arXivDaily arXiv每日学术速递 周一至周五更新
北美退伍军人节(Veterans Day),12 日无更新
arXiv 2007.14427cond-mat.mtrl-sci
收藏

在外延石墨烯上原子层沉积的早期阶段的氧化铝成核

Aluminum oxide nucleation in the early stages of atomic layer deposition on epitaxial graphene

E. Schilirò, R. Lo Nigro, S. E. Panasci, F. M. Gelardi, S. Agnello, R. Yakimova, F. Roccaforte, F. Giannazzo

摘要:

采用原子力显微镜(AFM)和拉曼光谱(Raman)研究了在碳化硅(4H-SiC)表面单层外延石墨烯(EG)上直接原子层沉积(ALD)过程中氧化铝(Al2O3)的成核和生长机制。与对于其他类型的石墨烯通常观察到的相反,在EG的情况下观察到大且均匀密度的成核位点,并且归因于EG/SiC界面处缓冲层的存在。沉积过程的特征在于在非常早期的阶段中的Al2O3岛生长,随后在仅40个ALD循环之后由于岛聚结而形成连续的Al2O3膜(2.4 nm厚),以及随后的逐层生长。拉曼光谱分析表明ALD工艺对EG的缺陷密度和掺杂的影响很小。EG应变也几乎不受岛屿生长和合并的制度中的沉积,而一个显着的增加后,观察到一个紧凑的Al2O3膜的形成。所获得的结果对于需要集成超薄高k绝缘体的外延石墨烯的器件应用具有重要影响。

英文摘要:

In this work, the nucleation and growth mechanism of aluminum oxide (Al2O3) in the early stages of the direct atomic layer deposition (ALD) on monolayer epitaxial graphene (EG) on silicon carbide (4H-SiC) has been investigated by atomic force microscopy (AFM) and Raman spectroscopy. Contrary to what is typically observed for other types of graphene, a large and uniform density of nucleation sites was observed in the case of EG and ascribed to the presence of the buffer layer at EG/SiC interface. The deposition process was characterized by Al2O3 island growth in the very early stages, followed by the formation of a continuous Al2O3 film (2.4 nm thick) after only 40 ALD cycles due to the islands coalescence, and subsequent layer-by-layer growth. Raman spectroscopy analyses showed low impact of the ALD process on the defects density and doping of EG. The EG strain was also almost unaffected by the deposition in the regime of island growth and coalescence, whereas a significant increase was observed after the formation of a compact Al2O3 film. The obtained results can have important implications for device applications of epitaxial graphene requiring the integration of ultra-thin high-k insulators.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

↑