Femtosecond laser micromachining (FLM) fabricated waveguides inherently form elliptical cores due to differences in focal spot size and the Rayleigh range of the microscope objective. Consequently, it is essential to study their propagation characteristics, which differ from those of conventional circular-core waveguides. In this work, we present the results of a parametric optimization of these waveguides to identify fabrication parameters that lead to minimal loss. A propagation loss characterization study revealed that, for a laser wavelength of 1030 nm, a pulse width of $\sim$300 fs, a pulse energy of 600 nJ, a scan speed of 2 mm/s, and a repetition rate of 100 kHz, a transparent and micro-bubble-free waveguide with a propagation loss of $\sim$0.4 dB/cm was formed. The modal analysis further demonstrated that the V-number depends on the core aspect ratio. The waveguide modes were compared with computationally generated modes, revealing a correlation that aligns well with existing literature.
Surface nanoscale axial photonics (SNAP) structures are fabricated with a femtosecond laser for the first time. The inscriptions introduced by the laser pressurize the fiber and cause its nanoscale effective radius variation. We demonstrate the subangstrom precise fabrication of individual and coupled SNAP microresonators having the effective radius variation of several nanometers. Our results pave the way to a novel ultraprecise SNAP fabrication technology based on the femtosecond laser inscription.
We report on fabrication of depressed cladding optical waveguides buried in lithium niobate crystal with shaped femtosecond laser pulses. Depressed cladding waveguides of variable mode-field sizes are fabricated by forming the four sides of the cladding using a slit-beam shaping technique. We show that the waveguides fabricated by our technique allows single-mode propagation of the light polarized in both vertical and horizontal directions.
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline material…
We report on fabrication of whispering-gallery-mode microlasers in a Nd:glass chip by femtosecond laser three-dimensional (3D) micromachining. Main fabrication procedures include the fabrication of freestanding microdisks supported by thin pillars by femtosecond laser ablation of the glass substrate immersed in water, followed by CO2 laser annealing for surface smoothing. Lasing is observed at a pump threshold as low as ~69 μW at room temperature with a continuous-wave laser diode operating at 780nm. This technique allows for fabrication of microcavities of high quality factors in various diel…
Fast fabrication of micro-optical elements for generation of optical vortex beams based on the q-plate design is demonstrated by femtosecond (fs) laser ablation of gold film on glass. Q-plates with diameter of ~0.5 mm were made in ~1 min using galvanometric scanners with writing speed of 5 mm/s. Period of gratings of 0.8 micrometers and groove width of 250 nm were achieved using fs-laser ablation at 343 nm wavelength. Phase and intensity analysis of optical vortex generators was carried out at 633 nm wavelength and confirmed the designed performance. Efficiency of spin-orbital conversion of th…
We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO_2 laser irradiation. The integrated microresonator maintains a high Q-facto…
We have investigated the effect of the laser wavelength on the fabrication of optical waveguides and tracks of modified material via direct laser writing inside fused silica. The size of the laserinscribed tracks, the material modification thresholds, the structural changes, and the waveguide writing energy range show a strong dependence on laser wavelengths ranging from ultraviolet to near-infrared. We used numerical simulations that consider the laser-excited electron plasma dynamics (via multiple rate equations) along with Gaussian beams theory to calculate the size of the laser-affected vo…
We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 * 6 optical switch, and a balanced 3 * 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.
Fabrication of large area (sub 1 cm cross-section) micro-optical components in a short period of time (approximately 10 min) and with lesser number of processing steps is highly desirable and cost-effective. In the recent years, femtosecond laser fabrication technology has revolutionized the field of manufacturing by offering the above capabilities. In this study, a fundamental diffractive optical element, binary axicon i.e axicon with two phase or amplitude levels, has been designed in three configurations namely conventional axicon, photon sieve axicon (PSA) and sparse PSA and directly mille…
We demonstrate fabrication of a high quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-um-diameter disks with a 200-nm-gap are fabricated. With our device, an optical quality factor as high as 1.2*10^5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.
The authors describe the fabrication of buried waveguides in a highly nonlinear chalcogenide glass, gallium lanthanum sulfide, using focused femtosecond laser pulses. Through optical characterization of the waveguides, they have proposed a formation mechanism and provide comparisons to previous work. Tunneling has been identified as the dominant nonlinear absorption mechanism in the formation of the waveguides. Single mode guidance at 633 nm has been demonstrated. The writing parameters for the minimum propagation loss of 1.47 dB/cm are 0.36 uJ pulse energy and 50 um/s scanning speed.
Laser-micromachined silicon-platelet feedhorns for large-scale submillimeter and millimeter-wave focal planes
Quantum Sensors Division, National Institute of Standards and Technology（美国国家标准与技术研究院量子传感器部）；Inertial Fusion Technology Division, Energy Group, General Atomics（通用原子能公司惯性聚变技术部能源组）；Department of Physics, University of Colorado, Boulder（科罗拉多大学博尔德分校物理系）；Fermi National Accelerator Laboratory（费米国家加速器实验室）
Formation dynamics of the nanojets and nanocrowns induced on the surface of the Cu supported films of different thickness under the impact of tightly focused femtosecond pulses was studied in detail. We show that the single-shot fs-pulse irradiation of the 120-nm-thick Cu film results in formation of a single nanojet, which splits at increased pulse energy into two and then into a plurality of periodically arranged nanospikes eventually acquiring the form of the so-called nanocrown. The number of nanospike in the nanocrown was found to be linearly dependent on the pulse energy and nanocrown ra…
Surface nanoscale axial photonics (SNAP) microresonators with nanoscale effective radius variation (ERV) along optical fiber axis can be fabricated by inscribing axially oriented lines inside the fiber with a femtosecond laser. The optimization of variable parameters in the femtosecond laser inscription technique is of great significance for flexible and ultra-high precision control of ERV, which is vital to the performance of SNAP devices. Here, we present the first systematical investigation on the relationships between the various controllable fabrication parameters and the introduced ERV o…
SNAP microresonators, which are fabricated by nanoscale effective radius variation (ERV) of the optical fiber with sub-angstrom precision, can be potentially used as miniature classical and quantum signal processors, frequency comb generators, as well as ultraprecise microfluidic and environmental optical sensors. Many of these applications require the introduction of nanoscale ERV with a large contrast α which is defined as the maximum shift of the fiber cutoff wavelength introduced per unit length of the fiber axis. The previously developed fabrication methods of SNAP structures, which used …
We propose and experimentally demonstrate femtosecond direct laser writing with Bessel beams for the fabrication of photonic crystals with spatial filtering functionality. Such filters are mechanically stable, of small (of order of millimeter) size, do not require direct access to the far-field domain, and therefore are excellent candidates for intracavity spatial filtering applications in mini- and micro-lasers. The technique allows the fabrication of efficient photonic crystal spatial filters in glass, with a narrow angle (~1 degree) nearly 100%-transmission pass-band between broad angle (up…
Dewetting of thin metal films is one of the most widespread method for functional plasmonic nanostructures fabrication. However, simple thermal-induced dewetting does not allow to control degree of nanostructures order without additional lithographic process steps. Here we propose a novel method for lithography-free and large-scale fabrication of plasmonic nanostructures via controllable femtosecond laser-induced dewetting. The method is based on femtosecond laser surface pattering of a thin film followed by a nanoscale hydrodynamical instability, which is found to be very controllable under s…
We report on fabrication of tubular optical waveguides buried in ZBLAN glass based on transverse femtosecond laser direct writing. Irradiation in ZBLAN with focused femtosecond laser pulses leads to decrease of refractive index in the modified region. Tubular optical waveguides of variable mode areas are fabricated by forming the four sides of the cladding with slit-shaped femtosecond laser pulses, ensuring single mode waveguiding with a mode field dimension as small as ~ 4 μm.
We propose to use femtosecond direct laser writing technique to realize dielectric optical elements from photo-resist materials for the generation of structured light from purely geometrical phase transformations. This is illustrated by the fabrication and characterization of spin-to-orbital optical angular momentum couplers generating optical vortices of topological charge from 1 to 20. In addition, the technique is scalable and allows obtaining microscopic to macroscopic flat optics. These results thus demonstrate that direct 3D photopolymerization technology qualifies for the realization of…
Femtosecond laser writing is applied to form Bragg grating waveguides in the diamond bulk. Type II waveguides are integrated with a single pulse point-by-point periodic laser modification positioned towards the edge of the waveguide core. These photonic devices, operating in the telecommunications band, allow for simultaneous optical waveguiding and narrowband reflection from a 4th order grating. This fabrication technology opens the way towards advanced 3D photonic networks in diamond for a range of applications.
We have demonstrated the fabrication and characterization of 2D liquid-based multimode optical waveguide structures over a Polydimethylsiloxane (PDMS) material-based chip. Fabrication of two separate microstructures, one with a width of 14 microns and a depth of 27 microns while the other with a width as well as depth of 110 microns, was achieved by the femtosecond laser micromachining process. The dye solution is passed through the microstructure from one end to the other; wherein the dye solution acts as the core while PDMS and air act as the cladding medium. The femtosecond laser micromachi…
We propose a feedback-assisted direct laser writing method to perform laser ablation of fiber optics devices in which their light-collection signal is used to optimize their properties. A femtosecond-pulsed laser beam is used to ablate a metal coating deposited around a tapered optical fiber, employed to show the suitability of the approach to pattern devices with small radius of curvature. During processing, the same pulses generate two-photon fluorescence in the surrounding environment and the signal is monitored to identify different patterning regimes over time through spectral analysis. T…
We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly consists of formation of freestanding microdisks by femtosecond laser direct writing and subsequent wet chemical etching. CO2 laser annealing is followed to smooth the microcavity surface. Microcavities with arbitrary tilting angle, lateral and vertical positioning are demonstrated, and the quality (Q)-factor of a typical microcavity is measured to be up to …
We report on fabrication of high Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser microfabrication. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of 2.5x10^5 around 1550 nm wavelength range. Moreover, second harmonic generation with a continuous-wave tunable single-longitudinal-mode pump laser in the on-chip LN microresonator is demonstrated in the on-chip LN microresonator. A fiber taper is employed to couple the pump laser into the microresonator, showing a normalized conversion efficiency of 1.…
We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber taper to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21x10^5 as measured in ai…
We report on femtosecond laser writing of single mode optical waveguides in chalcogenide Gallium Lanthanum Sulphide (GLS) glass. A multiscan fabrication process was employed to create waveguides with symmetric single mode guidance and low insertion losses at 800 nm wavelength, compatible with Ti:Sapphire ultrafast lasers. μRaman and X-Ray microanalysis were used to elucidate the origin of the laser-induced refractive index change in GLS. Nonlinear refractive index measurements of the waveguides were performed by finding the optical switching parameters of a directional coupler, demonstrating t…
We report the fabrication of large-area phase masks on thin fused-silica substrates that are suitable for shaping multi-terawatt femtosecond laser beams. We apply these phase masks for the generation of intense femtosecond optical vortices. We further quantify distortions of the vortex beam patterns that result from several common types of mask defects.
Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional structures for optical micromanipulation, in an optical system based on a femtosecond laser. By carefully adjusting the laser power and the exposure time we were able to create micro-objects with well-defined 3D features and with resolution below the diffraction limit of light. We discuss the performance and capabilities of a microfabrication system, with some exa…
Visible luminescence is observed from the composite of SiO2 with embedded silicon nanocrystallites produced by femtosecond laser irradiation of hydrogenated amorphous silicon (a-Si:H) film in air. The photoluminescence originates from the defect states at the interface between silicon crystallites and SiO2 matrix. The method could be used for fabrication of luminescent layers to increase energy conversion of a-Si:H solar cells.
Utilizing continues-wave or pulsed laser to induce nano-structures on various material surfaces is one significant method in nano-fabrication technology. In this report, we investigate the formation of high spatial frequency periodic structures on Polyvinyl Pyrrolidone (PVP) film by a linearly polarized femtosecond laser. Ferric (Fe) ions are introduced into the film to improve the photosensitivity. Regular nano-gratings with spatial periods at the range of 60-100nm, which are about one tenth of the irradiating wavelength, can be induced. The period direction of the nano-gratings is perpendicu…
A novel method for single-step, lithography-free, and large-scale laser writing of nanoparticle-based plasmonic structures has been developed. Changing energy of femtosecond laser pulses and thickness of irradiated gold film it is possible to vary diameter of the gold nanoparticles, while the distance between them can be varied by laser scanning parameters. This method has an advantage over the most previously demonstrated methods in its simplicity and versatility, while the quality of the structures is good enough for many applications. In particular, resonant light absorbtion/scattering and …
We demonstrate that thousands of periodic nano-craters are fabricated on a subwavelength-diameter tapered optical fiber, an optical nanofiber, by irradiating with just a single femtosecond laser pulse. A key aspect of the fabrication is that the nanofiber itself acts as a cylindrical lens and focuses the femtosecond laser beam on its shadow surface. We also demonstrate that such periodic structures on the nanofiber, act as a 1-D photonic crystal (PhC). Such PhC structures on the nanofiber will strongly enhance the field confinement in such a tapered fiber-based system and may open new avenues …
It is very challenging to achieve near perfect absorption/emission that is both broadband and omnidirectional while utilizing a scalable fabrication process. Femtosecond laser surface processing is an emerging low-cost and large-scale manufacturing technique used to directly and permanently modify the surface properties of a material. The versatility of this technique to produce tailored surface properties has resulted in a rapidly growing number of applications. Here, we demonstrate near perfect, broadband, omnidirectional emissivity from aluminum surfaces by tuning the laser surface processi…
The use of femtosecond lasers to introduce controlled stress states has recently been demonstrated in silica glass. We use this technique, in combination with chemical etching, to generate and control stress-induced birefringence over a well-defined region of interest, demonstrating direct-write wave plates with precisely tailored retardance levels. This tailoring enables the fabrication of laser-written polarization optics that can be tuned to any wavelength for which silica is transparent and with a clear aperture free of any laser modifications. Using this approach, we achieve sufficient re…
Femtosecond Engineering of PolyMethylPentene(PMP) Nonlinearity via NA, Spin/orbital angular momentum (OAM), and In-Situ SC Diagnostics
Hong Kong Polytechnic University（香港理工大学）；Chongqing University of Arts and Sciences（重庆文理学院）；University of Liverpool（利物浦大学）；John Moores University（约翰摩尔斯大学）；TPM3D Direct Manufacturing Co., Ltd.（TPM3D直接制造有限公司）
The concept of high refractive index subwavelength dielectric nanoresonators, supporting electric and magnetic optical resonances, is a promising platform for waveguiding, sensing, and nonlinear nanophotonic devices. However, high concentration of defects in the nanoresonators diminishes their resonant properties, which are crucially dependent on their internal losses. Therefore, it seems to be inevitable to use initially crystalline materials for fabrication of the nanoresonators. Here, we show that the fabrication of crystalline (low-loss) resonant silicon nanoparticles by femtosecond laser …
This work represents a particular application of waveguide fabricated by femtosecond laser micromachining technology. More specifically, we report the development of an optical modulator based on the fabrication of single-mode optical waveguide structures buried in X-cut lithium niobate crystal with the femtosecond laser direct writing method. Here, change in refractive index profile is measured using near field intensity profile measurement method at optimized writing conditions. It has been observed that the change refractive index (Δn) is in the range of 10-4. Finally, the behavior of femto…
Mie-lithography: void-resonance-assisted femtosecond laser printing for deep-ultraviolet to near-infrared nano dispersion devices
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University（精密测试技术与仪器国家重点实验室，精密仪器系，清华大学）；MIIT Key Laboratory of Complex-field Intelligent Exploration, School of Optics and Photonics, Beijing Institute of Technology（工业和信息化部复杂场智能探测重点实验室，光学与光子学院，北京理工大学）
Hybrid Femtosecond Laser and Ion-Implantation Processing for Controlled, Deep, High-Efficiency Ablation in Fused Silica
Instituto de Optica Daza de Valdes (IO), CSIC（西班牙科学研究中心光学研究所）；HiLASE Centre, FZU - Institute of Physics of the Czech Academy of Sciences（捷克科学院物理研究所 HiLASE 中心）；Universidad Autónoma de Madrid（马德里自治大学）；Centro de Microanálisis de Materiales (CMAM), Universidad Autónoma de Madrid（马德里自治大学材料微分析中心）；FZU - Institute of Physics of the Czech Academy of Sciences（捷克科学院物理研究所）
Diamond has attracted great interest as a quantum technology platform thanks to its optically active nitrogen vacancy center (NV). The NV's ground state spin can be read out optically exhibiting long spin coherence times of about 1 ms even at ambient temperatures. In addition, the energy levels of the NV are sensitive to external fields. These properties make NVs attractive as a scalable platform for efficient nanoscale resolution sensing based on electron spins and for quantum information systems. Diamond photonics enhances optical interaction with NVs, beneficial for both quantum sensing and…
Microfabrication of Paul wheel trap chip in fused silica by selective laser etching
Institute of Scientific Instruments of the Czech Academy of Sciences（捷克科学院科学仪器研究所）；Institute of Physical Engineering, Faculty of Mechanical Engineering, Brno University of Technology（Brno理工大学机械工程学院物理工程研究所）
Laser-induced modification of transparent solids by intense femtosecond laser pulses allows fast integration of nanophotonic and nanofluidic devices with controlled optical properties. So far, the local and dynamic nature of the interactions between plasma and light needed to correctly explain nanograting fabrication on dielectric surfaces has been missing in the theoretical models. With our numerical approach, we show that a self-consistent dynamic treatment of the plasma formation and its interaction with light triggers an ultrafast reconfiguration of the periodic plasma patterns on a field-…
Currently, direct-write waveguide fabrication is probably the most widely studied application of femtosecond laser micromachining in transparent dielectrics. Devices such as buried waveguides, power splitters, couplers, gratings and optical amplifiers have all been demonstrated. Waveguide properties depend critically on the sample material properties and writing laser characteristics. In this paper we discuss the challenges facing researchers using the femtosecond laser direct-write technique with specific emphasis being placed on the suitability of fused silica and phosphate glass as device h…
Low-loss single-mode optical waveguide fabrication process in extra-white soda-lime glass is demonstrated. Waveguiding structures are formed in bulk substrates employing femtosecond laser writing technology. The combination of a slit beam-shaping method and a multiscan fabrication process enables printing of waveguides with a well-defined symmetric cross-section profile. Fabricated waveguides exhibit 0.86 dB/cm propagation loss for 800~nm wavelength. Bending loss in the waveguides are addressed experimentally and compared with a model for radiation loss.
Laser-induced periodic surface structures (LIPSSs) on various materials have been extensively investigated because of their wide applications. The combination of different materials allows for greater freedom in tailoring their functions and achieving responses not possible in a homogeneous material. By utilizing a femtosecond (fs) laser to irradiate the Fe-doped Polyvinyl Pyrrolidone (PVP) composite film, highly regular ultrafine nanogratings (U-nanogratings) with a period as small as 35.0 ($\pm$ 2.0) nm can be self-organized on the surface with extremely high efficiency. The period of the U-…
Light plays the central role in many applications. The key to unlocking its versatility lies in shaping it into the most appropriate form for the task at hand. Specifically tailored refractive index modifications, directly manufactured inside glass using a short pulsed laser, enable an almost arbitrary control of the light flow. However, the stringent requirements for quantitative knowledge of these modifications, as well as for fabrication precision, have so far prevented the fabrication of light-efficient aperiodic photonic volume elements (APVEs). Here we present a powerful approach to the …
Hybrid nanophotonics based on metal-dielectric nanostructures unifies the advantages of plasmonics and all-dielectric nanophotonics providing strong localization of light, magnetic optical response and specifically designed scattering properties. Here we demonstrate a novel approach for fabrication of ordered hybrid nanostructures via femtosecond laser melting of asymmetrical metal-dielectric (Au-Si) nanoparticles created by lithographical methods. The approach allows selective reshaping of the metal components of the hybrid nanoparticles without affecting dielectric ones. We apply the develop…
The employment of femtosecond pulsed lasers has received significant attention due to its capability to facilitate fabrication of precise patterns at the micro- and nano- lengths scales. A key issue for efficient material processing is the accurate determination of the damage threshold that is associated with the laser peak fluence at which minimal damage occurs on the surface of the irradiated solid. Despite a wealth of previous reports that focused on the evaluation of the laser conditions that lead to the onset of damage, the investigation of both the optical and thermal response of thin fi…
