甲胺硼烷热处理产物化学气相沉积生长硼碳氮层
Chemical Vapor Deposition Growth of Boron-Carbon-Nitrogen layers from Methylamine Borane Thermolysis Products
摘要：
本文研究了以甲胺硼烷（MeAB）为单源前驱体，采用化学气相沉积法生长B-C-N多层膜。MeAB的合成和表征，特别注意其热分解产物的分析，这是B-C-N生长的气态前体。样品已经生长在铜箔上，并转移到不同的衬底上，用于其形态，结构，化学，电子和光学表征。这些表征的结果表明h-BN和石墨烯样（Gr）结构域的分离。然而，在所获得的纳米层中，分别存在B和N与C在Gr边界处的相互作用以及C在h-BN边缘处的相互作用。特别地，在Gr/h-BN边界处以及以Gr域的N掺杂的形式存在显著的C-N键。各层中B：C：N的总含量接近1：3：1.5。仔细分析所获得的B-C-N层的光学带隙的测定，讨论和比较与以前的开创性的作品与类似的组合物的样品。
英文摘要：
This work investigates the growth of B-C-N layers by chemical vapor deposition using methylamine borane (MeAB) as single-source precursor. MeAB has been synthesized and characterized, paying particular attention to the analysis of its thermolysis products, which are the gaseous precursors for B-C-N growth. Samples have been grown on Cu foils and transferred onto different substrates for their morphological, structural, chemical, electronic and optical characterizations. The results of these characterizations indicate a segregation of h-BN and Graphene-like (Gr) domains. However, there is an important presence of B and N interactions with C at the Gr borders, and of C interacting at the h-BN-edges, respectively, in the obtained nano-layers. In particular, there is significant presence of C-N bonds, at Gr/h-BN borders and in the form of N doping of Gr domains. The overall B:C:N contents in the layers is close to 1:3:1.5. A careful analysis of the optical bandgap determination of the obtained B-C-N layers is presented, discussed and compared with previous seminal works with samples of similar composition.
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