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arXiv 2101.03099cond-mat.mtrl-sci
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001 Si衬底上生长GaP的弛豫机制:缺陷对GaP/Si模板上生长AlGaPlayers的影响

Relaxation mechanism of GaP grown on 001 Sisubstrates: influence of defects on the growth of AlGaPlayers on GaP/Si templates

Konstantinos Pantzas, Grégoire Beaudoin, Myriam Bailly, Aude Martin, Arnaud Grisard, Daniel Dolfi, Olivia Mauguin, Ludovic Largeau, Isabelle Sagnes, Gilles Patriarche

摘要:

研究了商用GaP/Si模板在热退火和随后的MOCVD生长GaP和AlGaP过程中的机械稳定性,虽然模板的GaP层最初呈现出良好的表面形貌,但在生长之前在足够高的温度下退火以去除本征氧化物导致塑性弛豫,并伴随着各种缺陷,包括密集的微孪晶网格。这些微孪晶对随后在模板上生长的GaP和AlGaP层有显著的影响。

英文摘要:

The mechanical stability of commercial GaP/Si templates during thermal an-nealing and subsequent MOCVD growth of GaP and AlGaP is investigated.Although the GaP layer of the template originally presents an excellent surfacemorphology, annealing at high enough temperatures to remove the native oxideprior to growth leads to plastic relaxation, accompanied by a variety of defects,including a dense grid of micro-twins. These micro-twins detrimentally affectGaP and AlGaP layers grown subsequently on the template.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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