Meta-instrument：用于近场光学成像显微镜的高速定位和跟踪平台
Meta-instrument: high speed positioning and tracking platform for near-field optical imaging microscopes
摘要：
高分辨率和高通量成像通常是相互排斥的。该元仪器将纳米天线、超振荡透镜和超透镜等高分辨率光学概念与小型化光机电平台相结合，以数十纳米的透镜-样品间距精确、高速定位光学元件。该平台是近场光学成像技术走向工业应用的必要发展。为此，我们提出了两个设计和验证的原则文书，旨在实现亚纳米的位置精度与100 kHz的带宽。
英文摘要：
High resolution and high throughput imaging are typically mutually exclusive. The meta-instrument pairs high resolution optical concepts such as nano-antennas, superoscillatory lenses and hyperlenses with a miniaturized opto-mechatronic platform for precise and high speed positioning of the optical elements at lens-to-sample separations that are measured in tens of nanometers. Such platform is a necessary development for bringing near-field optical imaging techniques to their industrial application. Towards this purpose, we present two designs and proof-of-principle instruments that are aimed at realizing sub-nanometer positional precision with a 100 kHz bandwidth.
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