/2} $, well below state-of-the-art values of their Nb-based counterparts based on constriction type junctions. Estimation of the spin sensitivity of the best SQUIDs yield $S_μ^{ 1/2} < 7 μ_B$/Hz$^{ 1/2} $ in the white noise region, suitable for the investigation of small spin systems. We discuss fabrication challenges, show results o…
Substrate insulated Josephson junctions for superconducting quantum circuits
Karlsruher Institut für Technologie（卡尔斯鲁厄理工学院）；Fraunhofer-Institut für Elektronische Nanosysteme, Chemnitz（弗劳恩霍夫电子纳米系统研究所，开姆尼茨）；Institut für Quantenmaterialien und Technologie, Karlsruher Institut für Technologie（量子材料与技术研究所，卡尔斯鲁厄理工学院）
Josephson junctions were fabricated using two different methods of barrier formation. The trilayers employed were Nb/Al-AlOx/Nb on sapphire, where the first two layers were epitaxial. The oxide barrier was formed either by exposing the Al surface to O2 or by codepositing Al in an O2 background. The codeposition process yielded junctions that showed the theoretically predicted subgap current and no measurable shunt conductance. In contrast, devices with barriers formed by thermal oxidation showed a small shunt conductance in addition to the predicted subgap current.
We present our new fabrication Process for Superconductor Electronics (PSE2) that integrates two (2) layers of Josephson junctions in a fully planarized multilayer process on 200-mm wafers. The two junction layers can be, e.g., conventional Superconductor-Insulator-Superconductor (SIS) Nb/Al/AlO_x/Nb junctions with the same or different Josephson critical current densities, J_c. The process also allows integration of high-J_c Superconductor-Ferromagnet-Superconductor (SFS) or SFS'S JJs on the first junction layer with Nb/Al/AlO_x/Nb trilayer junctions on the second junction layer, or vice vers…
Sandwich-type all-MgB2 Josephson tunnel junctions (MgB2/AlOx/MgB2) have been fabricated for the first time with as-grown MgB2 films formed by molecular beam epitaxy. The junctions exhibit substantial superconducting current (IcRN product ~ 0.8 mV at 4.2K), a well-defined superconducting gap (delta = ~2.3 mV), and clear Fraunhofer patterns. The superconducting gap voltage of delta agrees well with the smaller gap in the multi-gap scenario. The results demonstrate that MgB2 has great promise for superconducting electronics that can be operated at T ~ 20 K.
The paramagnetic Meissner effect (PME) measured in high $T_{C}$ granular superconductors has been attributed to the presence of $π$-junctions between the grains. Here we present measurements of complex AC magnetic susceptibility from two-dimensional arrays of conventional (non $π$) Nb/Al/AlOx/Nb Josephson junctions. We measured the susceptibility as a function of the temperature $T$, the AC amplitude of the excitation field, $h_{AC}$, and the external magnetic field, $H_{DC}$. The experiments show a strong paramagnetic contribution from the multi-junction loops, which manifests itself as a ree…
We have studied low-frequency resistance fluctuations in shadow-evaporated Al/AlOx/Al tunnel junctions. Between 300 K and 5 K the spectral density follows a 1/f-law. Below 5 K, individual defects distort the 1/f-shape of the spectrum. The spectral density decreases linearly with temperature between 150 K and 1 K and saturates below 0.8 K. At 4.2 K, the spectral density is about two orders of magnitude lower than expected from a recent survey [D. J. Van Harlingen et al., Phys. Rev. B 70, 064510 (2004)]. Due to the saturation below 0.8 K the estimated qubit dephasing times at 100 mK are only abo…
Recent progress in superconductor electronics fabrication has enabled single-flux-quantum (SFQ) digital circuits with close to one million Josephson junctions (JJs) on 1-cm$^2$ chips. Increasing the integration scale further is challenging because of the large area of SFQ logic cells, mainly determined by the area of resistively shunted Nb/AlO$_x$-Al/Nb JJs and geometrical inductors utilizing multiple layers of Nb. To overcome these challenges, we are developing a fabrication process with self-shunted high-J$_c$ JJs and compact thin-film MoN$_x$ kinetic inductors instead of geometrical inducto…
Since the very first experimental realization of Josephson flux-flow oscillator (FFO), its theoretical description has been limited by the phenomenological per- turbed sine-Gordon equation (PSGE). While PSGE can qualitatively describe the topological excitations in Josephson junctions that are sine-Gordon solitons or flux- ons, it is unable to capture essential physical phenomena of a realistic system such as the coupling between tunnel currents and electromagnetic radiation. Furthermore, PSGE neglects any dependence on energy gaps of superconductors and makes no distinction between symmetric …
An intrinsic Josephson junction has been successfully fabricated without any micro-fabrication technique. Two Bi2212 whiskers were crossed with one another and joined by post-annealing. The inter-whisker electrical transport properties were measured by the four-probe method. The temperature dependence of resistance exhibited metallic behavior above TC. The resistance decreased to zero around 80K, corresponding to the superconducting transition. The current-voltage characteristics at 5K exhibited a small hysteresis and voltage jump, which can be explained by the intrinsic Josephson effect.
For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-μm JJs is challenging due to non-flat surfaces with step heights of up to several 100 nm generated during the fabrication process. We have refined a fabrication process with significantly decreased film thicknesses, resulting in almost flat surfaces at intermediate steps during the JJ definition. In combination with a mix-&-match process, combining electron-beam lithography (EBL) and conventional photolithography, we can fabricate JJs with …
We have investigated the static properties of one-dimensional planar Josephson tunnel junctions in the most general case of elliptic annuli. We have analyzed the dependence of the critical current in the presence of an external magnetic field applied either in the junction plane or in the perpendicular direction. We report a detailed study of both short and long elliptic annular junctions having different eccentricities. For junctions having a normalized perimeter less than one the threshold curves are derived and computed even in the case with one trapped Josephson vortex. For longer junction…
Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multi-branches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this metho…
We present a new process for fabricating vertical NbN-MgO-NbN Josephson junctions using self-aligned silicon nitride spacers. It allows for a wide range of junction areas from 0.02 um^2 to several 100 um^2. At the same time, it is suited for the implementation of complex microwave circuits with transmission line impedances ranging from < 1 Ohm to > 1 kOhm. The constituent thin films and the finished junctions are characterized. The latter are shown to have high gap voltages (> 4 mV) and low sub-gap leakage currents.
We study microwave properties of a superconducting tunable coplanar waveguide (CPW). Pairs of Josephson junctions are forming superconducting quantum interference devices (SQUIDs), which shunt the central conductor of the CPW. The Josephson inductance of the SQUIDs is varied in the range of 0.08-0.5 nH by applying an external dc magnetic field. The central conductor of the CPW contains Josephson junctions connected in series that provide extra inductances; the magnetic field controlling the SQUIDs is weak enough not to influence the inductance of the chain of the single junctions. The circuit …
We investigate Magnetic Josephson Junction (MJJ) - a superconducting device with ferromagnetic barrier for a scalable high-density cryogenic memory compatible with energy-efficient single flux quantum (SFQ) circuits. The superconductor-insulator-superconductor-ferromagnet-superconductor (SIS'FS) MJJs are analyzed both experimentally and theoretically. We found that the properties of SIS'FS junctions fall into two distinct classes based on the thickness of S' layer. We fabricate Nb-Al/AlOx-Nb-PdFe-Nb SIS'FS MJJs using a co-processing approach with a combination of HYPRES and ISSP fabrication pr…
We describe fabrication and testing of composite flux qubits combining Nb- and Al-based superconducting circuit technology. This hybrid approach to making qubits allows for employing pi-phase shifters fabricated using well-established Nb-based technology of superconductor-ferromagnet-superconductor Josephson junctions. The important feature here is to obtain high interface transparency between Nb and Al layers without degrading sub-micron shadow mask. We achieve this by in-situ Ar etching using e-beam gun. Shadow-evaporated Al/AlOx/Al Josephson junctions with Nb bias pads show the expected cur…
Transport properties of high quality Nb/semiconductor/Nb long Josephson junctions based on metamorphic In_0.75Ga_0.25As epitaxial layers are reported. Different junction geometries and fabrication procedures are presented that allow a systematic comparison with quasiclassical theory predictions. The impact of junction transparency is highlighted and a procedure capable of yielding a high junction quality factor is identified.
We have developed a novel fabrication process for ultra-small, full-epitaxial NbN Josephson junctions on a silicon (Si) substrate. A full-epitaxial NbN/AlN/NbN tri-layer was grown on a Si (100) wafer with a (200)-oriented TiN buffer layer. It was patterned into Josephson junctions by an electron beam lithography (EBL) for junction definition followed by a reactive ion etch (RIE). A chemical mechanical polishing (CMP) process and an additional RIE by using CHF$_3$ gas formed reliable electrical contacts between the junction counter electrodes and the wiring layer. All fabricated junctions, with…
We report theoretical and experimental work on the development of a Josephson vortex qubit based on a confocal annular Josephson tunnel junction (CAJTJ). The key ingredient of this geometrical configuration is a periodically variable width that generates a spatial vortex potential with bistable states. This intrinsic vortex potential can be tuned by an externally applied magnetic field and tilted by a bias current. The two-state system is accurately modeled by a one-dimensional sine-Gordon like equation by means of which one can numerically calculate both the magnetic field needed to set the v…
A new type of a superconducting quantum interference device (SQUID) based on a single superconducting loop without Josephson junctions and with asymmetric link-up of current leads is proposed. This SQUID offers advantages in simplicity of fabrication and higher sensitivity of magnetic flux. Magnetic field dependence of the critical current in aluminium rings with asymmetric link-up of current leads has been measured in order to confirm the possibility of making this type of SQUID.
We present a structure and a fabrication method for superconducting tunnel junctions down to the dimensions of 200 nm using i-line UV lithography. The key element is a side-wall-passivating spacer structure (SWAPS) which is shaped for smooth crossline contacting and low parasitic capacitance. The SWAPS structure enables formation of junctions with dimensions at or below the lithography-limited linewidth. An additional benefit is avoiding the excessive use of amorphous dielectric materials which is favorable in sub-Kelvin microwave applications often plagued by nonlinear and lossy dielectrics. …
Existing concepts of reversible superconducting circuits as well as demonstrated adiabatic circuits require three-phase bias/clock signals generated by room temperature sources. A while ago, we suggested that a multi-phase bias/clock could be provided by a local Josephson junction-based generator. The generator looks like a long annular Josephson junction, only composed of discreet elements - junctions and inductors, and closed into a ring via a flux pump to inject any required number of vortices into the ring. A steady motion of the vortices forced by a uniformly distributed dc bias current a…
Ion beam damage combined with nanoscale focused ion beam direct milling was used to create manufacturable SNS type Josephson junctions in 100 nm thick MgB$_{2}$ with T$_{C}$ of 38 K. The junctions show non-hysteretic current - voltage characteristics between 36 and 4.2 K. Experimental evidence for the dc and ac Josephson effects in MgB$_{2}$ metal masked ion damage junctions are presented. This technique is particularly useful for prototyping devices due to its simplicity and flexibility of fabrication and has a great potential for high-density integration.
