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arXiv 0910.0213physics.ins-det
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带漂移校正的扫描带电粒子显微镜实时图像合成

Real-Time Scanning Charged-Particle Microscope Image Composition with Correction of Drift

Petr Cizmar, Andras E. Vladar, Michael T. Postek

摘要:

在这篇文章中,一种新的扫描电子显微镜(SEM)图像合成技术,它可以显着减少漂移相关的图像损坏。漂移失真通常导致SEM图像中的模糊和失真。当应用传统的图像采集方法,即“慢扫描”和“快扫描”时,通常出现这种损坏。损坏通常非常严重;它可能使图像无法用于计量应用,特别是需要亚纳米精度的应用。所描述的校正技术与大量快速拍摄的帧一起工作,这些帧被适当地对准,然后被合成为单个图像。这样的图像包含比单个帧少得多的噪声,同时模糊和变形被最小化。该技术还提供了关于样品位置随时间的变化的有用信息,其可以应用于研究仪器的漂移特性而不需要额外的设备。

英文摘要:

In this article, a new scanning electron microscopy (SEM) image composition technique is described, which can significantly reduce drift related image corruptions. Drift-distortion commonly causes blur and distortions in the SEM images. Such corruption ordinarily appears when conventional image-acquisition methods, i.e. "slow scan" and "fast scan", are applied. The damage is often very significant; it may render images unusable for metrology applications, especially, where sub-nanometer accuracy is required. The described correction technique works with a large number of quickly taken frames, which are properly aligned and then composed into a single image. Such image contains much less noise than the individual frames, whilst the blur and deformation is minimized. This technique also provides useful information about changes of the sample position in time, which may be applied to investigate the drift properties of the instrument without a need of additional equipment.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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