Experimental spectra from medium energy ion scattering were compared to Monte-Carlo simulations (employing the TRBS code) to obtain information on the scattering potential. The impact of uncertainties in the interatomic potential on quantification of sample properties such as thickness, composition or electronic stopping was investigated for different scattering geometries: backscattering and transmission. For backscattered He ions with tens of keV primary energy the scattering potential was found to overestimate the multiple scattering background in the energy spectra resulting in an uncertainty of < 3 % in quantitative analysis. Light ions transmitted through a sample for equivalent path length in the medium are only affected minorly by changes in the scattering potential. This effect becomes more distinct for heavier primary ions.
We investigated the specific electronic energy deposition by protons and He ions with keV energies in different transition metal nitrides of technological interest. Data were obtained from two different time-of-flight ion scattering setups and show excellent agreement. For protons interacting with light nitrides, i.e. TiN, VN and CrN, very similar stopping cross sections per atom were found, which coincide with literature data of N2 gas for primary energies <= 25 keV. In case of the chemically rather similar nitrides with metal constituents from the 5th and 6th period, i.e. ZrN and HfN, the el…
Energy spectra of backscattered and transmitted ions with primary energies of 50 keV and 100 keV interacting with self-supporting foils were recorded with a Time-of-Flight Medium-Energy Ion Scattering setup in a single experiment. Self-supporting Au and W foils without backing material were used. For He ions transmitted through Au the spectrum of detected particles shows two distinct components corresponding to different energy losses in the film, whereas for protons no such phenomenon was observed. To determine the origin of these different contributions, measurements for different angles of …
Self-sputtering of copper under high electric fields is considered to contribute to plasma buildup during a vacuum breakdown event frequently observed near metal surfaces, even in ultra high vacuum condition in different electric devices. In this study, by means of molecular dynamics simulations, we analyze the effect of surface temperature and morphology on the yield of self-sputtering of copper with ion energies of 0.1-5 keV. We analyze all three low-index surfaces of Cu, {100}, {110} and {111}, held at different temperatures, 300 K, 500 K and 1200 K. The surface roughness relief is studied …
Mechanism of Oxygen Reduction via Chemical Affinity in NiO/SiO2 Interfaces Irradiated with keV Energy Hydrogen and Helium Ions for Heterostructure Fabrication
We have measured the electronic energy-loss straggling of protons, helium, boron and silicon ions in silicon using a transmission time-of-flight approach. Ions with velocities between 0.25 and 1.6 times the Bohr velocity were transmitted through single-crystalline Si(100) nanomembranes in either channelling or random geometry to study the impact parameter dependence of energy-loss straggling. Nuclear and path length contributions to the straggling were determined with the help of Monte Carlo simulations. Our results exhibit an increase in straggling with increasing ion velocity for channelled …
We have simultaneously measured angular distributions and electronic energy loss of helium ions and protons directly transmitted through self-supporting, single-crystalline silicon foils. We have compared the energy loss along channelled and random trajectories for incident ion energies between 50 keV and 200 keV. For all studied cases the energy loss in channelling geometry is found lower than in random geometry. In the case of protons, this difference increases with initial ion energy. This behaviour can be explained by the increasing contribution of excitations of core electrons, which are …
In nano-capillaries of large aspect ratio, the attractive image charge force is strong enough to affect the trajectory of ions passing through capillaries and consequently to diminish the fraction of transmitted beam ions. We calculated the theoretically transmitted fraction, using an approached but CPU-friendly expression of the image charge force valid in the case of a static ion and an infinite cylindrical dielectric interface. When comparing the theoretically transmitted fraction to available experimental data for nano-capillaries with an inner diameter of less than 200 nm, we found a surp…
Track radii Re induced by swift heavy ions are studied. The experimental track data are analyzed in Gd2Ti2O7 pyrochlore in the range Se=6-54 keV/nm (Se - electronic stopping power) including irradiations by low and high velocity ions. The Analytical Thermal Spike Model (ATSM) is applied whose main features are reviewed. The track data of Gd2Ti2O7 exhibit scaling features which mean simple quantitative relationships with track sizes of other insulators controlled only by a single materials parameter (MP), the melting temperature Tm. The Re2-Se track evolution curve is described in the whole ran…
The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. The energy distributions in dependence on ion beam parameters (ion energy: 0.5 - 1 keV; ion species: Ne, Ar, Xe) and geometrical parameters (ion incidence angle, polar emission angle, scattering angle) are measured by means of energy-selective mass spectrometry. The presence of anisotropic effects due to direct sputtering and scattering is discussed and correlated with process parameters. The experimental results are compared to calculations based on a simple elastic bin…
Electronic stopping power in the \(\mathrm{keV/Å}\) range is accurately calculated from first principles. The energy loss to electrons in self-irradiated nickel, a paradigmatic transition metal, using real-time time-dependent density functional theory is studied. Different core states are explicitly included in the simulations to understand their involvement in the dissipation mechanism. The experimental data are well reproduced in the projectile velocity range of \(1.0 - 12.0~\mathrm{atomic~units}\). The core electrons of the projectile are found to open additional dissipation channels as the…
