Modeling artificial scanning electron microscope (SEM) and scanning ion microscope images has recently become important. This is because of the need to provide repeatable images with a priori determined parameters. Modeled artificial images are highly useful in the evaluation of new imaging and metrological techniques, like image-sharpness calculation, or drift-corrected image composition (DCIC). Originally, the NIST-developed artificial image generator was designed only to produce the SEM images of gold-on-carbon resolution sample for image-sharpness evaluation. Since then, the new improved version of the software was written in C++ programming language and is in the Public Domain. The current version of the software can generate arbitrary samples, any drift function, and many other features. This work describes scanning in charged-particle microscopes, which is applied both in the artificial image generator and the DCIC technique. As an example, the performance of the DCIC technique is demonstrated.
Scanning through space and time: past, present, and future of time-resolved scanning transmission soft X-ray microscopy
Swiss Light Source, Paul Scherrer Institut（瑞士光源，保罗谢勒研究所）；Max Born Institute for Nonlinear Optics and Short Pulse Spectroscopy（马克斯·博恩非线性光学和超短脉冲光谱研究所）；Helmholtz Zentrum Berlin für Materialien und Energie（柏林亥姆霍兹材料能源研究中心）
