发表机构
Institute of Scientific Instruments of the Czech Academy of Sciences; Institute of Physical Engineering, Faculty of Mechanical Engineering, Brno University of Technology（捷克科学院科学仪器研究所; Brno理工大学机械工程学院物理工程研究所）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本文提出基于选择性激光刻蚀的熔融石英Paul轮阱芯片快速无掩模制造工艺，显著缩短周期并验证了微粒连续捕获72小时的功能。
AI 中文摘要
我们提出了一种基于熔融石英选择性激光刻蚀（SLE）的快速、无掩模的Paul轮阱芯片制造流程。完整工艺——飞秒激光写入、KOH湿化学刻蚀（约230微米/小时，约2小时内从500微米晶圆释放阱几何结构）、射频磁控溅射银电极以及用于电极图案化的直接飞秒激光烧蚀——全部在内部完成，完全绕过了光刻工艺和定制掩模。每片4英寸晶圆可在一个工作日内生产9个芯片，与外包的CVD金刚石设计相比，制造周期缩短了一个多数量级。通过概念验证的微粒捕获演示验证了所制造轮阱芯片的功能，在该演示中，单个微粒在大气压下连续被约束72小时。这确立了熔融石英SLE作为悬浮光力学应用中Paul阱的快速、经济可行的制造平台。
英文摘要
We present a rapid, mask-free fabrication workflow for the Paul wheel trap chip based on selective laser etching (SLE) of fused silica. The complete process - femtosecond laser writing, wet-chemical etching in KOH ($\sim$230 $μ$m/h, releasing the trap geometry from a 500 $μ$m wafer in approximately 2 h), RF magnetron sputtering of silver electrodes, and direct femtosecond laser ablation for electrode patterning - is carried out in-house, bypassing photolithographic processing and custom shadow masks entirely. Nine chips per 4-inch wafer can be produced in a single working day, reducing the fabrication lead time by more than one order of magnitude relative to the outsourced CVD diamond design. The functionality of the fabricated wheel trap chip is confirmed by a proof-of-concept microparticle trapping demonstration, in which a single microparticle was confined continuously for 72 h at atmospheric pressure. This establishes SLE of fused silica as a rapid, economically accessible fabrication platform for Paul traps in levitated-optomechanics applications.
Comments11 pages, 6 figures. Submitted to Micro and Nano Engineering
