退火温度对溶胶-凝胶法制备的ZnO薄膜结构、形貌和光学性能的影响
Influence of annealing temperature on the structural, topographical and optical properties of sol gel derived ZnO thin films
摘要：
研究了退火温度对溶胶-凝胶法制备的氧化锌薄膜的结构、形貌和光学性能的影响。用X射线衍射研究了薄膜的结构特性，结果表明，薄膜在（002）晶面上具有择优取向，随着退火温度的升高，薄膜的结晶度和晶粒尺寸增大。原子力显微镜的形貌修饰的薄膜，由于热处理，这表明，退火粗糙的薄膜的表面进行了探测。用紫外可见分光光度计测试了薄膜的光学性能，结果表明薄膜的最大透过率接近90%，且随退火温度的升高而降低。
英文摘要：
This investigation deals with the effect of annealing temperature on the structural, topographical and optical properties of Zinc Oxide thin films prepared by sol gel method. The structural properties were studied using X-ray diffraction and the recorded patterns indicated that all the films had a preferred orientation along (002) plane and the crystallinity along with the grain size were augmented with annealing temperature. The topographical modification of the films due to heat treatment was probed by atomic force microscopy which revealed that annealing roughened the surface of the film. The optical properties were examined by a UV visible spectrophotometer which exhibited that maximum transmittance reached nearly 90% and it diminished with increasing annealing temperature.
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