arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2103.07529cond-mat.mtrl-scicond-mat.mes-hall
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用BCl $_{3}$对Si(100)的区域选择性沉积和BPDMATHAAAA掺杂

Area-selective deposition and B $δ$-doping of Si(100) with BCl$_{3}$

K. J. Dwyer, S. Baek, Azadeh Farzaneh, Michael Dreyer, J. R. Williams, R. E. Butera

摘要:

使用BCl-$_{3}$作为掺杂剂前体,在真空中在Si(100)中制备B掺杂的$δ$ -层。BC 1 PDMATHAMN在室温下容易吸附,如通过扫描隧道显微镜(STM)成像所揭示的。在升高的温度下退火促进B并入到Si衬底中。二次离子质谱(SIMS)深度分析表明,在150 $^{\circ}$ C下,30 L BCl $_{3}$剂量产生的峰B浓度$>$ 1.2(1)$\times$ 10 $^{21}$ cm $^{-3}$,总面积剂量为1.85(1)$\times$ 10 $^{14}$ cm $^{-2}$。在3.0 K下进行类似样品的霍尔棒测量,显示出在不进行退火掺入的情况下,薄层电阻为$R_{\mathrm{s}}$ = 1.91 k $Ω\square^{-1}$,空穴浓度为$n$ = 1.90 $\times$ × 10 $^{14}$ cm $^{-2}$,空穴迁移率为$μ$ = 38.0 cm $^{2}$ × $^{-1}$ × $^{-1}$。此外,几个B-掺杂的$δ$ -层的电导率显示出对温度的对数依赖性,暗示了二维系统。选择性区域沉积的BC 1 $_{3}$也证明了使用H-和Cl-基单原子抗蚀剂。与裸Si上的剂量区域相比,通过SIMS确定H和Cl抗蚀剂的吸附选择性比分别为310(10):1和1529(5):1,进一步验证了BCl $_{3}$作为掺杂剂前体用于Si中的受主掺杂器件的原子精度制造的用途。

英文摘要:

B-doped $δ$-layers were fabricated in Si(100) using BCl$_{3}$ as a dopant precursor in ultrahigh vacuum. BCl$_{3}$ adsorbed readily at room temperature, as revealed by scanning tunneling microscopy (STM) imaging. Annealing at elevated temperatures facilitated B incorporation into the Si substrate. Secondary ion mass spectrometry (SIMS) depth profiling demonstrated a peak B concentration $>$ 1.2(1) $\times$ 10$^{21}$ cm$^{-3}$ with a total areal dose of 1.85(1) $\times$ 10$^{14}$ cm$^{-2}$ resulting from a 30 L BCl$_{3}$ dose at 150 $^{\circ}$C. Hall bar measurements of a similar sample were performed at 3.0 K revealing a sheet resistance of $R_{\mathrm{s}}$ = 1.91 k$Ω\square^{-1}$, a hole concentration of $n$ = 1.90 $\times$ 10$^{14}$ cm$^{-2}$ and a hole mobility of $μ$ = 38.0 cm$^{2}$V$^{-1}$s$^{-1}$ without performing an incorporation anneal. Further, the conductivity of several B-doped $δ$-layers showed a log dependence on temperature suggestive of a two-dimensional system. Selective-area deposition of BCl$_{3}$ was also demonstrated using both H- and Cl-based monatomic resists. In comparison to a dosed area on bare Si, adsorption selectivity ratios for H and Cl resists were determined by SIMS to be 310(10):1 and 1529(5):1, respectively, further validating the use of BCl$_{3}$ as a dopant precursor for atomic precision fabrication of acceptor-doped devices in Si.

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