原子层沉积法制备氧化锌薄膜的抗菌性能研究
Antibacterial Activity of Zinc Oxide Thin Films by Atomic Layer Deposition for Personal Protective Equipment Applications
摘要：
全球疫情大幅增加了对个人防护装备（PPE）的需求。抗菌涂层已被广泛应用于PPE，以提高其防护能力，特别是在长时间使用后。然而，通过传统方法（例如化学气相沉积、喷涂和浆料涂覆）的抗微生物涂覆具有缺点，例如效率低、覆盖差和对PPE的松散粘附。为了克服这些局限性，本工作采用原子层沉积（ALD）技术沉积氧化锌（ZnO）薄膜（~ 312.8 nm厚）作为抗菌涂层，并证明其优点是沉积均匀的ZnO涂层的PPE织物结构。通过X射线衍射、拉曼光谱和X射线光电子能谱学分析证实了ALD-ZnO的晶体结构和化学组成。紫外-可见光谱显示，ALD-ZnO在200 nm至380 nm波长范围内具有约4.8的高吸收水平，而商业ZnO粉末的吸收水平为3.8。此外，ALD-ZnO表现出很强的抗微生物性能测试时，对大肠杆菌（大肠杆菌）的控制和裸玻璃样品相比。所有ALD-ZnO样品的菌落形成单位（CFU/ml）保持为零，而对照样品的菌落形成单位在2.30*109和4.97*109之间变化，中值为4.36*109，裸玻璃的菌落形成单位在9.10*108和3.27*109之间变化，中值为2.04 * 109。使用零假设显著性检验的统计分析显示，裸玻璃与对照、ALD-ZnO与对照以及裸玻璃与对照之间的计算P值均小于0.0001，并且显著小于0.05 α值，表明ALD-ZnO作为防止大肠杆菌生长的主要因素具有高置信水平。
英文摘要：
The global pandemic has significantly increased the demand for personal protective equipment (PPE). The antimicrobial coating has been broadly applied to PPE to improve its prevention capability, especially after prolonged usage. However, antimicrobial coating by traditional methods, such as chemical vapor deposition, spraying, and slurry coating, suffers from drawbacks such as low efficiency, poor coverage, and loose adhesion to PPE. To overcome these limitations, this work adopted an atomic layer deposition (ALD) technique to deposit a zinc oxide (ZnO) thin film (~ 312.8 nm thick) as an antimicrobial coating and proved its advantage for depositing uniform ZnO coating on PPE with a fabric structure. Analysis by X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy confirmed the crystal structure and chemical composition of the ALD-ZnO. Ultraviolet-visible spectra disclosed a high absorption level of about 4.8 from 200 nm to 380 nm wavelength for ALD-ZnO, in contrast to 3.8 for commercial ZnO powders. Moreover, the ALD-ZnO exhibited strong antimicrobial properties when tested against Escherichia coli (E.Coli) in contrast to the control and bare glass samples. The colony-forming unit (CFU/ml) remained zero for all ALD-ZnO samples while varying between 2.30*109 and 4.97*109 with a median of 4.36*109 for the control and between 9.10*108 and 3.27*109 with a median of 2.04x 109 for the bare glass. Statistic analysis using null-hypothesis significance testing revealed that the calculated P value, between bare glass and control, ALD-ZnO and control, and bare glass and control, were all smaller than 0.0001 and significantly smaller than 0.05 alpha value, suggesting a high confidence level of ALD-ZnO as the main factor for preventing E.Coli growth.
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