arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 1507.04719cond-mat.mes-hallcond-mat.mtrl-sci
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溶液处理硅纳米线场效应晶体管电滞特性的电学分析

Electrical analysis of hysteresis in solution processed silicon nanowire field effect transistors

K. Prabha Rajeev, C. Opoku, V. Stolojan, M. Constantinou, M. Shkunov

摘要:

硅纳米线(Si NW)是可溶液加工的场效应晶体管(FET)的理想候选物。纳米线沟道和栅极电介质之间的界面在FET性能中起着至关重要的作用,并且它可能是造成不希望的效应的原因,例如当施加栅极电压时由于阈值电压偏移而导致的I-V特性的滞后。使用栅极电压偏置应力测量,我们表明,高达40 V的大滞后与SiO2电介质的Si NW FET主要是由于在纳米线/SiO2界面的空穴陷阱。证明了一种使用可溶液加工的含氟聚合物电介质Cytop在顶栅配置中将这种滞后降低到仅2.5V的方法。实验结果表明,硅纳米线晶体管中的表面陷阱的密度主要取决于介电层的性质。通过评估基于SiO2底部电介质和顶部Cytop电介质层的代表性双栅极FET的场效应传输行为来研究栅极电介质的影响。对这些器件进行了表征,发现纳米线/SiO2界面处的空穴陷阱密度(1 × 10^13 cm-2)比纳米线/含氟聚合物界面处的空穴陷阱密度(7.5 × 10^11 cm-2)高一个数量级。

英文摘要:

Silicon nanowires (Si NW) are ideal candidates for solution processable field effect transistors (FETs). The interface between the nanowire channel and the gate dielectric plays a crucial role in the FET performance, and it can be responsible for unwanted effects such as hysteresis of the I-V characteristics due to threshold voltage shift when the gate voltage is applied. Using gate-voltage bias stress measurements we show that a large hysteresis of up to 40V in Si NW FETs with SiO2 dielectric is mainly due to the holes traps at the nanowire/SiO2 interface. An approach for reducing this hysteresis to just 2.5V using solution processable fluoropolymer dielectric Cytop in the top-gate configuration is demonstrated. Experimental results suggest that the density of surface traps in Si nanowire transistors is dictated mainly by the nature of the dielectric layer. The influence of the gate dielectric was studied by assessing the field effect transport behaviour of a representative double gate FETs based on SiO2 bottom dielectric and top Cytop dielectric layer. Such devices were characterised, revealing an order of magnitude higher hole traps density at the nanowire/SiO2 interface (1x10^13cm-2) compared to that of nanowire/fluoropolymer interface (7.5x10^11cm-2).

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