arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2003.01997physics.plasm-ph
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微型微波等离子体射流的理论研究

Theoretical investigation of a miniature microwave driven plasma jet

Michael Klute, Horia-Eugen Porteanu, Ilija Stefanovic, Wolfgang Heinrich, Peter Awakowicz, Ralf Peter Brinkmann

摘要:

微波和射频驱动等离子体射流在许多技术应用中起着重要作用。它们通常以称为E模式的电容模式操作。作为一种新型的等离子体源,MMWICP(Miniature Micro Wave ICP)是一种基于电感耦合的小尺度等离子体射流,其谐振器用作LC谐振电路。这项工作提出了一种新的设备的理论模型,基于一系列表示的谐振器中的电磁场和等离子体内的损失过程的体积集成(全球)模型。可以发现由方位波数m排序的无限多个模式。这些模式本质上决定了系统的电磁行为,并不同于普通的腔模式。模式m=0可以与电感性模式识别并且被称为H模式,模式m=1是电容性模式并且被称为E模式。这两种模式是指不同的操作制度,这是分开的等离子体参数的不同值。在第二步中,考虑匹配网络及其特性,以找到稳定的平衡点和可能的滞后效应。作为主要结果,MMWICP谐振器的感应功率耦合的可行性。

英文摘要:

Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a theoretical model of the new device, based on a series representation of the electromagnetic field in the resonator and the volume integrated (global) model for the loss processes within the plasma. An infinite number of modes can be found ordered by the azimuthal wave number m. These modes essentially determine the electromagnetic behavior of the system and differ from ordinary cavity modes. The mode m=0 can be identified with the inductive mode and is called H-mode, the mode m=1 is the capacitive mode and is called E-mode. Both modes refer to different operating regimes, which are separated by different values of the plasma parameters. In a second step the matching network and its characteristics are taken into account in order to find stable equilibrium points and possible hysteresis effects. As main result, the feasibility of inductive power coupling for the MMWICP resonator is shown.

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