Monolithic Active Pixel Sensors (MAPS) have been developed since the late 1990s based on silicon substrates with a thin epitaxial layer (thickness of 10-15 $μ$m) in which charge is collected on an electrode, albeit by disordered and slow diffusion rather than by drift in a directed electric field. As a consequence, the signal is small ($\approx$ 1000 e$^-$) and the radiation tolerance is much below the LHC requirements by factors of 100 to 1000. In this paper we present the development of a fully Depleted Monolithic Active Pixel Sensors (DMAPS) based on a high resistivity substrate allowing the creation of a fully depleted detection volume. This concept overcomes the inherent limitations of charge collection by diffusion in the standard MAPS designs. We present results from a test chip EPCB01 designed in a commercial 150 nm CMOS technology. The technology provides a thin (50 $μ$m) high resistivity n-type silicon substrate as well as an additional deep p-well which allows to integrate full CMOS circuitry inside the pixel. Different matrix types with several variants of collection electrodes have been implemented. Measurements of the analog performance of this first implementation of DMAPS pixels will be presented.
Charge collection parameterization of MALTA2, a depleted monolithic active pixel sensor
Humboldt University of Berlin(柏林洪堡大学);Indian Institute of Technology Madras(马德拉斯印度理工学院);University of Oxford(牛津大学);University of Glasgow(格拉斯哥大学);Stony Brook University(石溪大学);CERN(欧洲核子研究中心);Ankara University(安卡拉大学);Los Alamos National Laboratory(洛斯阿拉莫斯国家实验室);University of Birmingham(伯明翰大学)
本文提出了一种快速模拟方法,用于 depleted monolithic active pixel sensor,通过数据驱动的电荷收集和传播参数化,为无法获取工艺细节的传感器提供高效替代方案,实现了高精度的像素效率模拟。
Test-beam results from MiniCACTUS-v2: A depleted monolithic CMOS timing sensor prototype
Institute for High Energy Physiscs (IFAE) Campus Autonomous University of Barcelona (UAB)(巴塞罗那自治大学高能物理研究所);Autonomous University of Barcelona (UAB)(巴塞罗那自治大学);Catalan Institution for Research and Advanced Studies (ICREA)(加泰罗尼亚研究与高级研究学院);University of Liverpool(利物浦大学)
TCAD + Allpi$\text{x}^2$ Simulation study of MALTA2, a Depleted Monolithic Active Pixel Sensor for future tracking
University of Birmingham(伯明翰大学);CERN(欧洲核子研究中心);Indian Institute Technology Madras(马德拉斯印度理工学院);University of Oxford(牛津大学);University of Glasgow(格拉斯哥大学);Stony Brook University(石溪大学);High Energy Accelerator Research Organization(高能加速器研究机构);Ankara University(安卡拉大学);Los Alamos National Laboratory(洛斯阿拉莫斯国家实验室)
本研究结合 TCAD 和 Allpi$\text{x}^2$ 的混合仿真框架,通过优化 N 型覆盖层掺杂浓度并利用掠射角方法,实现了对 MALTA2 传感器性能的准确模拟,活性深度与测量值偏差仅 2%。
TPA-TCT analysis of the RD50-MPW4 monolithic pixel particle detector
Universidad de Sevilla(塞维利亚大学);CERN(欧洲核子研究组织);NIKHEF(荷兰国家核子和亚原子物理研究所);Marietta Blau Institute for Particle Physics of the Austrian Academy of Sciences(奥地利科学院玛丽埃塔·布劳粒子物理研究所);Universidad Autónoma de Barcelona(巴塞罗那自治大学);University of Liverpool(利物浦大学);University of Bonn(波恩大学)
Development for the Belle II vertex detector upgrade with depleted monolithic active pixel sensors
Austrian Academy of Sciences(奥地利科学院);University of Bergamo(贝加莫大学);University of Pavia(帕维亚大学);CPPM(马赛粒子物理中心);Université Paris-Saclay(巴黎萨克雷大学);University of Applied Sciences and Arts Dortmund(多特蒙德应用科学与艺术大学);High Energy Accelerator Research Organization (KEK)(高能加速器研究机构(KEK));The Graduate University for Advanced Studies (SOKENDAI)(综合研究大学院大学(SOKENDAI));University of Tokyo(东京大学);Instituto de Fisica Corpuscular (IFIC), CSIC-UV(核物理研究所(IFIC),西班牙国家研究委员会-瓦伦西亚大学);Queen Mary University of London(伦敦大学玛丽女王学院);Jilin University(吉林大学)
Upgrade of the Belle II Vertex Detector with Depleted Monolithic CMOS Active Pixel Sensors
Marietta Blau Institute for Particle Physics, Austrian Academy of Sciences(玛丽亚·布劳粒子物理研究所,奥地利科学院);Department of Engineering and Applied Sciences, University of Bergamo(贝加莫大学工程与应用科学学院);Department of Electrical, Computer and Biomedical Engineering, University of Pavia(帕维亚大学电气、计算机和生物医学工程系);Dipartimento di Fisica “E. Fermi”, Università di Pisa(比萨大学“E. 费米”物理系);INFN Sezione di Pisa(意大利国家核物理研究所比萨分部);Aix Marseille Univ, CNRS IN2P3, CPPM(艾克斯-马赛大学,法国国家科学研究中心,法国国家核物理与粒子物理研究所,普罗旺斯粒子物理中心);Laboratoire de Physique des 2 infinis Irène Joliot-Curie – IJCLab, Université Paris-Saclay, CNRS IN2P3(巴黎-萨克雷大学,法国国家科学研究中心,法国国家核物理与粒子物理研究所,伊雷娜·约里奥-居里双无限物理实验室);Université de Strasbourg, CNRS, IPHC UMR 7178(斯特拉斯堡大学,法国国家科学研究中心,高能物理研究所);Physikalisches Institut, Rheinische(莱茵(威斯特法伦)联邦工业大学物理学院)
Belle II实验为应对更高的亮度,计划升级顶点探测器,采用耗尽单片主动像素传感器,设计高辐射容忍度和低功耗性能。
Charge collection properties of TowerJazz 180 nm CMOS Pixel Sensors in dependence of pixel geometries and bias parameters, studied using a dedicated test-vehicle: the Investigator chip
本文包含一个汇编的参数影响的电荷收集过程中提取的全面研究的部分耗尽单片有源像素传感器与小(<25 μ m $^2$)收集电极在TowerJazz 180 nm CMOS工艺制造。这些结果为ALICE第二代内跟踪系统芯片ALPIDE中二极管的优化提供了指导,并为今后类似器件的仿真研究提供了参考。研究的参数包括:反向衬底偏压、外延层厚度、电荷收集电极尺寸和电极与周围像素内电子器件的间距。来自28 μ m间距的像素的结果证实,即使在部分耗尽的电路中,电荷收集也可以是快速的(<10 ns),并且量化了参数对信号共享和幅度的影响,突出了阱之间的正确间距和反向衬底偏压的影响的重要性。
Impact of front-end parameters of the ARCADIA MD3 on charged particle detection
University of Padova(帕多瓦大学);Centro di Ateneo di Studi e Attività Spaziali CISAS "G. Colombo", University of Padova(帕多瓦大学 CISAS "G. Colombo" 大学中心空间研究与活动中心);University of Cassino and Southern Lazio(卡西诺及南拉齐奥大学);CERN(欧洲核子研究组织);Fermi National Accelerator Laboratory(费米国家加速器实验室);University of Florida(佛罗里达大学);California Institute of Technology(加州理工学院);A. I. Alikhanyan National Science Laboratory (Yerevan Physics Institute)(A.I.阿里汉尼扬国家科学实验室(埃里温物理研究所));INFN TIFPA, and Department of Industrial Engineering, University of Trento(特伦托大学工业工程系与 INFN TIFPA)