低气压微波水等离子体中独特谱线展宽和反转的光谱研究
Spectroscopic study of unique line broadening and inversion in low-pressure microwave generated water plasmas
摘要：
结果表明，低压（~0.2托）水蒸气等离子体中产生的10毫米内径的石英管与埃文森微波腔显示至少有两个功能，这是不能解释的传统的等离子体模型。首先，记录到从微波耦合器直到5cm的恒定宽度的显著（> 0.25nm）氢巴耳末线增宽。只有氢，而不是氧，显示出显着的谱线增宽。这一特征，以前观察到的含氢混合气体等离子体产生的高压直流和射频放电被一些研究人员解释为导致阴极附近的氢离子加速。这种解释不能适用于在这项工作中产生的（无电极）微波等离子体中观察到的谱线展宽，特别是在距离微波耦合器5 cm处。其次，在距离耦合器5 cm处，观察到莱曼和巴耳末系的线强度反转。线反转表明存在一个迄今未知的源泵浦的光功率在等离子体。最后，值得注意的是，等离子体的其他方面，包括OH* 旋转温度和低电子浓度是这种类型的等离子体的典型特征。
英文摘要：
It was demonstrated that low pressure (~0.2 Torr) water vapor plasmas generated in a 10 mm inner diameter quartz tube with an Evenson microwave cavity show at least two features which are not explained by conventional plasma models. First, significant (> 0.25 nm) hydrogen Balmer_ line broadening, of constant width, up to 5 cm from the microwave coupler was recorded. Only hydrogen, and not oxygen, showed significant line broadening. This feature, observed previously in hydrogen-containing mixed gas plasmas generated with high voltage dc and rf discharges was explained by some researchers to result from acceleration of hydrogen ions near the cathode. This explanation cannot apply to the line broadening observed in the (electrodeless) microwave plasmas generated in this work, particularly at distances as great as 5 cm from the microwave coupler. Second, inversion of the line intensities of both the Lyman and Balmer series, again, at distances up to 5 cm from the coupler, were observed. The line inversion suggests the existence of a hitherto unknown source of pumping of the optical power in plasmas. Finally, it is notable that other aspects of the plasma including the OH* rotational temperature and low electron concentrations are quite typical of plasmas of this type.
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