arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 1506.01262cond-mat.mtrl-sciphysics.optics
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单角度布拉格重叠关联成像高分辨三维结构显微术

High resolution three dimensional structural microscopy by single angle Bragg ptychography

S. O. Hruszkewycz, M. Allain, M. V. Holt, C. E. Murray, J. R. Holt, P. H. Fuoss, V. Chamard

摘要:

本文提出了一种新的三维布拉格投影重叠关联成像技术(3DBPP),用于研究晶体材料的三维纳米晶格行为和应变场。在该方法中,编码在以固定角度测量的相干高角度布拉格峰中的2D样品结构信息与实空间扫描探针位置相结合以重建3D样品结构。这项工作介绍了一种全新的手段,三维结构成像的纳米材料,并消除了实验的复杂性与旋转纳米样品。我们提出的方法的框架,并证明我们的方法与数值演示,分析推导,和实验重建的纳米电子原型器件的一个组件中的晶格畸变。

英文摘要:

We present an efficient method of imaging 3D nanoscale lattice behavior and strain fields in crystalline materials with a new methodology -- three dimensional Bragg projection ptychography (3DBPP). In this method, the 2D sample structure information encoded in a coherent high-angle Bragg peak measured at a fixed angle is combined with the real-space scanning probe positions to reconstruct the 3D sample structure. This work introduces an entirely new means of three dimensional structural imaging of nanoscale materials and eliminates the experimental complexities associated with rotating nanoscale samples. We present the framework for the method and demonstrate our approach with a numerical demonstration, an analytical derivation, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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