UV固化树脂双光子光聚合制备光驱动微机械微结构
Fabrication of micro-structures for optically driven micromachines using two-photon photopolymerization of UV curing resins
摘要：
紫外光固化树脂的双光子光聚合是一种有吸引力的方法，用于制造尺寸在几十微米范围内的微观透明物体。我们一直在使用这种方法来产生三维结构的光学微操作，在一个基于飞秒激光的光学系统。通过仔细调整激光功率和曝光时间，我们能够创建具有良好定义的3D特征和低于光衍射极限的分辨率的微物体。我们讨论的性能和能力的微细加工系统，其产品的一些例子。
英文摘要：
Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional structures for optical micromanipulation, in an optical system based on a femtosecond laser. By carefully adjusting the laser power and the exposure time we were able to create micro-objects with well-defined 3D features and with resolution below the diffraction limit of light. We discuss the performance and capabilities of a microfabrication system, with some examples of its products.
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