退火对溶胶-凝胶法制备的ZnO和AZO薄膜结构、形貌和光学性能的影响
Effect of annealing on the structural, topographical and optical properties of sol gel derived ZnO and AZO thin films
摘要：
对未掺杂的氧化锌（ZnO）和Al掺杂的氧化锌（AZO）薄膜的物理性质作为退火温度的函数进行了比较研究。使用X射线衍射和记录的图案的结构特性进行了分析表明，薄膜的结晶度总是随着退火温度的升高而增强，而它与Al掺杂降低。原子力显微镜观察到退火使所有薄膜的表面变得粗糙，但AZO薄膜的形貌总是比ZnO更光滑。通过紫外可见分光光度计研究了薄膜的光学性质，发现随着退火温度的升高，薄膜的透过率逐渐降低。此外，还观察到AZO薄膜的光学带隙显著增加。
英文摘要：
A comparative study of the physical properties of undoped Zinc Oxide (ZnO) and Al doped Zinc Oxide (AZO) thin films were performed as a function of annealing temperature. The structural properties were analyzed using X-ray diffraction and the recorded patterns indicated that the crystallinity of the films always enhanced with increasing annealing temperature while it degrades with Al doping. The topographical modification of the films due to heat treatment was examined by atomic force microscopy which revealed that annealing roughened the surface of all the films; however the AZO films always exhibited smoother morphology than ZnO. Study of the optical properties by UV-Visible spectrophotometer demonstrated that the transmittance was gradually diminished with the rise in annealing temperature. In addition, a notable increase in the optical band gap was also observed for the AZO films.
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