arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2005.02284cond-mat.mes-hallcond-mat.mtrl-sci
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使用可扩展的CVD石墨烯的高质量电传输

High-quality electrical transport using scalable CVD graphene

Sergio Pezzini, Vaidotas Mišeikis, Simona Pace, Francesco Rossella, Kenji Watanabe, Takashi Taniguchi, Camilla Coletti

摘要:

在晶圆厂兼容的规模上生产和操纵石墨烯,同时保持其出色的载流子迁移率,是最终确定其技术应用的关键。我们表明,一个大规模的方法(化学气相沉积铜,然后由聚合物介导的半干转移)产生单层石墨烯晶体完全可比,在电子传输方面,微机械剥离的薄片。hBN用于封装石墨烯晶体$-$,而不参与它们从生长催化剂$-$的分离,并研究它们在场效应器件中的固有特性。在室温下,电子-声子耦合将迁移率设置为$\sim1.3 \times10^5$ cm $^2$ V $^{-1}$ s $^{-1}$在$\sim10^{11}$ cm $^{-2}$浓度下。在低温下,迁移率($ > 6\times10^5$ cm $^2$ V $^{-1}$ s $^{-1}$ at $\sim10^{11}$ cm $^{-2}$)受到器件物理边缘的限制,并检测到电荷波动$ < 7\times10^9$ cm $^{-2}$。在垂直磁场下,我们观察到早期的朗道量子化($B\sim50$ mT)和电子相关的签名,包括分数量子霍尔效应。

英文摘要:

Producing and manipulating graphene on fab-compatible scale, while maintaining its remarkable carrier mobility, is key to finalize its technological application. We show that a large-scale approach (chemical vapor deposition on Cu followed by polymer-mediated semi-dry transfer) yields single-layer graphene crystals fully comparable, in terms of electronic transport, to micro-mechanically exfoliated flakes. hBN is used to encapsulate the graphene crystals $-$ without taking part to their detachment from the growth catalyst $-$ and study their intrinsic properties in field-effect devices. At room temperature, the electron-phonon coupling sets the mobility to $\sim1.3 \times10^5$ cm$^2$V$^{-1}$s$^{-1}$ at $\sim10^{11}$ cm$^{-2}$ concentration. At cryogenic temperatures, the mobility ($ > 6\times10^5$ cm$^2$V$^{-1}$s$^{-1}$ at $\sim10^{11}$ cm$^{-2}$) is limited by the devices' physical edges, and charge fluctuations $ < 7\times10^9$ cm$^{-2}$ are detected. Under perpendicular magnetic fields, we observe early onset of Landau quantization ($B\sim50$ mT) and signatures of electronic correlation, including the fractional quantum Hall effect.

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