We demonstrate a dynamic scanning capacitance microscope (DSCM) that operates at large bandwidths, cryogenic temperatures and high magnetic fields. The setup is based on a non-contact atomic force microscope (AFM) with a quartz tuning fork sensor with non-optical excitation and read-out for topography, force and dissipation measurements. The metallic AFM tip forms part of an rf resonator with a transmission characteristics modulated by the sample properties and the tip-sample capacitance. The tip motion gives rise to a modulation of the capacitance at the frequency of the AFM sensor and its harmonics, which can be recorded simultaneously with the AFM data. We use an intuitive model to describe and analyze the resonator transmission and show that for most experimental conditions it is proportional to the complex tip-sample conductance, which depends on both the tip-sample capacitance and the sample resistivity. We demonstrate the performance of the DSCM on metal disks buried under a polymer layer and we discuss images recorded on a two-dimensional electron gas in the quantum Hall effect regime, i.e. at cryogenic temperatures and high magnetic fields, where we directly image the formation of compressible stripes at the physical edge of the sample.
The Scanning Tunneling Microscope is a powerful tool for studying the electronic properties at the atomic level, however it's relatively small scanning range and the fact that it can only operate on conducting samples prevents its application to study heterogeneous samples consisting on conducting and insulating regions. Here we present a long-range scanning tunneling microscope capable of detecting conducting micro and nanostructures on insulating substrates using a technique based on the capacitance between the tip and the sample and performing STM studies.
The integration of a scanning tunneling microscope chamber with a sample growth facility using non-custom, commercially available parts is described. The facility also features a newly-designed magnetic wobble stick to increase the reliability of sample transfer in a cost-effective manner.
We report on our design of a scanning gate microscope housed in a cryogen-free dilution refrigerator with a base temperature of 15 mK. The recent increase in efficiency of pulse tube cryocoolers has made cryogen-free systems popular in recent years. However, this new style of cryostat presents challenges for performing scanning probe measurements, mainly as a result of the vibrations introduced by the cryocooler. We demonstrate scanning with root-mean-square vibrations of 0.8 nm at 3 K and 2.1 nm at 15 mK in a 1 kHz bandwidth with our design.
We have developed a noncontact method for measurement of the interline capacitance in Cu/low-k interconnect. It is based on a miniature test vehicle with net capacitance of a few femto-Farads formed by two 20-μm-long parallel wires (lines) with widths and spacings the same as those of the interconnect wires of interest. Each line is connected to a small test pad. The vehicle impedance is measured at 4 GHz by a near-field microwave probe with 10 μm probe size via capacitive coupling of the probe to the vehicle's test pads. Full 3D finite element modeling at 4 GHz confirms that the microwave rad…
We have performed scanning capacitance microscopy using a relaxation oscillator. Precision calibrations indicate a sensitivity on the order of 0.05 pF. Surface topography of metallic structures, such as machined grooves and coins, can be readily obtained either in the constant-height (non-contact) or tapping (contact) mode. Spatial resolution of sub-50 $μ$m has been achieved.
We describe the design, construction, and performance of an ultra-high vacuum (UHV) scanning tunneling microscope (STM) capable of imaging at dilution-refrigerator temperatures and equipped with a vector magnet. The primary objective of our design is to achieve a high level of modularity by partitioning the STM system into a set of easily separable, interchangeable components. This naturally segregates the UHV needs of STM instrumentation from the typically non-UHV construction of a dilution refrigerator, facilitating the usage of non-UHV materials while maintaining a fully bakeable UHV chambe…
We present the design and performance of a cryogenic scanning tunneling microscope (STM) which operates inside a water-cooled Bitter magnet, which can attain a magnetic field of up to 38 T. Due to the high vibration environment generated by the magnet cooling water, a uniquely designed STM and vibration damping system are required. The STM scan head is designed to be as compact and rigid as possible, to minimize the effect of vibrational noise as well as fit the size constraints of the Bitter magnet. The STM uses a differential screw mechanism for coarse tip - sample approach, and operates in …
We present a Scanning Hall Probe Microscope operating in ambient conditions. One of the unique features of this microscope is the use of the same stepper motors for both sample positioning as well as scanning, which makes it possible to have a large scan range (few mm) in x and y directions, with a scan resolution of 0.1 $μ$m. Protocols have been implemented to enable scanning at different heights from the sample surface. The z range is 35 mm. Microstructured Hall probes of size 1-5 $μ$m have been developed. A minimum probe-sample distance \textless{} 2 $μ$m has been obtained by the combinatio…
We present a combined scanning force and tunneling microscope working in a dilution refrigerator that is optimized for the study of individual electronic nano-devices. This apparatus is equipped with commercial piezo-electric positioners enabling the displacement of a sample below the probe over several hundred microns at very low temperature, without excessive heating. Atomic force microscopy based on a tuning fork resonator probe is used for cryogenic precise alignment of the tip with an individual device. We demonstrate the local tunneling spectroscopy of a hybrid Josephson junction as a fu…
We describe a scanning tunneling microscope (STM) that operates at magnetic fields up to 22 Tesla and temperatures down to 80 mK. We discuss the design of the STM head, with an improved coarse approach, the vibration isolation system, and efforts to improve the energy resolution using compact filters for multiple lines. We measure the superconducting gap and Josephson effect in Aluminum and show that we can resolve features in the density of states as small as 8\,$μ$eV. We measure the quantization of conductance in atomic size contacts and make atomic resolution and density of states images in…
We describe the design, construction, and performance of an ultra-low temperature, high-field scanning tunneling microscope (STM) with two independent tips. The STM is mounted on a dilution refrigerator and operates at a base temperature of 30 mK with magnetic fields of up to 13.5 T. We focus on the design of the two-tip STM head, as well as the sample transfer mechanism, which allows \textit{in situ} transfer from an ultra high vacuum (UHV) preparation chamber while the STM is at 1.5 K. Other design details such as the vibration isolation and rf-filtered wiring are also described. Their effec…
We describe the development and performance of an ultra-high vacuum scanning tunneling microscope working under combined extreme conditions of ultra-low temperatures and high magnetic fields. We combined a top-loading dilution refrigerator and a standard bucket dewar with a bottom-loading superconducting magnet to achieve 4.5 days operating time, which is long enough to perform various spectroscopic-imaging measurements. To bring the effective electron temperature closer to the mixing-chamber temperature, we paid particular attention to filtering out the radio-frequency noise, as well as enhan…
We describe a two-color pump-probe scanning magneto-optical Kerr effect (MOKE) microscope which we have developed to investigate electron spin phenomena in semiconductors at cryogenic temperatures with picosecond time and micrometer spatial resolution. The key innovation of our microscope is the usage of an ultrafast `white light' supercontinuum fiber-laser source which provides access to the whole visible and near-infrared spectral range. Our Kerr microscope allows for the independent selection of the excitation and detection energy while avoiding the necessity to synchronize the pulse trains…
This paper presents for the first time an innovative instrument called an inverted scanning microwave microscope (iSMM), which is capable of noninvasive and label-free imaging and characterization of intracellular structures of a live cell on the nanometer scale. In particular, the iSMM is sensitive to not only surface structures, but also ectromagnetic properties up to one micrometer below the surface. Conveniently, the iSMM can be constructed through straightforward conversion of any scanning probe microscope, such as the atomic force microscope or the scanning tunneling microscope, with a s…
We describe the construction and performance of a scanning tunneling microscope (STM) capable of taking maps of the tunneling density of states with sub-atomic spatial resolution at dilution refrigerator temperatures and high (14 T) magnetic fields. The fully ultra-high vacuum system features visual access to a two-sample microscope stage at the end of a bottom-loading dilution refrigerator, which facilitates the transfer of in situ prepared tips and samples. The two-sample stage enables location of the best area of the sample under study and extends the experiment lifetime. The successful the…
ANTARES beamline (BL), a new soft X-ray scanning photoemission microscope located at the SOLEIL synchrotron storage ring has been recently designed, built and commissioned. The implemented interferometer control allows the accurate measurement of the transverse position of the Fresnel zone plate (FZP) relative to the sample. An effective sample position feedback has been achieved during experiments in static mode, with a fixed FZP position required to perform nano Angle-Resolved Photoelectron Spectroscopy (Nano-ARPES) measurements. Likewise, long-term stability has been attained for the FZP po…
We present the design of a highly compact High Field Scanning Probe Microscope (HF-SPM) for operation at cryogenic temperatures in an extremely high magnetic field, provided by a water-cooled Bitter magnet able to reach 38 T. The HF-SPM is 14 mm in diameter: an Attocube nano-positioner controls the coarse approach of a piezo resistive AFM cantilever to a scanned sample. The Bitter magnet constitutes an extreme environment for SPM due to the high level of vibrational noise; the Bitter magnet noise at frequencies up to 300 kHz is characterized and noise mitigation methods are described. The perf…
We report on the 3-dimensional imaging of biological cells including living neurons by a recently developed fibered interferometric Scanning Optical Microscope. The topography and surface structure of mouse fibroblasts and hippocampal neurons are clearly revealed. This straightforward technique allows fast, high resolution observation of samples in liquids without lengthy alignment procedures or costly components.
We describe a method to map the standing-wave pattern inside a Fabry-Perot optical cavity with sub-wavelength resolution by perturbing it with a commercially available scanning near-field optical microscope (SNOM) tip. The method is applied to a fiber Fabry-Perot microcavity. We demonstrate its use to determine the relative position of the antinodes at two different wavelengths. In addition, we use the SNOM tip as a point-like source allowing precise positioning of a microscope objective with respect to the cavity mode.
Scanning laser confocal holographic microscopy using a spatial heterodyne detection method is presented. Spatial heterodyne detection technique employs a Mach-Zehnder interferometer with the reference beam frequency shifted by two acousto-optic modulators (AOM) relative to the object beam frequency. Different from the traditional temporal heterodyne detection technique in which hundreds temporal samples are taken at each scanning point to achieve the complex signal, the spatial heterodyne detection technique generates spatial interference fringes by use of a linear tempo-spatial relation provi…
We have built a variable temperature scanning probe microscope (SPM) that covers 4.6 K - 180 K and up to 7 Tesla whose SPM head fits in a 52 mm bore magnet. It features a temperature-controlled sample stage thermally well isolated from the SPM body in good thermal contact with the liquid helium bath. It has a 7 sample holder storage carousel at liquid helium temperature for systematic studies using multiple samples and field emission targets intended for spin-polarized spectroscopic-imaging scanning tunneling microscopy (STM) study on samples with various compositions and doping conditions. Th…
We present a probe-type scanning tunneling microscope (STM) with atomic resolution that is designed to be directly inserted and work in a harsh vibrational cryogen-free superconducting magnet system. When a commercial variable temperature insert (VTI) is installed in the magnet and the STM is in turn housed in the VTI, a lowest temperature of 1.6 K can be achieved, where the STM still operates well. We have tested it in an 8 T superconducting magnet cooled with the pulse-tube cryocooler (PTC) and obtained atomically revolved graphite and NiSe2 images as well as the scanning tunneling spectrum …
Nearly twenty years ago, following a sixty year struggle, scientists succeeded in correcting the bane of electron lenses, spherical aberration, using electromagnetic aberration correction. However, such correctors necessitate re-engineering of the electron column, additional space, a power supply, water cooling, and other requirements. Here, we show how modern nanofabrication techniques can be used to surpass the resolution of an uncorrected scanning transmission electron microscope more simply by sculpting a foil of material into a refractive corrector that negates spherical aberration. This …
We report on the design and performance of a cryogenic (300 mK) near-field scanning microwave microscope. It uses a microwave resonator as the near-field sensor, operating at a frequency of 6 GHz and microwave probing amplitudes down to 100 uV, approaching low enough photon population (N~1000) of the resonator such that coherent quantum manipulation becomes feasible. The resonator is made out of a miniaturized distributed fractal superconducting circuit that is integrated with the probing tip, micromachined to be compact enough such that it can be mounted directly on a quartz tuning-fork, and …
Nitrogen-vacancy (NV) center in diamond is a promising quantum sensor with remarkably versatile sensing capabilities. While scanning NV magnetometry is well-established, NV electrometry has been so far limited to bulk diamonds. Here we demonstrate imaging external alternating (AC) and direct (DC) electric fields with a single NV at the apex of a diamond scanning tip under ambient conditions. A strong electric field screening effect is observed at low frequencies due to charge noise on the surface. We quantitatively measure its frequency dependence, and overcome this screening by mechanically o…
In this article, a new scanning electron microscopy (SEM) image composition technique is described, which can significantly reduce drift related image corruptions. Drift-distortion commonly causes blur and distortions in the SEM images. Such corruption ordinarily appears when conventional image-acquisition methods, i.e. "slow scan" and "fast scan", are applied. The damage is often very significant; it may render images unusable for metrology applications, especially, where sub-nanometer accuracy is required. The described correction technique works with a large number of quickly taken frames, …
Time resolution is one of the most severe limitations of scanning probe microscopies (SPMs), since the typical image acquisition times are in the order of several seconds or even few minutes. As a consequence, the characterization of dynamical processes occurring at surfaces (e.g. surface diffusion, film growth, self-assembly and chemical reactions) cannot be thoroughly addressed by conventional SPMs. To overcome this limitation, several years ago we developed a first prototype of the FAST module, an add-on instrument capable of driving a commercial scanning tunneling microscope (STM) at and b…
Near-field optical microscopes with two independent tips for simultaneous excitation and detection can be essential tools for studying localized optical phenomena on the subwavelength scale. Here, we report on the implementation of a fully automated and robust dual-tip scanning near-field optical microscope (SNOM), in which the excitation tip is stationary, while the detection tip automatically scans the surrounding area. To monitor and control the distance between the two probes, mechanical interactions due to shear forces are used. We experimentally investigate suitable scan parameters and f…
A cryo scanning transmission X-ray microscope, the cryo-STXM, has been designed and commissioned at the Canadian Light Source synchrotron. The instrument is designed to operate from 100 - 4000 eV (lambda = 12.4 - 0.31 nm). Users can insert a previously frozen sample, through a load lock, and rotate it plus minus 70 degrees in the beam to collect tomographic data sets. The sample can be maintained for extended periods at 92 K primarily to suppress radiation damage, and a pressure on the order of 10-9 Torr to suppress sample contamination. The achieved spatial resolution (30 nm) and spectral res…
We have designed and built a scanning tunneling microscope (STM) setup for operation at millikelvin temperatures in ultra high vacuum. A compact cryostat with an integrated dilution refrigerator has been built, that allows measurements at a base temperature of 25 mK in magnetic field up to 7.5 T with low mechanical and electronic noise. The cryostat is not larger than conventional helium bath cryostats (23 and 13 liters of nitrogen and helium respectively), so that the setup does not require a large experimental hall and fits easily into a standard lab space. Mechanical vibrations with running…
We report the construction and performance of a low temperature, high field scanning tunneling microscope (STM) operating down to 350mK and in magnetic fields up to 9T, with thin film deposition and in-situ cleaving capabilities. The main focus lies on the simple design of STM head allowing top loading of the sample and innovative sample holder design that allows us to get spectroscopic data on superconducting thin films grown in-situ on insulating substrates. Other design details on sample transport, chamber and vibration isolation scheme are also described. We demonstrate the capability of o…
Polarized light microscopy, as a contrast-enhancing technique for optically anisotropic materials, is a method well suited for the investigation of a wide variety of effects in solid-state physics, as for example birefringence in crystals or the magneto-optical Kerr effect (MOKE). We present a microscopy setup that combines a widefield microscope and a confocal scanning laser microscope with polarization-sensitive detectors. By using a high numerical aperture objective, a spatial resolution of about 240 nm at a wavelength of 405 nm is achieved. The sample is mounted on a $^4$He continuous flow…
Modeling artificial scanning electron microscope (SEM) and scanning ion microscope images has recently become important. This is because of the need to provide repeatable images with a priori determined parameters. Modeled artificial images are highly useful in the evaluation of new imaging and metrological techniques, like image-sharpness calculation, or drift-corrected image composition (DCIC). Originally, the NIST-developed artificial image generator was designed only to produce the SEM images of gold-on-carbon resolution sample for image-sharpness evaluation. Since then, the new improved v…
Spectroscopic-imaging scanning tunneling microscopy is a powerful technique to study quantum materials, with the ability to provide information about the local electronic structure with subatomic resolution. However, as most spectroscopic measurements are conducted without feedback to the tip, it is extremely sensitive to vibrations coming from the environment. This requires the use of laboratories with low-vibration facilities combined with a very rigid microscope construction. In this article, we report on the design and fabrication of an ultra-stable STM for spectroscopic-imaging measuremen…
Scanning probe microscopy (SPM) is traditionally based on very sharp tips, where the small size of the apex is critical for resolution. This paradigm is about to shift, since a novel generation of planar probes (color centers in diamond, superconducting sensors and single electron transistors) promises to image small electric and magnetic fields with hitherto inaccessible sensitivity. To date, much effort has been put into fabricating these planar sensors on tip-like structures. This compromises performance and poses a considerable engineering challenge, which is mastered by only a few laborat…
3D printing allows rapid fabrication of complex objects from digital designs. One 3D-printing process, direct laser writing, polymerises a light-sensitive material by steering a focused laser beam through the shape of the object to be created. The highest-resolution direct laser writing systems use a femtosecond laser to effect two-photon polymerisation. The focal (polymerisation) point is steered over the shape of the desired object with mechanised stages or galvanometer-controlled mirrors. Here we report a new high-resolution direct laser writing system that employs a resonant mirror scanner…
A new model description and type classification carried out on its base of a wide variety of practical hysteresis loops are suggested. An analysis of the loop approximating function was carried out; the parameters and characteristics of the model were defined - coersitivity, remanent polarization, value of hysteresis, spontaneous polarization, induced piezocoefficients, value of saturation, hysteresis losses of energy per cycle. It was shown that with piezomanipulators of certain hysteresis loop types, there is no difference in heat production. The harmonic linearization coefficients were calc…
