离子轰击固体表面产生无缺陷纳米波纹
Producing Virtually Defect Free Nanoscale Ripples by Ion Bombardment of Rocked Solid Surfaces
摘要：
用宽入射离子束轰击固体表面经常会产生纳米尺度的表面波纹。阻止采用离子轰击作为纳米制造工具的主要障碍是通常形成的图案中的高密度缺陷。我们的模拟结果表明，离子轰击可以产生几乎无缺陷的涟漪的表面上的元素固体，如果样品是同时和周期性地摇摆轴正交的表面法线和入射光束的方向。我们还研究了摇摆产生高度有序的波纹所需的条件，并讨论了我们的模拟结果可以通过实验重现。
英文摘要：
Bombardment of a solid surface with a broad, obliquely-incident ion beam frequently produces nanoscale surface ripples. The primary obstacle that prevents the adoption of ion bombardment as a nano-fabrication tool is the high density of defects in the patterns that are typically formed. Our simulations indicate that ion bombardment can produce nearly defect free ripples on the surface of an elemental solid if the sample is concurrently and periodically rocked about an axis orthogonal to the surface normal and the incident beam direction. We also investigate the conditions necessary for rocking to produce highly ordered ripples and discuss how the results of our simulations can be reproduced experimentally.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
