Milena D'Angelo, Maria V. Chekhova, Yanhua H. Shih
We report a proof-of-principle experimental demonstration of quantum lithography. Utilizing the entangled nature of a two-photon state, the experimental results have bettered the classical diffraction limit by a factor of two. This is a quantum mechanical two-photon phenomenon but not a violation of the uncertainty principle.
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Comment on "Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit" The effective absorption rates in quantum lithography are very low.
We propose a super-resolution quantum lithography scheme based on coherent population trapping in lambda-type atoms coupled to temporally-cascaded standing-wave driving fields. By realizing effective multiplication of optical intensity profiles on an atomic state density distribution, the scheme enables an arbitrarily high degree of resolution enhancement without modifying the atomic level structure of the photographic medium or the light source configuration. It is also shown that the visibility of the super-resolution patterns is preserved under a significant atomic state decoherence rate.
Classical, interferometric, optical lithography is diffraction limited to writing features of a size lambda/2 or greater, where lambda is the optical wavelength. Using nonclassical photon number states, entangled N at a time, we show that it is possible to write features of minimum size lambda/(2N) in an N-photon absorbing substrate. This result surpasses the usual classical diffraction limit by a factor of N. Since the number of features that can be etched on a two-dimensional surface scales inversely as the square of the feature size, this allows one to write a factor of N^2 more elements on…
The Abbe's diffraction limit restricts the resolution of an optical imaging and lithography system. Coherent Rabi oscillation is shown to be able to overcome the diffraction limit in both optical and atom lithography. In previous studies, semiclassical theory is applied where the driving field is treated as a classical light and quantum fluctuation is neglected. Here, we show that the quantum fluctuation may reduce the visibility of the superresolution pattern. However, by squeezing the photon number fluctuation we are able to significantly increase its visibility.
Diffraction of light sets the fundamental limit for optical lithography. Many quantum lithography schemes have so far been proposed to overcome this limit either by making use of highly entangled photons, multi-photon processes or multiple Lambda transitions, which are all experimentally high-demanding. Recently, Liao et al. proposed a novel quantum lithography scheme which merely employs Rabi oscillation to surpass the diffraction limit. Here we report a faithful experimental realization of this scheme. Resolution up to ninth of the Rayleigh diffraction limit has been observed. Possibility of…
As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions. This renders quantum lithography a potentially useful tool in nanotechnology.
I propose a quantum imaging method that can beat the Rayleigh-Abbe diffraction limit and achieve de Broglie resolution without requiring a multiphoton absorber as the detector. Using the same non-classical states of light as those for quantum lithography, the proposed method requires only intensity measurements, followed by image post-processing, to produce the same complex image patterns as those in quantum lithography. The method is expected to be experimentally realizable using current technology.
We study the generalized Young's double-slit interference for the beam produced in the spontaneously parametric down-conversion (SPDC). We find that the sub-wavelength lithography can occur macroscopically in both the two-photon intensity measurement and the single-photon spatial intensity correlation measurement. We show the visibility and the strength of the interference fringe related to the SPDC interaction. It may provide a strong quantum lithography with a moderate visibility in practical application.
The smallest spot in optical lithography and microscopy is generally limited by diffraction. Quantum lithography, which utilizes interference between groups of N entangled photons, was recently proposed to beat the diffraction limit by a factor N. Here we propose a simple method to obtain N photons interference with classical pulses that excite a narrow multiphoton transition, thus shifting the "quantum weight" from the electromagnetic field to the lithographic material. We show how a practical complete lithographic scheme can be developed and demonstrate the underlying principles experimental…
The wave-particle duality of massive objects is a cornerstone of quantum physics and a key property of many modern tools such as electron microscopy, neutron diffraction or atom interferometry. Here we report on the first experimental demonstration of quantum interference lithography with complex molecules. Molecular matter-wave interference patterns are deposited onto a reconstructed Si(111) 7x7 surface and imaged using scanning tunneling microscopy. Thereby both the particle and the quantum wave character of the molecules can be visualized in one and the same image. This new approach to nano…
We present a theoretical analysis of the properties of an unseeded optical parametic amplifier (OPA) used as the source of entangled photons for applications in quantum lithography. We first study the dependence of the excitation rate of a two-photon absorber on the intensity of the light leaving the OPA. We find that the rate depends linearly on intensity only for output beams so weak that they contain fewer than one photon per mode. We also study the use of an N-photon absorber for arbitrary N as the recording medium to be used with such a light source. We find that the contrast of the inter…
We report an experimental observation of quantum Airy disk diffraction pattern using an entangled two-photon source. In contrast to the previous quantum lithography experiments where the subwavelength diffraction patterns were observed in the far field limit, we perform the Fraunhofer diffraction experiment with a convex lens. The experimental result shows that the two-photon Airy disk is provided with the super-resolution spot, which surpasses the classical diffraction limit. In particular, the spot size can be well controlled by the focal length, which adapted to optical super-focusing. Our …
We investigate the use of a non-degenerate parametric oscillator (NDPO) as a source for quantum lithography, for which the light can have high-flux and strong non-classical features. This builds on the proposal of Boto, et al. [A. N. Boto, et al., PRL (85), 2733 (2000)], for etching simple patterns on multi-photon absorbing materials with sub-Rayleigh resolution, using special two-mode entangled states of light. An NDPO has two outgoing modes differentiated by polarization or direction of propagation, but sharing the same optical frequency. We derive analytical expressions for the multi-photon…
Quantum lithography achieves phase super-resolution using fragile, experimentally challenging entangled states of light. We propose a scalable scheme for creating features narrower than classically achievable, with reduced use of quantum resources and consequently enhanced resistance to loss. The scheme is an implementation of interferometric lithography using a mixture of an SPDC entangled state with intense classical coherent light. We measure coincidences of up to four photons mimicking multiphoton absorption. The results show a narrowing of the interference fringes of up to 30% with respec…
The second-order Talbot effect is analyzed for a periodic object illuminated by entangled photon pairs in both the quantum imaging and quantum lithography configurations. The Klyshko picture is applied to describe the quantum imaging scheme, in which self-images of the object that may or may not be magnified can be observed nonlocally in the photon coincidences but not in the singles count rate. In the quantum lithography setup, we find that the second-order Talbot length is half that of the classical first-order case, thus the resolution may be improved by a factor of two.
Quantum lithography promises, in principle, unlimited feature resolution, independent of wavelength. However, in the literature at least two different theoretical descriptions of quantum lithography exist. They differ in to which extent they predict that the photons retain spatial correlation from generation to the absorption, and while both predict the same feature size, they differ vastly in predicting how efficiently a quantum lithographic pattern can be exposed. Until recently, essentially all experiments reported have been performed in such a way that it is difficult to distinguish betwee…
Direct-write projection lithography of quantum dot micropillar single photon sources
本研究提出直写光刻工艺批量制造量子点微柱腔，实现高深宽比、高质量因子，并通过氧化物封装保持稳定性，成功产生高纯度不可区分单光子。
We demonstrate a systematic approach to sub-wavelength resolution lithographic image formation on films covering areas larger than a wavelength squared. For example, it is possible to make a lithographic pattern with a feature size resolution of $λ/[2(N+1)]$ by using a particular $2 M$-photon, multi-mode entangled state, where $N < M$, and banks of birefringent plates. By preparing a statistically mixed such a state one can form any pixel pattern on a $(N+1) 2^{M-N} \times (N+1) 2^{M-N}$ pixel grid occupying a square with a side of $L=2^{M-N-1}$ wavelengths. Hence, there is a trade-off between…
Quantum lithography proposes to adopt entangled quantum states in order to increase resolution in interferometry. In the present paper we experimentally demonstrate that the output of a high-gain optical parametric amplifier can be intense yet exhibits quantum features, namely, sub-Rayleigh fringes, as proposed by Agarwal et al. (Phys. Rev. Lett. 86, 1389 (2001)). We investigate multiphoton states generated by a high-gain optical parametric amplifier operating with a quantum vacuum input for a gain values up to 2.5. The visibility has then been increased by means of three-photon absorption. Th…
In the present study, we developed a fabrication process of an electrically driven single-photon LED based on InP QDs emitting in the red spectral range, the wavelength of interest coinciding with the high efficiency window of Si APDs. A deterministic lithography technique allowed for the pre-selection of a suitable QD, here exclusively operated under electrical carrier injection. The final device was characterized under micro-electroluminescence in direct current, as well as in pulsed excitation mode. In particular, under pulsed excitation of one device, single-photon emission of a spectral l…
Fabrication of Metal Air Bridges for Superconducting Circuits using Two-photon Lithography
提出结合双光子光刻三维胶结构与剥离工艺制备超导铝空气桥，验证其低温、机械及微波特性。
In this paper, an experiment of quantum diffraction of position-momentum entangled photons from a straight sharp edge is presented. Path of a single photon of an entangled pair is partially blocked by a sharp edge whereas the other photon is detected at a stationary location without revealing the which-path information of the other photon. Quantum diffraction pattern of the sharp edge is revealed only in the correlated conditional detection of spatially separated photons and no diffraction pattern is formed in local detections of individual photons. Theoretical analysis of the quantum diffract…
We demonstrate one- and two-photon diffraction and interference experiments utilizing parametric down-converted photon pairs (biphotons) and a transmission grating. With two-photon detection, the biphoton exhibits a diffraction-interference pattern equivalent to that of an effective single particle that is associated with half the wavelength of the constituent photons. With one-photon detection, however no diffraction-interference pattern is observed. We show that these phenomena originate from the spatial quantum correlation between the down-converted photons.
We present one- and two-photon diffraction and interference experiments involving parametric down-converted photon pairs. By controlling the divergence of the pump beam in parametric down-conversion, the diffraction-interference pattern produced by an object changes from a quantum (perfectly correlated) case to a classical (uncorrelated) one. The observed diffraction and interference patterns are accurately reproduced by Fourier-optical analysis taking into account the quantum spatial correlation. We show that the relation between the spatial correlation and the object size plays a crucial rol…
We propose a scheme for conditional generation of two-mode N-photon path-entangled states of traveling light field. These states may find applications in quantum optical lithography and they may be used to improve the sensitivity of interferometric measurements. Our method requires only single-photon sources, linear optics (beam splitters and phase shifters), and photodetectors with single photon sensitivity.
We show that far field diffraction image of spontaneously scattered Stokes photons can be used for detection of spin entanglement and for metrology of fields gradients in cold atomic ensembles. For many-body states with small or maximum uncertainty in spin-excitation number, entanglement is simply witnessed by the presence of a sharp diffraction peak or dip. Gradient vector of external fields is measured by the displacement of a diffraction peak due to inhomogeneous spin precessions, which suggests a new possibility for precision measurement beyond the standard quantum limit without entangleme…
Self-organized semiconductor quantum dots represent almost ideal two-level systems, which have strong potential to applications in photonic quantum technologies. For instance, they can act as emitters in close-to-ideal quantum light sources. Coupled quantum dot systems with significantly increased functionality are potentially of even stronger interest since they can be used to host ultra-stable singlet-triplet spin qubits for efficient spin-photon interfaces and for a deterministic photonic 2D cluster-state generation. We realize an advanced quantum dot molecule (QDM) device and demonstrate e…
A recursive method for producing path-entangled states of light is presented. These states may find applications in quantum lithography and high-precision interferometric measurements. The required resources are single-photon sources, linear optics components, and photodetectors. Adding a quantum memory greatly enhances the yield in comparison with the previously known schemes.
We show that single-slit two-photon ghost diffraction can be explained very simply by using a wave-packet evolution of a generalised EPR state. Diffraction of a wave travelling in the x-direction can be described in terms of the spreading in time of the transverse (z-direction) wave-packet, within the Fresnel approximation. The slit is assumed to truncate the transverse part of the wavefunction of the photon to within the width of the slit. The analysis reproduces all features of the two-photon single-slit ghost diffraction.
We experimentally demonstrate quantum enhanced resolution in confocal fluorescence microscopy exploiting the non-classical photon statistics of single nitrogen-vacancy colour centres in diamond. By developing a general model of super-resolution based on the direct sampling of the kth-order autocorrelation function of the photoluminescence signal, we show the possibility, in some cases, to resolve in principle arbitrarily close emitting centers.
The five laws of relativistic quantum mechanics, according to Feynman's path integral formulation, are concisely stated and applied to experiments. Reflection diffraction grating experiments for both photons and electrons are analysed, in particular the Davisson-Germer experiment in which the wave-like property of electrons was first established. It is shown how classical, purely spatial, effective wave theories for both photons and electrons are predicted by the path integral formulation of quantum mechanics. The standard Copenhagen interpretation of wave mechanics is critically discussed in …
In this paper, we propose two protocols for generating super-resolving \textit{single-photon} path-entangled states from general maximally path-entangled N00N states. We also show that both protocols generate the desired state with different probabilities depending on the type of detectors being used. Such super-resolving single-photon path-entangled states preserve high resolving power but lack the requirement of a multi-photon absorbing resist, which makes this state a perfect candidate for quantum lithography.
Over the past 20 years, bright sources of entangled photons have led to a renaissance in quantum optical interferometry. Optical interferometry has been used to test the foundations of quantum mechanics and implement some of the novel ideas associated with quantum entanglement such as quantum teleportation, quantum cryptography, quantum lithography, quantum computing logic gates, and quantum metrology. In this paper, we focus on the new ways that have been developed to exploit quantum optical entanglement in quantum metrology to beat the shot-noise limit, which can be used, e.g., in fiber opti…
We use trajectory calculations to successfully explain two-photon "ghost" diffraction, a phenomenon previously explained via quantum mechanical entanglement. The diffraction patterns are accumulated one photon pair at a time. The calculations are based on initial correlation of the trajectories in the crystal source and a trajectory-wave ordering interaction with a variant generator inherent in its structure. Details are presented in comparison with ordinary diffraction calculated with the same trajectory model.
We propose a method for preparing maximal path entanglement with a definite photon number N, larger than two, using projective measurements. In contrast with the previously known schemes, our method uses only linear optics. Specifically, we exhibit a way of generating four-photon, path-entangled states of the form |4,0> + |0,4>, using only four beam splitters and two detectors. These states are of major interest as a resource for quantum interferometric sensors as well as for optical quantum lithography and quantum holography.
In this paper we study the resolution of images illuminated by sources composed of $N+1$ photons in which one non-degenerate photon is entangled with $N$ degenerate photons. The $N$ degenerate photons illuminate an object and are collected by an $N$ photon detector. The signal from the $N$ photon detector is measured in coincidence with the non-degenerate photon giving rise to a ghost image. We discuss the case of three photons in various configurations and generalize to $N+1$. Using the Rayleigh criterion, we find that the system may give an improvement in resolution by a factor of $N$ compar…
Entangled-photon coincidence imaging is a method to nonlocally image an object by transmitting a pair of entangled photons through the object and a reference optical system, respectively. The image of the object can be extracted from the coincidence rate of these two photons. From a classical perspective, the image is proportional to the fourth-order correlation function of the wave field. Using classical statistical optics, we study a particular aspect of coincidence imaging with incoherent sources. As an application, we give a proposal to realize lensless Fourier-transform imaging, and discu…
Today, the nature of light is accounted for by one of the jewels of physics, quantum electrodynamics (QED), the fundamental theory of light and matter. Yet owing to its infinite complexity, scientists still debate how its central concept, the photon, can be reconciled with the perceived existence of light waves, emerging 200 years ago in the wake of Young's double slit diffraction experiment. Ever since, the phenomenon of diffraction has been viewed to embody the wave nature of light, leading to the schizophrenic wave-particle duality. The latter does not exist in QED which is photon based wit…
Sources of broadband quantum correlated photons present a valuable resource for quantum metrology, sensing, and communication. Here, we report the generation of spectrally broadband correlated photons from frequency nondegenerate spontaneous parametric down-conversion in a custom-designed lithium niobate superlattice. The superlattice induces a nonlinear interference, resulting in an experimentally observed comb-like emission spanning 0.060 um and 1.4 um of spectral bandwidth at 0.647 um and 3.0 um wavelengths, respectively. In addition to useful technological applications, our concept offers …
We propose a novel quantum diffraction imaging technique whereby one photon of an entangled pair is diffracted off a sample and detected in coincidence with its twin. The image is obtained by scanning the photon that did not interact with matter. We show that when a dynamical quantum system interacts with an external field, the phase information is imprinted in the state of the field in a detectable way. The contribution to the signal from photons that interact with the sample scales as $\propto I_{p}^{1/2}$, where $I_{p}$ is the source intensity, compared to $\propto I_{p}$ of classical diffr…
A test on quantum mechanics proposed long ago by Karl Popper is reconsidered with further detail and new insight. An ambiguity in the proposal, which turns out to be essential in order to make the test conclusive, is identified and taken into account for the first time. Its implications for recently performed photon experiments [such as in D. V. Strekalov \textit{et al.}, Phys. Rev.\ Lett. {\bf 74}, 3600 (1995)] are briefly analyzed.
Feynman photon path integral calculations of optical reflection, diffraction, and scattering from conduction electrons
本文利用费曼光子路径积分计算传导电子对光子的反射、衍射和散射概率，通过五个典型例子揭示不同几何与厚度条件下的干涉行为，并解释低温n型GaAs闪烁光子逃逸全内反射的机制。
Atomic diffraction from single-photon transitions in gravity and Standard-Model extensions
本研究探讨了在引力及标准模型扩展（含暗物质与等效原理破缺）下，单光子跃迁（磁感应和直接跃迁）对超长基线原子干涉仪中原子衍射的影响，考虑了相对论效应及光脉冲啁啾带来的修正动量转移。
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