碳上纳米图案和碳纳米图案
Nanopattern on Carbon and by Carbon
摘要：
我们报道了用低能惰性气体和碳离子束在碳薄膜和Si（100）表面形成纳米图案。观察碳作为纳米图案化的靶以及射弹的作用是有趣的。以碳薄膜为靶，通过惰性（Ar+）离子和自（C+）离子轰击形成碳纳米图形，而碳离子束以成本有效的方式用于形成良好有序的Si纳米波纹结构，其中注入碳在形成Si波纹中起重要作用，其注量比惰性射弹相对低。
英文摘要：
We have reported nanopattern formation on carbon thin film and Si(100) surfaces by low energy inert and carbon ion beams. It is interesting to observe the role of carbon as target as well as projectile for nano patterning. Using carbon thin film as target, nano patterns of carbon are formed by inert (Ar+) and self (C+) ion bombardment, whereas carbon ion beam is used to form well ordered Si nano ripple structure in a cost effective way where implanted carbon plays an important role to form Si ripple in relatively lower fluence than the inert projectile.
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