AI 中文总结
该研究研发了集成SPM与电输运测量的低温超高真空扫描探针显微镜，可10分钟内完成5微米级针尖定位，实现原子级与宏观器件性能的关联，经石墨烯、Pb纳米线等验证性能良好。
AI 中文摘要
我们研发了一套低温（LT）超高真空（UHV）系统，该系统在单一平台中集成了扫描探针显微镜（SPM）与电输运测量两种互补技术。通过同时获取同一样品的原子级表面形貌与宏观器件响应，这套装置可建立二维（2D）器件的局域结构/光谱特征与全局电子输运行为之间的直接关联。该系统支持开展原子级修饰或可控操纵的同时，持续监测其对器件尺度性能的影响。装置由两个相互连通的UHV腔室组成：一个专用制备腔室和一个独立测量腔室，测量腔室内配备液氦恒温器及SPM/输运台。系统本底真空度为1×10⁻¹¹ Torr。其核心特点是可直接光学访问样品，能在10分钟内实现5微米×5微米精度的快速可靠针尖定位。该SPM采用定制电子设备运行，可在2.9 K至400 K的温度范围内追踪同一样品区域，机械稳定性低于1皮米（pm）。系统性能在石墨烯器件上得到验证，采用块状铅（Pb）确定能量分辨率；使用超导针尖的扫描隧道谱（STS）可实现30微伏（microV）的能量分辨率以测量超导能隙，输运测量则追踪原位制备的铅纳米线超导转变过程中电阻率与临界电流的温度依赖关系。
英文摘要
We have developed a low temperature (LT), ultra-high-vacuum (UHV) system that combines two complementary techniques, scanning probe microscopy (SPM) and electrical transport measurements, within a single platform. By providing simultaneous access to the atomic-scale surface landscape and the macroscopic device response of the same sample, the setup enables direct correlations between local structural/spectroscopic signatures and global electronic transport behavior in two-dimensional (2D) devices. The system allows experiments where atomic-scale modifications or controlled manipulations are performed while continuously monitoring their impact on device-scale performance. The setup consists of two interconnected UHV chambers: a dedicated preparation chamber and a separate measurement chamber that houses a liquid-helium cryostat and the SPM/transport stage. Base pressure is 1x10^-11 Torr. A key feature is direct optical access to the sample, enabling rapid and reliable tip positioning with an accuracy of 5 microns x 5 microns within 10 minutes. The SPM, operated using custom-built electronics, can track the exact same sample region across a temperature range from 2.9 K to 400 K, with mechanical stability below 1 pm. System performance is demonstrated on graphene devices, and bulk Pb is used to determine energy resolution. Using superconducting tips, scanning tunneling spectroscopy measures the superconducting gap with an energy resolution of 30 microV. Transport measurements track the temperature dependence of both resistivity and critical current across the superconducting transition of an in-situ prepared Pb nanowire.
Comments19 pages, 10 figures
