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arXiv 0906.2236cond-mat.mtrl-scicond-mat.mes-hall
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多晶Ni表面可控碳沉淀法生长大面积单层和双层石墨烯

Growth of large-area single- and bi-layer graphene by controlled carbon precipitation on polycrystalline Ni surfaces

Alfonso Reina, Stefan Thiele, Xiaoting Jia, Sreekar Bhaviripudi, Mildred S. Dresselhaus, Juergen A. Schaefer, Jing Kong

摘要:

我们报道了在大气化学气相沉积(CVD)过程中通过在多晶Ni薄膜表面上控制碳沉淀来生长主要由一层或两层石墨烯组成的石墨烯膜。控制CVD过程中的甲烷浓度和石墨烯生长过程中的衬底冷却速率可以显著提高厚度均匀性。结果,单层或双层石墨烯区域占据高达87%的膜面积。单层覆盖率占整个膜的5-11%。这些区域扩展穿过下面的多晶Ni膜的多个晶界。具有多层石墨烯/石墨(>2层)的位点的数密度随着冷却速率降低而降低。这些膜也可以转移到其他衬底上,并且它们的尺寸仅受Ni膜和CVD室的尺寸限制。在这里,我们展示了形成的膜大至1英寸2。这些发现代表了制造大规模高质量石墨烯样品的重要一步。

英文摘要:

We report graphene films composed mostly of one or two layers of graphene grown by controlled carbon precipitation on the surface of polycrystalline Ni thin films during atmospheric chemical vapor deposition(CVD). Controlling both the methane concentration during CVD and the substrate cooling rate during graphene growth can significantly improve the thickness uniformity. As a result, one- or two- layer graphene regions occupy up to 87% of the film area. Single layer coverage accounts for 5-11% of the overall film. These regions expand across multiple grain boundaries of the underlying polycrystalline Ni film. The number density of sites with multilayer graphene/graphite (>2 layers) is reduced as the cooling rate decreases. These films can also be transferred to other substrates and their sizes are only limited by the sizes of the Ni film and the CVD chamber. Here, we demonstrate the formation of films as large as 1 in2. These findings represent an important step towards the fabrication of large-scale high-quality graphene samples.

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