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arXiv 0904.3628cond-mat.mtrl-scicond-mat.mes-hall
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纳米氧化钛薄膜双极阻变的微观起源

Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films

Hu Young Jeong, Jeong Yong Lee, Sung-Yool Choi, Jeong Won Kim

摘要:

我们报告了一个直接观察的微观起源的双极电阻开关行为的纳米氧化钛薄膜。通过高分辨透射电子显微镜、能量过滤透射电子显微镜的分析TEM技术和原位X射线光电子能谱学,我们证明了氧离子通过氧化钛层和顶部Al金属电极之间的氧化还原反应堆积在顶部界面处。我们还发现在开关过程中氧离子的漂移导致了二氧化钛薄膜的双极阻变。

英文摘要:

We report a direct observation of the microscopic origin of the bipolar resistive switching behavior in nanoscale titanium oxide films. Through a high-resolution transmission electron microscopy, an analytical TEM technique using energy-filtering transmission electron microscopy and an in situ x-ray photoelectron spectroscopy, we demonstrated that the oxygen ions piled up at top interface by an oxidation-reduction reaction between the titanium oxide layer and the top Al metal electrode. We also found that the drift of oxygen ions during the on/off switching induced the bipolar resistive switching in the titanium oxide thin films.

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