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arXiv 2110.13643physics.app-phcond-mat.mtrl-sci
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氧化锌基压电压力传感器

Zinc Oxide-Based Piezoelectric Pressure Sensor

Victor K. Samoei, Ahalapitiya H. Jayatissa

摘要:

报道了氧化锌(ZnO)在可与微机电系统(MEMS)集成的压力传感器中的应用。ZnO是一种具有宽禁带和压电效应的半导体材料,是近年来受到广泛关注的材料之一。ZnO的晶体生长机制更简单,因此ZnO基传感器的成本更低。基于ZnO敏感元件的不同类型的压力传感器也已被探索。利用COMSOL有限元软件对圆形ZnO薄膜压电传感器进行了数值模拟。改变施加在薄膜表面的压力,用边界探针研究薄膜中心的位移场和电压。压力引起的位移场和电压随ZnO层上压力的增加而线性变化。Also.本文中所使用的方法被应用于不同的压电材料,例如钛酸钡(BaTiO 3)、聚偏氟乙烯(PVDF)和砷化镓(GaAs),这些材料由其他小组研究,并且得到了类似的结论。这些模拟可用于压电传感器的设计和优化的灵敏度和性能的材料中使用的压力传感器的应用。

英文摘要:

This paper reports the application of zinc oxide (ZnO) in the pressure sensors that can be integrated with a microelectromechanical system (MEMS). ZnO is one of the materials that has received a great deal of attention due to its unique properties of being a semiconductor with wide bandgap and piezoelectric effects. The simpler crystal growth mechanisms of ZnO have resulted in a lower cost of ZnO-based sensors. Different types of pressure sensors based on ZnO sensing elements have also been explored. A thin circular ZnO film was simulated as a piezoelectric sensor employing the finite element method in COMSOL. The pressure applied on the thin film surface was varied and a boundary point probe was used to study the displacement field and voltage at the center of the membrane. The displacement field and voltage induced by pressure vary linearly with increasing pressure on the ZnO layer. Also. the method used in this paper was applied to different piezoelectric materials, such as barium titanate (BaTiO3), polyvinylidene fluoride (PVDF), and gallium arsenide (GaAs) that were studied by other groups, and similar conclusions were made. These simulations can be used in the design of piezoelectric sensors and the optimization of the sensitivity and performance of the materials used in pressure sensor applications.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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