用全氟聚合物转移高迁移率CVD生长的石墨烯的方法
Method for Transferring High-Mobility CVD-Grown Graphene with Perfluoropolymers
摘要：
使用无定形聚合物通过化学气相沉积（CVD）生长的石墨烯的转移代表了用于石墨烯基电子器件制造的广泛实施的方法。然而，最常用的聚合物聚甲基丙烯酸甲酯（PMMA）会在石墨烯上留下残留物，从而限制了移动性。在这里，我们报告了一种石墨烯转移和图案化的方法，该方法采用全氟聚合物-Hyronium-作为转移手柄，并保护石墨烯免受光刻胶或其他聚合物的污染。以这种方式转移到LaAlO $_3$ /SrTiO $_3$异质结构上的CVD生长的石墨烯在原子上是干净的，在2 K下在狄拉克点附近具有高迁移率（~ 30，000 cm $^2$ V $^{-1}$ s $^{-1}$）和清晰的量化霍尔和磁阻。局部控制的LaAlO $_3$ /SrTiO $_3$界面金属-绝缘体过渡-通过石墨烯-保留与此转移方法。全氟聚合物（诸如Hyplane）与CVD生长的石墨烯和其他2D材料的使用可以容易地与其他聚合物或光致抗蚀剂一起实施。
英文摘要：
The transfer of graphene grown by chemical vapor deposition (CVD) using amorphous polymers represents a widely implemented method for graphene-based electronic device fabrication. However, the most commonly used polymer, poly(methyl methacrylate) (PMMA), leaves a residue on the graphene that limits the mobility. Here we report a method for graphene transfer and patterning that employs a perfluoropolymer---Hyflon---as a transfer handle and to protect graphene against contamination from photoresists or other polymers. CVD-grown graphene transferred this way onto LaAlO$_3$/SrTiO$_3$ heterostructures is atomically clean, with high mobility (~30,000 cm$^2$V$^{-1}$s$^{-1}$) near the Dirac point at 2 K and clear, quantized Hall and magneto-resistance. Local control of the LaAlO$_3$/SrTiO$_3$ interfacial metal-insulator transition---through the graphene---is preserved with this transfer method. The use of perfluoropolymers such as Hyflon with CVD-grown graphene and other 2D materials can readily be implemented with other polymers or photoresists.
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