Surface nanoscale axial photonics (SNAP) microresonators with nanoscale effective radius variation (ERV) along optical fiber axis can be fabricated by inscribing axially oriented lines inside the fiber with a femtosecond laser. The optimization of variable parameters in the femtosecond laser inscription technique is of great significance for flexible and ultra-high precision control of ERV, which is vital to the performance of SNAP devices. Here, we present the first systematical investigation on the relationships between the various controllable fabrication parameters and the introduced ERV of the SNAP microresonators. Specifically, both the qualitative and quantitative processing principles were revealed. As a proof-of-principle, by comprehensively optimizing the fabrication parameters, we realized a SNAP microresonator with the characteristics of both small axial size and maximal ERV, which is almost impossible to realize with other SNAP fabrication techniques. Our work promotes the fs laser inscription technology to be a flexible and versatile approach for fabricating the SNAP devices with ultra-high precision, ultra-low loss and high robustness.
We report on fabrication of high Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser microfabrication. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of 2.5x10^5 around 1550 nm wavelength range. Moreover, second harmonic generation with a continuous-wave tunable single-longitudinal-mode pump laser in the on-chip LN microresonator is demonstrated in the on-chip LN microresonator. A fiber taper is employed to couple the pump laser into the microresonator, showing a normalized conversion efficiency of 1.…
If the originally flat bottom of a wide quantum well with multiple eigenstates is periodically modulated, its eigenvalues rearrange into denser groups separated by wider gaps. We show that this effect, if implemented in an elongated bottle microresonator (also called a SNAP microresonator) allows to design microwave photonic tunable filters with an outstanding performance.
We experimentally demonstrate series of identical two, three, and five coupled high Q-factor Surface Nanoscale Axial Photonics (SNAP) microresonators formed by periodic nanoscale variation of the optical fiber radius. These microresonators are fabricated with a 100 \mum period along an 18 \mum radius optical fiber. The axial FWHM of these microresonators is 80 \mum and their Q-factor exceeds 107. In addition, we demonstrate a SNAP microresonator with the axial FWHM as small as 30 \mum and the axial FWHM of the fundamental mode as small as 10 \mum. These results may potentially enable the dense…
We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber taper to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21x10^5 as measured in ai…
We demonstrate integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67*10^5.
Nonlinear optical processes in whispering gallery mode (WGM) microresonators have attracted much attention. Owing to the strong confinement of light in a small volume, a WGM microresonator can dramatically boost the strength of light field, thereby promoting the nonlinear interaction between the light and the resonator material. However, realization of efficient nonlinear parametric process in microresonators is a challenging issue. The major difficulty is to simultaneously ensure the phase matching condition and a coherent multiple resonance condition for all the waves participating in the no…
We present a simple lithographic method for fabrication of microresonator devices at the optical fiber surface. First, we undress the predetermined surface areas of a fiber segment from the polymer coating with a focused CO2 laser beam. Next, using the remaining coating as a mask, we etch the fiber in a hydrofluoric acid solution. Finally, we completely undress the fiber segment from coating to create a chain of silica bottle microresonators with nanoscale radius variation (SNAP microresonators). We demonstrate the developed method by fabrication of a chain of five 1 mm long and 30 nm high mic…
SNAP microresonators, which are fabricated by nanoscale effective radius variation (ERV) of the optical fiber with sub-angstrom precision, can be potentially used as miniature classical and quantum signal processors, frequency comb generators, as well as ultraprecise microfluidic and environmental optical sensors. Many of these applications require the introduction of nanoscale ERV with a large contrast α which is defined as the maximum shift of the fiber cutoff wavelength introduced per unit length of the fiber axis. The previously developed fabrication methods of SNAP structures, which used …
We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First two metallic microelectrodes on the substrate were formed via femtosecond laser process. Then a high-Q lithium niobate microresonator located between the microelectrodes was fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Due to the efficient structure designing, high electro-optical tuning coefficient of 3.41 pm/V was observed.
Surface nanoscale axial photonics (SNAP) structures are fabricated with a femtosecond laser for the first time. The inscriptions introduced by the laser pressurize the fiber and cause its nanoscale effective radius variation. We demonstrate the subangstrom precise fabrication of individual and coupled SNAP microresonators having the effective radius variation of several nanometers. Our results pave the way to a novel ultraprecise SNAP fabrication technology based on the femtosecond laser inscription.
Recently introduced Surface Nanoscale Axial Photonics (SNAP) makes it possible to fabricate high Q-factor microresonators and other photonic microdevices by dramatically small deformation of the optical fiber surface. To become a practical and robust technology, the SNAP platform requires methods enabling reproducible modification of the optical fiber radius at nanoscale. In this Letter, we demonstrate super-accurate fabrication of high Q-factor microresonators by nanoscale modification of the optical fiber radius and refractive index using the CO2 laser and the UV excimer laser beam exposures…
We develop a theory of optical frequency comb generation in ultra-compact Surface Nanoscale Axial Photonic (SNAP) bottle microresonators, employing the nonlinear interaction of whispering gallery modes which are confined along an optical fiber with nanoscale radius variation. We predict that a SNAP microresonator with a few-$μ$m radius can generate a frequency comb with an ultra-fine sub-GHz spectral spacing, which would require traditional ring resonators of $cm$ radius. We identify regimes of stable or quasi-periodic comb dynamics due to soliton excitation, and also show that special enginee…
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline material…
We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO_2 laser irradiation. The integrated microresonator maintains a high Q-facto…
Cavity optomechanics, the study of the interplay between light and mechanical properties of matter, has triggered a wide range of groundbreaking researches from cavity quantum electrodynamics, label free single molecule detection to the creation of phonon laser. Using femtosecond laser direct writing followed by chemo-mechanical polishing, here we report an ultrahigh quality (Q~10^7) factor lithium niobate (LN) whispering gallery microresonator monolithically integrated with in-plane microelectrodes. Coherent regenerative optomechanical oscillation with an effective mechanical quality (Qm) fac…
We demonstrate a new method for creation of surface nanoscale axial photonics (SNAP) microresonators with harmonic profiles via fiber tapering in a laser-heated microfurnace. The simple procedure makes microresonators that support hundreds of axial modes with good spacing uniformity, yielding a promising prospective method for fabricating miniature frequency comb generators and dispersionless delay lines.
We report on fabrication of a microtoroid resonator of high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3D) micromachining. The microheater, which is located about 200 micron away from the microresonator, has a footprint size of 200 micron by 400 micron. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The drifting of the resonant wavelength shows a linear dependence on the square of the voltage applied…
Lithium niobate(LN) microresonator is a key component in photonic integrated circuits. An intriguing phenomenon was observed that the quality factor for specific modes of the resonator can be further improved by femtosecond laser irradiation. The high repetition laser pulses scatters into the cavity by forming a defect on the surface and is confined in the edge. A localized coupled laser refining process will then repair the lattice disorders and tiny burrs on the periphery. The intrinsic quality factor of a measured mode can be promoted from 2.17$\times$10$^5$ to 1.84$\times$10$^6$ indicating…
Frequency combs and coherent dissipative structures in nonlinear optical microresonators
Deutsches Elektronen-Synchrotron DESY（德国电子同步加速器）；Universität Hamburg（汉堡大学）；Laboratoire Temps-Fréquence, Université de Neuchâtel（纳沙泰尔大学时间频率实验室）；Swiss Federal Institute of Technology (EPFL)（瑞士联邦理工学院（洛桑联邦理工学院））
The formation of temporal dissipative solitons in continuous wave laser driven microresonators enables the generation of coherent, broadband and spectrally smooth optical frequency combs as well as femtosecond pulses with compact form factor. Here we report for the first time on the observation of a Raman-induced soliton self-frequency shift for a microresonator soliton. The Raman effect manifests itself in amorphous SiN microresonator based single soliton states by a spectrum that is hyperbolic secant in shape, but whose center is spectrally red-shifted (i.e. offset) from the continuous wave …
We present few-femtosecond shadowgraphic snapshots taken during the non-linear evolution of the plasma wave in a laser wakefield accelerator with transverse synchronized few-cycle probe pulses. These snapshots can be directly associated with the electron density distribution within the plasma wave and give quantitative information about its size and shape. Our results show that self-injection of electrons into the first plasma wave period is induced by a lengthening of the first plasma period. Three dimensional particle in cell simulations support our observations.
We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.
Irradiation of intense ultrafast laser pulses in glasses can lead to formation of nanogratings whose periods are significantly smaller than the incident irradiation wavelength. The mechanism of the exotic phenomenon is still under debate. Here, we access the snapshots of morphologies in the laser affected regions in a porous glass which reveal the evolution of the formation of nanogratings with increasing number of laser pulses. Combined with further theoretical analyses, our observation provides important clues which suggest that excitation of standing plasma waves at the interfaces between a…
Photolithography assisted chemo-mechanical etching (PLACE), a technique specifically developed for fabricating highquality large-scale photonic integrated circuits (PICs) on thin-film lithium niobate (TFLN), has enabled fabrication of a series of building blocks of PICs ranging from high-quality (high-Q) microresonators and low-loss waveguides to electrooptically (EO) tunable lasers and waveguide amplifiers. Aiming at high-throughput manufacturing of the PIC devices and systems, we have developed an ultra-high-speed high-resolution laser lithography fabrication system employing a high repetiti…
Femtosecond Three-Dimensional Imaging of Single-Protein with Hard X-ray Laser
Deutsches Elektronen Synchrotron DESY（德国电子同步加速器）；European XFEL（欧洲自由电子激光）；Max-Planck Institute for the Structure and Dynamics of Matter（马普物质与结构动力学研究所）；Universität Hamburg（汉堡大学）；University of Melbourne（墨尔本大学）；Arizona State University（亚利桑那州立大学）；University of Washington（华盛顿大学）；National University of Singapore（新加坡国立大学）；New York University（纽约大学）；Stanford University（斯坦福大学）；SLAC National Accelerator Laboratory（斯坦福直线加速器中心）；Harvard University（哈佛大学）；Massachusetts Institute of Technology（麻省理工学院）；Uppsala University（乌普萨拉大学）；University of Rome Tor Vergata（罗马第二大学）；INFN（意大利国家核物理研究所）；Lawrence Berkeley National Laboratory（劳伦斯伯克利国家实验室）；Royal Melbourne Institute of Technology（皇家墨尔本理工大学）；University at Buffalo（布法罗大学）；Ca’ Foscari University of Venice（威尼斯大学）；Swinburne University of Technology（斯威本科技大学）；Politecnico di Milano（米兰理工大学）
