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arXiv 2207.02520cond-mat.mtrl-sci
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高掺硼硅laser中硼对的证据

Evidence of boron pairs in highly boron laser doped silicon

Léonard Desvignes, Francesca Chiodi, Géraldine Hallais, Dominique Débarre, Giacomo Priante, Feng Liao, Guilhem Pacot, Bernard Sermage

摘要:

在浓度为0.02at.%的掺硼硅上进行了二次离子质谱和霍尔效应测量和12at.%。超高硼掺杂是通过用BCl3饱和Si晶片的化学吸附位点,然后进行纳秒激光退火(气体浸没激光掺杂)来进行的。因此,硼浓度随着工艺重复次数几乎线性地变化。然而,空穴浓度在高硼浓度下趋于饱和的情况并非如此。硼和空穴浓度之间的差异随着硼浓度的平方而增加,指向硼对的形成作为对非活性硼的增加的主要贡献。

英文摘要:

Secondary Ions Mass Spectroscopy and Hall effect measurements were performed on boron doped silicon with concentration between 0.02 at.% and 12 at.%. Ultra-high boron doping was made by saturating the chemisorption sites of a Si wafer with BCl3, followed by nanosecond laser anneal (Gas Immersion Laser Doping). The boron concentration varies thus nearly linearly with the number of process repetitions. However, it is not the case for the hole concentration which tends to saturate at high boron concentration. The difference between boron and hole concentration increases as the square of boron concentration, pointing towards the formation of boron pairs as the dominant contribution to the increase of inactive boron.

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